JPH01146565U - - Google Patents
Info
- Publication number
- JPH01146565U JPH01146565U JP4335188U JP4335188U JPH01146565U JP H01146565 U JPH01146565 U JP H01146565U JP 4335188 U JP4335188 U JP 4335188U JP 4335188 U JP4335188 U JP 4335188U JP H01146565 U JPH01146565 U JP H01146565U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- valve
- gas
- laser
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4335188U JPH01146565U (nl) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4335188U JPH01146565U (nl) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146565U true JPH01146565U (nl) | 1989-10-09 |
Family
ID=31269750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4335188U Pending JPH01146565U (nl) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146565U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH043987A (ja) * | 1990-04-20 | 1992-01-08 | Komatsu Ltd | エキシマレーザのガス注入方法 |
-
1988
- 1988-03-31 JP JP4335188U patent/JPH01146565U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH043987A (ja) * | 1990-04-20 | 1992-01-08 | Komatsu Ltd | エキシマレーザのガス注入方法 |