JPH01146565U - - Google Patents
Info
- Publication number
- JPH01146565U JPH01146565U JP4335188U JP4335188U JPH01146565U JP H01146565 U JPH01146565 U JP H01146565U JP 4335188 U JP4335188 U JP 4335188U JP 4335188 U JP4335188 U JP 4335188U JP H01146565 U JPH01146565 U JP H01146565U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- valve
- gas
- laser
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第1図は本考案の第1実施例を示す全体構成図
、第2図は本考案の第2実施例を示す全体構成図
、第3図は従来の実施例を示す全体構成図。
1…圧力容器、2…圧力計、3〜10,15〜
18…バルブ、11〜14…タンク、19,20
,21,26,27…配管、22…バルブ、31
…ハロゲンタンク、32…希ガスタンク、33…
Heタンク、34…Neタンク。
FIG. 1 is an overall configuration diagram showing a first embodiment of the present invention, FIG. 2 is an overall configuration diagram showing a second embodiment of the invention, and FIG. 3 is an overall configuration diagram showing a conventional embodiment. 1...Pressure vessel, 2...Pressure gauge, 3~10,15~
18...Valve, 11-14...Tank, 19,20
, 21, 26, 27...Piping, 22...Valve, 31
...Halogen tank, 32...Rare gas tank, 33...
He tank, 34...Ne tank.
Claims (1)
として使用するレーザ装置において、He及びN
eのガス供給配管を連結し、その間にバルブを配
置したことを特徴とするエキシマレーザ用ガス供
給装置。 In a laser device that uses He, Ne or He and Ne as a buffer gas, He and N
A gas supply device for an excimer laser, characterized in that the gas supply pipes of (e) are connected and a valve is arranged between them.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4335188U JPH01146565U (en) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4335188U JPH01146565U (en) | 1988-03-31 | 1988-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01146565U true JPH01146565U (en) | 1989-10-09 |
Family
ID=31269750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4335188U Pending JPH01146565U (en) | 1988-03-31 | 1988-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01146565U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH043987A (en) * | 1990-04-20 | 1992-01-08 | Komatsu Ltd | Method of gas injection for gas laser |
-
1988
- 1988-03-31 JP JP4335188U patent/JPH01146565U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH043987A (en) * | 1990-04-20 | 1992-01-08 | Komatsu Ltd | Method of gas injection for gas laser |