JPH01146534U - - Google Patents
Info
- Publication number
- JPH01146534U JPH01146534U JP4426088U JP4426088U JPH01146534U JP H01146534 U JPH01146534 U JP H01146534U JP 4426088 U JP4426088 U JP 4426088U JP 4426088 U JP4426088 U JP 4426088U JP H01146534 U JPH01146534 U JP H01146534U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- probe
- probe head
- attached
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426088U JPH01146534U (pl) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426088U JPH01146534U (pl) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146534U true JPH01146534U (pl) | 1989-10-09 |
Family
ID=31270628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4426088U Pending JPH01146534U (pl) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146534U (pl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240444A (ja) * | 1994-02-25 | 1995-09-12 | Aging Tesuta Kaihatsu Kyodo Kumiai | 半導体チップ試験装置 |
| JP2011226833A (ja) * | 2010-04-16 | 2011-11-10 | Micronics Japan Co Ltd | 圧力感知装置及びこれを用いるプローブカードの検査装置 |
-
1988
- 1988-03-31 JP JP4426088U patent/JPH01146534U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240444A (ja) * | 1994-02-25 | 1995-09-12 | Aging Tesuta Kaihatsu Kyodo Kumiai | 半導体チップ試験装置 |
| JP2011226833A (ja) * | 2010-04-16 | 2011-11-10 | Micronics Japan Co Ltd | 圧力感知装置及びこれを用いるプローブカードの検査装置 |