JPH01146522U - - Google Patents
Info
- Publication number
- JPH01146522U JPH01146522U JP1988043980U JP4398088U JPH01146522U JP H01146522 U JPH01146522 U JP H01146522U JP 1988043980 U JP1988043980 U JP 1988043980U JP 4398088 U JP4398088 U JP 4398088U JP H01146522 U JPH01146522 U JP H01146522U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- reaction tube
- growth
- substrate
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043980U JPH01146522U (enExample) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043980U JPH01146522U (enExample) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146522U true JPH01146522U (enExample) | 1989-10-09 |
Family
ID=31270360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988043980U Pending JPH01146522U (enExample) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146522U (enExample) |
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1988
- 1988-03-31 JP JP1988043980U patent/JPH01146522U/ja active Pending