JPH01146240U - - Google Patents
Info
- Publication number
- JPH01146240U JPH01146240U JP4203088U JP4203088U JPH01146240U JP H01146240 U JPH01146240 U JP H01146240U JP 4203088 U JP4203088 U JP 4203088U JP 4203088 U JP4203088 U JP 4203088U JP H01146240 U JPH01146240 U JP H01146240U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fixing
- edge
- lower edge
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988042030U JPH079152Y2 (ja) | 1988-03-31 | 1988-03-31 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988042030U JPH079152Y2 (ja) | 1988-03-31 | 1988-03-31 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01146240U true JPH01146240U (https=) | 1989-10-09 |
| JPH079152Y2 JPH079152Y2 (ja) | 1995-03-06 |
Family
ID=31268457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988042030U Expired - Lifetime JPH079152Y2 (ja) | 1988-03-31 | 1988-03-31 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079152Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366301U (https=) * | 1976-11-05 | 1978-06-03 | ||
| JPS6324552U (https=) * | 1986-08-01 | 1988-02-18 |
-
1988
- 1988-03-31 JP JP1988042030U patent/JPH079152Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366301U (https=) * | 1976-11-05 | 1978-06-03 | ||
| JPS6324552U (https=) * | 1986-08-01 | 1988-02-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079152Y2 (ja) | 1995-03-06 |