JPH01143935A - Icp emission analyzer - Google Patents
Icp emission analyzerInfo
- Publication number
- JPH01143935A JPH01143935A JP30398687A JP30398687A JPH01143935A JP H01143935 A JPH01143935 A JP H01143935A JP 30398687 A JP30398687 A JP 30398687A JP 30398687 A JP30398687 A JP 30398687A JP H01143935 A JPH01143935 A JP H01143935A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- plasma
- discharge
- counter electrode
- plasma torch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims abstract description 16
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 abstract description 3
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000000523 sample Substances 0.000 description 63
- 239000012159 carrier gas Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000001636 atomic emission spectroscopy Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【発明の詳細な説明】
イ、産業上の利用分野
本発明はICP(誘導結合プラズマ)発光分析装置に関
し、特にそのプラズマ炎への試料導入手段の構成に関す
る。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to an ICP (inductively coupled plasma) emission spectrometer, and particularly to the configuration of a means for introducing a sample into the plasma flame.
ロ、従来の技術
102発光分析では通常・、試料は溶液にして試料霧化
器で霧状にし、これをキャリヤガスの流れに乗せてプラ
ズマ炎に送込んでいる。しかしこの方法では多量の試料
を必要とするので微量試料に対しては、グラファイト試
料原子化炉とかタングステン等の高融点金属のボートを
用いた試料加熱器で、グラフアイドグ・ユーブ或は金属
ボートに直接通電し、その時発生ずるジュール熱で試料
を揮発させ、揮発した試料をキャリヤガスの流れに乗せ
てプラズマ炎まで送ると云う方法が用いられているが、
ジュール熱による加熱では充分な高温が得られず、難揮
発性試料の分析には利用できない。このような場合には
AG−I PCと呼ばれる方法が用いられる。これは試
料と電極を対向させてスパーク放電或はアーク放電を行
い試料を蒸発させる・もので、生成された試料蒸気はギ
ヤリヤガスの流れに乗せてプラズマトーチまで搬送する
ものである。B. Conventional Technique 102 In optical emission spectrometry, a sample is usually made into a solution, atomized using a sample atomizer, and then sent into a plasma flame along with a flow of carrier gas. However, this method requires a large amount of sample, so for very small samples, a sample heater using a graphite sample atomization reactor or a boat made of a high-melting point metal such as tungsten is used, and a graphite sample reactor or a sample heater using a boat made of a high-melting point metal such as tungsten can be used. The method used is to turn on electricity, volatilize the sample with the Joule heat generated at that time, and send the volatilized sample to the plasma flame in a carrier gas flow.
Heating using Joule heat does not reach a sufficiently high temperature and cannot be used to analyze difficult-to-volatile samples. In such cases, a method called AG-I PC is used. In this method, the sample and electrode are opposed to each other and spark discharge or arc discharge is performed to evaporate the sample, and the generated sample vapor is conveyed to the plasma torch in the flow of gear gas.
ハ0発明が解決しようとする問題点
上述したようにICI’発光分析法で難揮発性微量試料
を分析する場合、従来は八G−I PC法が用いられて
いたが、試料の揮散場所がプラズマト−チから離れてい
るため途中の管路壁に試料が付着して、手ヤリャガス流
路を汚染する」−1試料の損失となって微!!L試料の
場合感度が低下し、また管路中で蒸発した試料が再凝集
して粒子径が大となり、プラズマ炎中で完全に蒸発でき
ないため感度低下と共に分析値が不安定になる等の問題
があった。従って本発明は難揮発性の微量試料に対して
も高感度で安定した102発光分析を可能にしようとす
るものである。Problems to be Solved by the Invention As mentioned above, when analyzing a trace amount of a non-volatile sample using ICI' emission spectrometry, the 8G-I PC method was conventionally used. Because it is far away from the plasma torch, the sample adheres to the pipe wall along the way, contaminating the gas flow path.''-One sample is lost, which is very small! ! In the case of L samples, the sensitivity decreases, and the sample that evaporated in the pipe re-agglomerates and becomes larger in particle size, and cannot be completely evaporated in the plasma flame, resulting in decreased sensitivity and unstable analytical values. was there. Therefore, the present invention is intended to enable highly sensitive and stable 102 emission analysis even for a trace amount of sample with low volatility.
二0問題点解決のための手段
プラズマトーチの中心管に挿脱可能に試料台を設け、こ
の試料台とプラズマトーチ−上方に配置した対電極とを
スパーク放電或はアーク放電用電源の両極に接続すると
共に、試料台を試料台からコロナ放電を発生させる高圧
電源を接続し、プラズマトーチ上に形成されているプラ
ズマを貫通して試料棒と対電極との間にスパーク放電或
はアーク放電を行わせるようにした。20 Means for Solving Problems A sample stand is removably inserted into the center tube of the plasma torch, and this sample stand and a counter electrode placed above the plasma torch are connected to both poles of a power source for spark discharge or arc discharge. At the same time, connect the sample stand to a high-voltage power source that generates corona discharge from the sample stand, and create a spark discharge or arc discharge between the sample rod and the counter electrode by penetrating the plasma formed on the plasma torch. I made it happen.
ホ1作用
試料を試料棒の先端に付着させてプラズマトーチの中心
管に挿入し、プラズマ炎を貫通させて対電極と試料棒と
の間にスパーク放電或はアーク放電を行わせると、試料
棒先端の試料はスパーク放電或はアーク放電の集中的な
高温により瞬時に揮発し、試料蒸気がキャリヤガスの流
れにのってプラズマ炎に送られる。試料棒と対電極との
間の距離は大きいからプラズマトーチ上にプラズマ炎が
形成されていない状態では試料棒と対電極との間に特別
な高電圧を印加しない限りスパーク放電は起らないが、
高周波はプラズマが形成されている状態で試料棒に高電
圧を印加すると試料棒からコロナ放電が行われ、プラズ
マ炎からフィラメントプラズマが延びて来る。このため
対電極からプラズマ炎フィラメントプラズマを通って導
電チャンネルが形成されるので、対電極と試料棒との間
にスパーク或はアーク放電が行われるのである。E1 Effect When a sample is attached to the tip of a sample rod and inserted into the center tube of a plasma torch, and a plasma flame is passed through it to cause a spark discharge or arc discharge between the counter electrode and the sample rod, the sample rod The sample at the tip is instantly volatilized by the intensive high temperature of the spark discharge or arc discharge, and the sample vapor is carried by the carrier gas flow into the plasma flame. Since the distance between the sample rod and the counter electrode is large, unless a plasma flame is formed on the plasma torch, spark discharge will not occur unless a special high voltage is applied between the sample rod and the counter electrode. ,
With high frequency, when a high voltage is applied to the sample rod while plasma is being formed, a corona discharge is generated from the sample rod, and filament plasma is extended from the plasma flame. This creates a conductive channel from the counter electrode through the plasma flame filament plasma, resulting in a spark or arc discharge between the counter electrode and the sample rod.
へ、実施例
図は本発明の一実施例を示す。Tはプラズマトーチで、
外套管1.中間2.中心管3の三重管であり、外套管に
は冷却ガス、中管にはプラズマ形成用ガス、中心管には
キャリヤガスが供給される。4はプラズマ炎を形成させ
る高周波コイルである。中心管3の下部側方開口からキ
ャリヤガスが供給される。中心管の下端は開放されてい
て試料台5により閉塞されるようになっている。6はプ
ラズマトーチ上方に配置されたタングステンの対電極で
あり、7はスパーク放電用電源で、交流電源AC,昇圧
トランスT1整流回路D1放電エネルギー蓄積用コンデ
ンサC等よりなっており、両出力端子の一方が対電極7
に接続され、他方が試料台5に接続される。8はイグナ
イタとして用いられるテスラコイルで試料台5に接続さ
れる。Embodiment Figure 1 shows an embodiment of the present invention. T is for plasma torch,
Mantle tube 1. Intermediate 2. It is a triple tube with a central tube 3, and cooling gas is supplied to the outer tube, plasma forming gas is supplied to the middle tube, and carrier gas is supplied to the central tube. 4 is a high frequency coil that forms a plasma flame. Carrier gas is supplied from the lower side opening of the central tube 3. The lower end of the central tube is open and is closed by the sample stage 5. 6 is a tungsten counter electrode placed above the plasma torch, and 7 is a spark discharge power source, which consists of an AC power source, a step-up transformer T1, a rectifier circuit D, a discharge energy storage capacitor C, etc. One side is the counter electrode 7
and the other end is connected to the sample stage 5. 8 is a Tesla coil used as an igniter and connected to the sample stage 5.
試料は溶液の一滴を試料台5上に付着させ乾燥させて用
いる。或は粉状試料を試料台5表面の小穴に充填するよ
うにしてもよい。試料の付着した試料台をプラズマトー
チの中心管3の下端に取付け、外套管l、中間2.中心
管3夫々にガスを供給しコイル4に高周波電力を供給し
てプラズマ炎Fを形成させる。この状態で試料台5にテ
スラコイル8の高圧高周波電圧を印加すると試料台5か
らコロナ放電が行われ、生成されたイオンがキャリヤガ
スの流れに乗ってプラズマ炎Fまで達すると、プラズマ
炎から7、イラメント状のプラズマが延びて来て試料台
5に達する。他方スパーク放電用電源のコンデンサは充
電状態にあり、プラズマ炎Fから試料台5に向ってフィ
ラメントプラズマが形成されると対電極6とプラズマ炎
Fとの間に電界が集中して、その間のガスの絶縁が破れ
て対電極と試料台との間に一気にスパーク放電が行われ
、試料台5上に付着された試料が飛散せしめられる。こ
の試料がキャリヤガスの流れに乗ってプラズマ炎F内に
送られる。The sample is used by depositing a drop of the solution on the sample stage 5 and drying it. Alternatively, the powder sample may be filled into small holes on the surface of the sample stage 5. Attach the sample stage with the sample attached to the lower end of the central tube 3 of the plasma torch, insert the outer tube l, the middle tube 2. Gas is supplied to each of the central tubes 3 and high frequency power is supplied to the coil 4 to form a plasma flame F. In this state, when a high-pressure high-frequency voltage from the Tesla coil 8 is applied to the sample stage 5, a corona discharge is generated from the sample stage 5, and when the generated ions ride the carrier gas flow and reach the plasma flame F, the plasma flame 7, The filament-shaped plasma extends and reaches the sample stage 5. On the other hand, the capacitor of the spark discharge power supply is in a charged state, and when filament plasma is formed from the plasma flame F toward the sample stage 5, an electric field is concentrated between the counter electrode 6 and the plasma flame F, and the gas between them is The insulation is broken and a spark discharge occurs between the counter electrode and the sample stage 5 at once, and the sample attached to the sample stage 5 is scattered. This sample is sent into the plasma flame F along with the flow of carrier gas.
上述実施例では試料台と対電極との間に接続されるのは
スパーク放電電源であるが、放電エネルギー蓄積用コン
デンサの容量を太き(シ、コンデンサと対電極間に抵抗
或はインダクタンスを挿入しておけば放電は瞬間的なス
パーク放電から哨持続的なアーク放電に変わる。或はア
ーク溶接に用いるような漏洩トランスを用いた交流アー
ク放電電源を用いてもよい。この場合、フィラメントブ
ラズマが試料台まで到達してもアーク放電が開始できな
いので、対電極を手動で瞬間的にプラズマ炎中に挿入す
るようにするか、試料台と対電極間に別に高圧インパル
スを加える回路を接続しておく。 対電極6はスパーク
或はアーク放電用電源が直流の場合、コイル4を対電極
としてもよい。In the above embodiment, a spark discharge power supply is connected between the sample stage and the counter electrode, but the capacitance of the discharge energy storage capacitor is increased (i.e., a resistance or inductance is inserted between the capacitor and the counter electrode). If this is done, the discharge changes from an instantaneous spark discharge to a sustained arc discharge.Alternatively, an AC arc discharge power source using a leaky transformer such as that used for arc welding may be used.In this case, the filament plasma Arc discharge cannot start even when the sample stage is reached, so either manually insert the counter electrode momentarily into the plasma flame, or connect a separate circuit that applies a high voltage impulse between the sample stage and the counter electrode. The counter electrode 6 may be the coil 4 if the power source for spark or arc discharge is DC.
試料の形状は任意であって、溶液を塗着して乾燥させる
とか粉末を穴に充填するのに限らない。The shape of the sample is arbitrary, and is not limited to applying a solution and drying it or filling a hole with powder.
試料溶液を多孔質に含浸させたものでもよく、試料が導
電性なら試料自体を試料台としてもよいのである。A porous material impregnated with a sample solution may be used, and if the sample is conductive, the sample itself may be used as a sample stage.
ト、効果
本発明によれば試料はスパーク放電或はアーク放電の高
温により気化せしめられるので、難揮発性の試料でも分
析可能であり、試料の揮散場所がプラズマトーチの中心
管内であるから、試料揮散場所からプラズマ炎までの距
離が短(真っ直ぐだから揮散した試料は管壁に付着する
ことなく効率的にプラズマ炎に送られ、プラズマドーグ
−の試料による汚染が起らず、試料損失が少くなって、
微量試料でも感度よく分析することができる。Effects According to the present invention, since the sample is vaporized by the high temperature of spark discharge or arc discharge, even slightly volatile samples can be analyzed. The distance from the volatilization location to the plasma flame is short (straight), so the volatilized sample is efficiently sent to the plasma flame without adhering to the tube wall, and contamination with the Plasma Dawg sample does not occur, reducing sample loss. hand,
Even trace amounts of samples can be analyzed with high sensitivity.
図面は本発明の一実施例の側面図である。
T・・・プラズマトーチ、F・・・プラズマ炎、1・・
・外套管、2・・・中管、3・・・中心管、4・・・コ
イル、5・・・試料台、6・・・対TL極、7・・・ス
パーク放電用tft源、8・・・イグナイタ。
代理人 弁理士 縣 浩 介The drawing is a side view of one embodiment of the invention. T...Plasma torch, F...Plasma flame, 1...
- Outer tube, 2... Middle tube, 3... Center tube, 4... Coil, 5... Sample stage, 6... TL pole, 7... TFT source for spark discharge, 8 ...igniter. Agent Patent Attorney Kosuke Agata
Claims (1)
試料台を取付け、この試料台とプラズマトーチ上方に配
置した対電極とをスパーク放電或はアーク放電用電源の
両極に接続すると共に、上記試料台に試料台からコロナ
放電を発生させる高圧電源を接続したことを特徴とする
ICP発光分析装置。A sample stand is removably attached to the center tube of the plasma torch with the sample surface facing, and this sample stand and a counter electrode placed above the plasma torch are connected to both poles of a power source for spark discharge or arc discharge. An ICP emission spectrometer characterized in that a high-voltage power source that generates corona discharge from the sample stage is connected to the sample stage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30398687A JPH01143935A (en) | 1987-11-30 | 1987-11-30 | Icp emission analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30398687A JPH01143935A (en) | 1987-11-30 | 1987-11-30 | Icp emission analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01143935A true JPH01143935A (en) | 1989-06-06 |
Family
ID=17927665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30398687A Pending JPH01143935A (en) | 1987-11-30 | 1987-11-30 | Icp emission analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01143935A (en) |
-
1987
- 1987-11-30 JP JP30398687A patent/JPH01143935A/en active Pending
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