JPH01143295U - - Google Patents

Info

Publication number
JPH01143295U
JPH01143295U JP4134688U JP4134688U JPH01143295U JP H01143295 U JPH01143295 U JP H01143295U JP 4134688 U JP4134688 U JP 4134688U JP 4134688 U JP4134688 U JP 4134688U JP H01143295 U JPH01143295 U JP H01143295U
Authority
JP
Japan
Prior art keywords
transparent
electrostatic adsorption
voltage
adsorption device
transparent conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4134688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0619347Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4134688U priority Critical patent/JPH0619347Y2/ja
Publication of JPH01143295U publication Critical patent/JPH01143295U/ja
Application granted granted Critical
Publication of JPH0619347Y2 publication Critical patent/JPH0619347Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Elimination Of Static Electricity (AREA)
JP4134688U 1988-03-28 1988-03-28 静電吸着装置 Expired - Lifetime JPH0619347Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4134688U JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4134688U JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Publications (2)

Publication Number Publication Date
JPH01143295U true JPH01143295U (US06373033-20020416-M00071.png) 1989-10-02
JPH0619347Y2 JPH0619347Y2 (ja) 1994-05-18

Family

ID=31267787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4134688U Expired - Lifetime JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Country Status (1)

Country Link
JP (1) JPH0619347Y2 (US06373033-20020416-M00071.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03285579A (ja) * 1990-03-30 1991-12-16 Abisare:Kk 透明静電吸着シート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03285579A (ja) * 1990-03-30 1991-12-16 Abisare:Kk 透明静電吸着シート

Also Published As

Publication number Publication date
JPH0619347Y2 (ja) 1994-05-18

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