JPH01142842U - - Google Patents

Info

Publication number
JPH01142842U
JPH01142842U JP4091588U JP4091588U JPH01142842U JP H01142842 U JPH01142842 U JP H01142842U JP 4091588 U JP4091588 U JP 4091588U JP 4091588 U JP4091588 U JP 4091588U JP H01142842 U JPH01142842 U JP H01142842U
Authority
JP
Japan
Prior art keywords
liquid sample
flow cell
light
measuring device
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4091588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4091588U priority Critical patent/JPH01142842U/ja
Publication of JPH01142842U publication Critical patent/JPH01142842U/ja
Pending legal-status Critical Current

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  • Investigating Or Analysing Materials By Optical Means (AREA)
JP4091588U 1988-03-28 1988-03-28 Pending JPH01142842U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4091588U JPH01142842U (OSRAM) 1988-03-28 1988-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4091588U JPH01142842U (OSRAM) 1988-03-28 1988-03-28

Publications (1)

Publication Number Publication Date
JPH01142842U true JPH01142842U (OSRAM) 1989-09-29

Family

ID=31267370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4091588U Pending JPH01142842U (OSRAM) 1988-03-28 1988-03-28

Country Status (1)

Country Link
JP (1) JPH01142842U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007225335A (ja) * 2006-02-21 2007-09-06 Toribo Tex Kk 微粒子計数装置、これを用いる微粒子計数方法及びこれを備える潤滑対象部診断システム
JP2007311751A (ja) * 2006-05-17 2007-11-29 Taiwan Semiconductor Manufacturing Co Ltd 液浸リソグラフィシステムおよび半導体集積回路の液浸フォトリソグラフィパターニング方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007225335A (ja) * 2006-02-21 2007-09-06 Toribo Tex Kk 微粒子計数装置、これを用いる微粒子計数方法及びこれを備える潤滑対象部診断システム
JP2007311751A (ja) * 2006-05-17 2007-11-29 Taiwan Semiconductor Manufacturing Co Ltd 液浸リソグラフィシステムおよび半導体集積回路の液浸フォトリソグラフィパターニング方法
JP2011035425A (ja) * 2006-05-17 2011-02-17 Taiwan Semiconductor Manufacturing Co Ltd 液浸リソグラフィシステムおよび半導体集積回路の液浸フォトリソグラフィパターニング方法

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