JPH01142833U - - Google Patents

Info

Publication number

JPH01142833U

JPH01142833U JP3826888U JP3826888U JPH01142833U JP H01142833 U JPH01142833 U JP H01142833U JP 3826888 U JP3826888 U JP 3826888U JP 3826888 U JP3826888 U JP 3826888U JP H01142833 U JPH01142833 U JP H01142833U

Authority

JP

Japan

Prior art keywords

pressure sensor

diaphragm

semiconductor pressure

semiconductor

case

Prior art date

1988-03-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 8
• 239000010409 thin film Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000011521 glass Substances 0.000 description 1
• 238000003466 welding Methods 0.000 description 1

Cited By (2)