JPH01142753A - Developing device - Google Patents

Abstract

PURPOSE:To obtain a high-grade image regardless of kinds of toners by coating ceramics contg. Si and/or Ge atoms on the surface of a toner holding body and a control member for forming a thinner layer. CONSTITUTION:The ceramics contg. the Si and/or Ge atoms is coated on at least the surface of a developing roller 55 as the toner holding body and an elastic blade 57 as the control member for forming the thinner layer. The above- mentioned ceramics has a small coefft. of friction and, therefore, the wear of the roller 55 and the blade 57 by the friction thereof is decreased and the good image is obtd. stably even if the developing device is operated for a long period of time. Since the above-mentioned ceramics can be changed in the electric conductivity and electrical conductiveness over a wide range, the ground fogging in the case of using a toner having low electrostatic chargeability and the degradation in density in the case of using the toner having the high electrostatic chargeability are prevented by selecting the compsn. of the ceramics so as to meet the electrostatic chargeability of the toner. The high-grade image is thus obtd. regardless of the kinds of the toners.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention (Industrial Application Field) The present invention relates to an improvement in a developing device installed in an image forming apparatus such as an electronic copying machine.

(Prior Art) In general, a developing device in an image forming apparatus such as an electronic copying device has a two-component developing device, for example, as a developing processing means for visualizing an electrostatic latent image formed on a photoreceptor, which is an image bearing member. A method using a developer based on a magnetic component or a magnetic component is known.

However, in the development processing means using the above-mentioned two-component developer, it is necessary to accurately control the concentration ratio between the toner as the developer and the gear rear, whereas in the development processing means using the magnetic one-component developer, , since the toner contains a dark magnetic material, it not only causes problems such as difficulty in colorizing the toner, but also requires a magnetic roller as the developing roller that holds the developer in any development processing method. Therefore, the cost was extremely high.

Therefore, in order to solve the above-mentioned problems, a development processing means using a non-magnetic one-component developer has recently been proposed.

In a developing device using such a non-magnetic component developer, a mixer and a toner supply roller are arranged in a hopper containing toner, and the rotational action of these supplies the toner to the developing roller, which is a toner holding member. At the same time,
An elastic blade serving as a thinning regulating member is brought into contact with the outer periphery of the developing roller, and a thickness of approximately 30 μm is applied onto the developing roller.
A thin toner film layer of about m is formed.

The electrostatic latent image on the photoreceptor is developed by bringing this toner thin film layer close to and facing the photoreceptor, which is an image carrier.

By the way, in the above-mentioned developing device using the conventional non-magnetic component developer, since a negative polarity photoreceptor is used, the charge m after coating is approximately +12μ.
A positively chargeable toner having a charge of approximately C/g is used.

Such a developing system basically uses a high-resistance single-component toner, and the toner is charged by frictional charging between a developing roller and an elastic blade.

Furthermore, since the toner is conveyed as the toner and the developing roller rotate, it does not require magnetic conveyance unlike a two-component developer or a magnetic-component developer.

Therefore, a conventional developing device using a non-magnetic component developer can produce high-quality images with an extremely simple structure, is advantageous in terms of cost, and is said to be optimal for color printing.

(Problems to be Solved by the Invention) However, in the developing device using the above-mentioned conventional non-magnetic component type developer, while operating for a long time,
There was a problem in that the developing row as a toner holding member and the elastic blade as an illumination control member were worn out due to friction with the toner, resulting in a noticeable decrease in image (il) by 13 degrees and blurring of characters.

Also, since the elastic blade is made of metal or rubber, it is difficult to use with toner! There was a problem in that the FJ was large and the driving torque of the developing device increased.

Furthermore, when toner with low chargeability is used, background fog is likely to occur in the image, and conversely, when toner with high chargeability is used, the density of the image decreases, so the quality of the image depends on the type of toner used. There was a problem that the value fluctuated greatly.

The present invention was achieved as a result of studies aimed at solving the problems in the conventional developing device described above.

Therefore, an object of the present invention is to provide a developing device that can stably obtain high-quality images without background fog or density reduction even when used for a long time, and that also reduces driving torque. be.

[Structure of the Invention] (Means for Solving the Problems) That is, the developing device of the present invention includes a toner holder that holds non-magnetic to component-based toner that is conveyed to develop an electrostatic latent image; In a developing device comprising means for supplying the toner to the toner holding body and a thinning regulating member for thinning the toner on the toner holding body, the toner holding body and the thinning regulating member are provided. At least on the surface, S
It is characterized by being coated with ceramics containing i and/or Ge atoms.

(Function) The developing device of the present invention has Si J3 and/or Ge
Because it is coated with ceramics containing atoms, the long-term stability of copied images and the drive efficiency of the device are excellent, and it also produces stable high-quality images with no background fog or loss of density, regardless of the chargeability of the toner. You can do it.

In other words, since the ceramics have high hardness and excellent wear resistance, wear due to friction of the toner holding body and the IL1 layering regulating member is reduced, and the developing device remains stable even when operated for a long time. It is possible to obtain good images.

Further, since the ceramic has a small coefficient of friction, the N friction between the toner holding body and the layer thinning regulating member is reduced, and the driving torque of the developing device can be reduced.

Furthermore, since the electric conductivity and conductivity of the ceramics can be varied over a wide range, by selecting the composition of the ceramics according to the chargeability of the toner, background fog can be prevented even when toner with low chargeability is used. , the decrease in density that occurs when toner with high chargeability is used is eliminated, and high-quality images can be obtained regardless of the type of toner.

Therefore, according to the developing device of the present invention, it is possible to always obtain clear images without causing a drop in image temperature, blurring of characters, background fogging, etc.

(Example) Examples of the developing device of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic cross-sectional explanatory diagram of an electronic copy □ equipped with the developing device of the present invention, FIG. 2 is a schematic cross-sectional explanatory diagram showing the developing device of the present invention, FIG. 3 is a front explanatory diagram of the same part, and FIG. 5 is a schematic cross-sectional explanatory diagram showing the state of contact between the toner holder and the 17IJ layering regulating member in the developing device of the present invention, and FIG.
6 is a schematic cross-sectional explanatory view showing a ceramic plasma CVD coating apparatus for an i+1 member, FIG. 6 is a schematic side cross-sectional explanatory view showing a ceramic plasma CVD coating apparatus for a toner holder, FIG. FIG. 8 is a schematic cross-sectional view showing a ceramic sputtering coating apparatus for a thinning regulating member.

In FIG. 1, a photoreceptor 2 serving as an image carrier is provided in a substantially medium-sized portion of a copying machine main body 1 so as to be rotatable in the direction of the arrow.

Around the photoreceptor 2, there are
Charging device 3, imaging lens 4, developing bag M5, transfer device 6,
A cleaner 7 and a static eliminator 8 are arranged in this order.

Further, an optical system 9 for exposing a document to light is provided on the upper side of the main body 1, and a paper feed cassette 10 is installed on the lower side of the main body 1.

Paper is supplied from this paper feed cassette 10, and the supplied paper is configured to be transported along a transport path 11.

A lens T/roller 12, a fixing device 13, and a paper ejection roller 14 are arranged along the paper transport direction in the transport path 11.

Note that 15 in the figure is a paper discharge tray, and 16 is a document table.

When forming an image using the copying machine configured as described above, the optical system 9 irradiates light onto the document on the document table 16, and the reflected light forms an image on the photoreceptor 2 via the imaging lens 4. As a result, an electrostatic latent image is formed on the surface of the photoreceptor 20.

Then, a non-magnetic film is applied to this electrostatic latent image from the developing device 5.
A component-based developer (hereinafter simply referred to as toner) is supplied and visualized.

On the other hand, paper is supplied from the paper feed cassette 10 and sent between the photoreceptor 2 and the transfer wave N6, and the visible image on the photoreceptor 2 is transferred to the paper.

The transferred paper is conveyed to a fixing device 13 along a conveyance path 11, and after being fixed, the paper is discharged to a paper discharge tray 15 via a paper discharge roller 14.

Next, the developing device of the present invention will be described in detail with reference to FIGS. 2 to 4.

In FIGS. 2 and 3, the developing device 5 of the present invention includes a hopper-shaped developing unit 51, and a non-magnetic component developer (toner) 52 is stored in the developing unit 51.

In the developing unit 51, a supply roll 5 that supplies toner 52 to a developing roller 55 serving as a toner holding body is provided.
4 is provided in contact with the developing roller 55, and is configured to rotate in a direction opposite to the rotating direction of the developing roller 55.

Further, within the developing unit 51, a mixer (W1 stirring blade) 53 for stirring the stored toner 52 is rotatably provided.

The developing roller 55 has an elastic blade 57 as an ``RFI regulation member'' that forms a layer ``a'' of developer on the circumferential surface of the developing roller 55.
are pressed together, for example, at a pressure of about 20 to 500 Q/cm.

The upper end of this elastic blade 57 is held in a conductive state by a holder 56.

Further, a collecting blade 58 for collecting the toner 52 remaining on the surface of the developing roller 55 is in contact with the lower part of the developing roller 55 .

The developing roller 55 faces the photoreceptor 2 and can be rotated at variable speeds at a circumferential speed of 1 to 3 times the circumferential speed of the photoreceptor 2 by a driving means (not shown), so that an electrostatic latent image is formed. A direct current bias, an alternating current bias, or a bias that is a combination of direct current and alternating current is applied between the photoreceptor 2 and the developing roller 55.

Next, the operation of this developing device 5 will be explained.

The toner 52 stored in the developing unit 51 is agitated by the rotation of the mixer 53 and the supply roller 54, is conveyed by the supply roller 54, is rubbed against the development roller 55, and is roughly pressed into contact with the elastic blade 57. Then, the layer thickness is controlled and triboelectrically charged.

The sufficiently charged toner 52 is conveyed to a position facing the photoreceptor 2, faces the electrostatic latent image formed on the photoreceptor 2, and makes it visible.

Further, the toner 52 remaining on the surface of the developing roller 55 is
The collecting blade 58 returns the toner to the developing unit 51 .

Usually, the developing roller 55 is made of a metal surface, and the elastic blade 57 is made of a thin film of metal or rubber, but in the present invention, the surface of the developing roller 55 and/or the elastic blade 57 is made of Si /
Alternatively, it is characterized by being coated with ceramics containing Ge atoms.

That is, as shown in FIG. 4, in the developing device of the present invention, a ceramic layer 55Δ is formed on the surface of the developing roller 55.
is coated with a uniform thickness, and the front and back surfaces of the elastic blade 57 are also coated with ceramic layers 57A and 57.
B is coated with a uniform thickness.

Ceramics is a type of heat-resistant material that usually has aluminum oxide, silicon oxide, chromium oxide, clay, etc. as its main components, but it also refers to ceramics containing Si and/or Ge atoms used in the present invention. has particularly high hardness, excellent abrasion resistance and insulation properties, and can vary electrical conductivity over a wide range. By coating them, the developing roller 55 and the elastic blade 57 Not only can wear due to friction be effectively reduced, but also high-quality images can be obtained regardless of the type of toner by selecting the ceramic composition according to the chargeability of the toner.

The ceramics used for coating in the present invention must contain Si and/or Ge atoms, but other constituents include N, Oll'', and halogen atoms, with H or halogen atoms being one of them. ~40
It is desirable that the content be atomic%.

In the present invention, ceramics containing Sl and/or Qeli particles are applied to the developing roller 55 and the elastic blade 55.
The desired effect can be obtained by coating the surface of either one of the developing rollers 55 and the elastic blade 57, but a more desirable effect can be obtained by coating the surfaces of both the developing roller 55 and the elastic blade 57. .

Furthermore, when ceramics containing Si and/or Ge atoms are coated on the surface of either the developing roller 55 or the elastic blade 57, the remaining surface may be coated with a ceramic containing Si and/or Ge atoms. In this case, the other ceramic may be coated with Ti, W1AΩ, etc.
By using ceramics containing at least one type of atom selected from , B, and C, it is possible to expect effects such as a rough improvement in image quality, for example.

Among them, Ti and W-based ceramics have particularly high electrical conductivity, so when using toner with low chargeability, Ti and W-based ceramics may be used on the surface of either the developing roller 55 or the elastic blade 57. By coating one layer, sufficient image density can be achieved.

Furthermore, since AΩ, F3r3, and C-based ceramics have excellent insulating properties, by coating the surface of either the developing roller 55 or the elastic blade 57 with AΩ, B, or C-based ceramics, it is possible to Problems such as toner scattering from the developing roller 55 and contaminating the inside of the machine can be effectively eliminated.

The electrical conductivity and electrical conductivity of the ceramics containing Si and/or Ge atoms used in the present invention can be varied over a wide range as described above.

In addition, when coating the surface of the elastic blade 57 with ceramics, it is desirable to coat both the front and back sides with ceramics. Coating only on one side causes distortion of the elastic blade and reduces dimensional and shape stability. This is not desirable because it may occur.

A method of coating a developing roller and/or an elastic blade with ceramics will be described below.

In the method of the present invention, the developing roller and/or the elastic blade are coated with ceramics containing Si and/or Ge atoms.
Ion blasting, vacuum deposition, plasma CVD, E
Examples include methods such as CR plasma CVD1 thermal CVD and photo CVD.

Among these methods, this method has the following advantages: it has good pattern adhesion, can be processed at relatively low temperatures, does not damage the properties of the substrate, and can easily control the electrical and optical properties of the film. For the present invention, plasma CVD
and sputtering methods are most suitable.

FIG. 5 is a schematic cross-sectional view of a plasma CVD coating apparatus for a developing sleeve, and more specifically, a schematic view of a parallel plate type capacitively coupled plasma CVD apparatus.

In FIG. 5, a flat ground electrode 102 and a high frequency electrode 103 are placed facing each other in a vacuum chamber 101, and a substrate 104, such as an elastic blade made of gold R, is placed on the flat ground electrode 102.

Then, the chamber 101 is heated by a vacuum pump (not shown).
After evacuating the inside to about 10"3 Torr, the substrate 104 is heated by the heater 105 attached to the flat ground electrode 102.
Heat to about 150-450°C.

Next, the raw material gas is introduced into the chamber 10 from the gas inlet 106.
1, 0.05 Torr to 1.0 Torr
High frequency electrode 1 is evacuated while maintaining a vacuum level of
03 through the matching box 107.
Turn on the power from 08.

Then, a glow discharge occurs between the electrodes, the source gas is turned into plasma, and a ceramic thin film is formed on the substrate 104.

Next, plasma CVD of ceramics was applied to the developing roller.
The coating method will be explained with reference to FIGS. 6 and 7.

Figure 6 shows the plasma CV of ceramics for the developing roller.
FIG. 7 is a schematic side sectional explanatory view of the D coating apparatus, and FIG. 7 is a schematic plan sectional explanatory view thereof.

In FIGS. 6 and 7, a reaction chamber 201 having a rectangular cylindrical planar cross section is evacuated through an exhaust port 202 by a mechanical booster pump, an oil rotary pump (not shown), etc. It is designed to be maintained at a vacuum level.

Furthermore, various raw material gases are introduced into the reaction u201 through a gas inlet 205.

A storage chamber 207 is installed above the reaction chamber 201 via an insulator 206, and this storage chamber 207 is electrically insulated from the reaction chamber 201 by the insulator 206.

Further, the storage chamber 207 is partitioned from the reaction chamber 201 by a partition plate 208.

A plurality of support rods 209 are inserted through the partition plate 208 with the longitudinal direction thereof being perpendicular.

A collar 210 is fitted and fixed to each support rod 209, and by locking the collar 210 to the partition plate 208, each of the support rods 209 is prevented from falling.

A gear 212 as a driving means is fitted to the upper end of each support rod 209, and a presser foot 211 fitted and fixed to each support rod 209 below the gear 212 causes the gear 212 to be attached to each support rod 209. Supported.

Adjacent gears 212 are in mesh with each other, and when the central gear is rotationally driven by the drive device 214, all gears 212 rotate and each support rod 209 rotates. There is.

The lower end of each support rod 209 has a female thread (not shown).
A male thread (not shown) is formed at the upper end of the support (developing roller) 213 used for coating.

Therefore, the support body 213 is attached to each support rod 209 by screwing these screws together.

Further, a drive device 214 is provided above the storage chamber 207, and when the gear 212 is rotated by the drive of the drive device 214, the support body 213 is rotated about its axis.

As shown in FIG. 7, the supports 213 are arranged substantially in the center of the reaction chamber 201 in a line.

A pair of flat electrodes 215 and 216 are provided oppositely on both sides of the row of supports 213.

Since the flat electrodes 215 and 216 have a large number of holes, the reaction chamber 20 can be connected through the gas inlet 205.
The raw material gas introduced into the reaction chamber 2 passes through this hole.
It is supplied to the center of 01.

Further, the flat electrodes 215 and 216 are connected to the reaction chamber 201.
The reaction '? 201 and is connected to a high frequency power source 218 via a matching box 217.

When operating the plasma CVD coating apparatus configured as described above, first, a plurality of supports 213 are installed in the reaction chamber 201, and then the supports 213 are rotated at an appropriate speed by the drive device 214, and The inside of the reaction chamber 201 is evacuated to about 10-3 Torr.

While continuing the evacuation in this way, the raw material gas is introduced through the gas inlet 205 to bring the inside of the reaction chamber 201 to zero, for example.
．． When the pressure is adjusted to 1 Torr to 1.0 Torr, since the support body 213 is grounded through the storage chamber 207, plasma is generated between the flat electrodes 215 and 216 and the support body 213, and the raw material A thin film having a composition containing the main constituent elements in the gas is formed on the support 213.

In this case, since the support body 213 is rotating, the thin film is uniformly formed on the circumferential surface of the support body 213.

In the plasma CVD coating method described above, by appropriately controlling the mixing ratio of raw material gases,
Ceramics with various properties can be obtained.

For example, if SiH4 is used alone, amorphous silicon will be obtained; if mixed with a gas containing metal atoms selected from Groups I and V of the periodic table, B2H6, PH3, etc. Electronic control becomes possible.

Also, when N2 or N83 is mixed with S f H4, amorphous silicon nitride is obtained, and 02 or N20
When mixed, amorphous silicon oxide 17 is obtained.

Furthermore, it is also possible to mix a plurality of these gases; for example, by mixing CH4 and N2 with s + H4, amorphous silicon carbide containing nitrogen can be formed.

Among these materials, amorphous silicon has the smallest optical bandgap and resistivity, followed by carbides, nitrides, and oxides.

On the other hand, their mechanical strength also differs; for example, in terms of Vickers hardness, amorphous silicon has a hardness of 10
00, silicon carbide is 2500°, silicon nitride is 200
Since the hardness of silicon oxide is approximately 0.0 and 1500, a desired hardness can be appropriately selected.

Also, as mentioned above, Zhou 117JtJ! It is possible to control the valence charge by doping metal atoms selected from Groups Ⅰ and Ⅲ in the table, and this allows the electrical resistance to be increased from 103 to 1.
Since the specific resistance and conductivity of the ceramic can be changed up to approximately 0.00 Cm, the specific resistance and conductivity of the ceramic can be selected in accordance with the characteristics and chargeability of the toner.

Regarding ceramics containing Ge atoms, amorphous germanium can be formed by using GeH4, and nitrides, carbides, and oxides can also be obtained like the above-mentioned Si.

Furthermore, the valence charge can be controlled by doping with metal atoms selected from Groups I and V of the Periodic Table.

However, when using Ge, compared to the case of Sl,
The mechanical strength of ceramics is slightly inferior, and the optical band gap and specific resistance are small.

Hydrocarbons and H2 such as CH4, C2Ha and C2H2
is used.

Furthermore, raw material gases for coating ceramics based on BN or BC include B2 Ha,
BF3, BOD5, etc., and N2, NH3, CH
4 and C2Ha.

Typical conditions for raw material gas, pressure, and electric power used for plasma coating the target composition of the present invention are shown below.

■, Amorphous silicon 1, Raw material gas S i H4100SCCM pressure
1.0Torr Power 100W Specific resistance 1010Ωcm (I type) 2. Raw material gas S! H4100SCCMB2 He
/S i H41Xl 00-5SCC pressure
1.0Torr Power 100W Specific resistance 107Ωcm (P type) 3. Raw material gas S i H4100SCCM82 Ha
/S i H41X 100-2SCC pressure
1.0 Torr Power ioow Specific resistance 104Ωcn+ (p type) 4, raw material gas
S i H41003CCMPH3/S i H41X
100-5 SCC pressure 1. QTorr Power 100W Specific resistance 107Ωcm (n type) 5, Raw material gas S i H4100SCCMPH3/5
in41lX10-23CC pressure 1.0 Tor
r Power 100W Specific resistance 104Ωcm (n type) ■, Amorphous silicon carbide 1, Raw material gas S i H4100SCCMCH420
0SCCM Pressure 1. □Torr Power ioow Specific resistance 1Qci (I type) 2, Raw material gas S i H4100SCCMCH420
0SCCM B2Ha/SiH+ 1lX10-5SCC pressure
1.0Torr Power ioow Specific resistance 109Ωcm (p type) 3. Raw material gas 51g4 100S1005CC200
SCCM B2 He /S i L12 1 X 10
0-2SCC pressure 1.0Torr Power 100W Specific resistance 106Ωcm (P type) 4. Raw material gas S i H4100SCCMCH420
0SCCM PH3/S i H41X 100-5SCC Pressure 1. Qlorr Power 100W Specific resistance 109Ωcm (n type) 5, Raw material gas S i H4100SCCMCH420
0SCCM PH3/S i H41X 100-2SCC Pressure 1.0 Torr Power 100W Specific resistance 106Ωcm (n type) ■, Amorphous silicon nitride 1, Source gas S i H450SCCMN2
800〃 Pressure 1.0Torr Power 300W Specific resistance 100cm (I type) 2, Raw material gas S i H4500SCCMN 2
800 n 82 He /S + H41X 10-'SC
CM pressure 1. Ql”Orr Power 300W fi [Anti 109Ωam (P type) 3, Raw material fj:
1. SiH41001005CC800I/B2 Hs/SiH41X10″ISCCM pressure
1.0Ωorr Power 300W Specific resistance 106Ωcm (p type> 4, Raw material gas S i H4100SCCMN 2
800 n PH3/SiH41X'10-'SCCM pressure
1.0 Torr Power 300W Specific resistance 109Ωam (n type) 5. Raw material gas S i H4100SCCMN2
800II PH3/S! H41
1! Y King power 1.0 Torr power 100W +4 specific resistance 100cm (i type) 2, raw material gas S i H4100SCGM02
200II B2Ha/SiH41XIO-”800M pressure
1.0 TOrr Power 100W Specific resistance 100cm (P type) 3. Raw material gas S i H4100SCCMO2200
1I B2 Ha /S i t-1i 1 X 110
-2SCC pressure 1.0Torr Power 100W Specific resistance 1070cm (P type) 4. Raw material gas S i H41008CGM02
2001/ PI-(3/5it-141lX10-5SCC pressure
1, ○T orr Power 100W Specific resistance 10ゝ0Ωcm (n type) 5, Raw material gas
S i H4100SCCMPH3/S i H41X
100-2SCC pressure 1.0Torr Power 100W Specific resistance 107Ωcm (n type) ■, Amorphous germanium 1, Source gas GeH4100SCCM Pressure 1
．． 0Torr Power 100W Specific resistance 1070107O type) 2. Raw material gas Gem4 100SCCMB2 H
a /Ge H41X 100-58CC pressure
1.0 Torr Power 100W Specific resistance 105Ωcm (P type) 3. Raw material gas Ge H4100SCCMB2 H
a /Ge t1s 1X
1 0-2800M pressure 1. QTorr power 100W ratio 1a resistance 10”0cm (P type) 4. Raw material gas Ge H4100SCCMPH3/Ge
t-141x10-5SCCM pressure 1.0To
rr Power 100W Specific resistance 1050cm (n type) 5. Raw material gas Qe H4100SCCMPH3/Ge
H4'IlX10-2SCC pressure 1.0 Tor
r Power 100W Specific resistance 103Ωcm (n type) ■, Amorphous germanium carbide 1, Raw material gas Ge H4100SCCMCH4200
SCCM Pressure 1.0 Torr Power 100W Specific resistance 100cm (I type) 2. Raw material gas Ge H4100SCCMC11420
0SCCM B2Hs/GeHq lXl0-”800M pressure
1.0 Torr Power 100W Specific resistance 1080cm (P type) 3. Raw material gas Ge H4100SCCMCH4200
SCCM 82 Ha /Ge H41X 100-2SCC Pressure 1.0 Torr Power 100W Specific resistance 105Ωcm (p type) 4. Raw material gas Qe H4100SCCMCH4200
SCCM PH3/Ge 84 1
4 200 S CCMPH3'Ge H
41X 1 0-2800M pressure 1.0TO
rr Power 100W Specific resistance 105Ωam < n-type) I, amorphous amorphous germanium nitride raw material gas Ge Ls 50SCCMN2
800〃 Pressure 1.0Torr Mino) Ge 300W Specific resistance 1
0 ΩCll1 (i type) 2, raw material gas Ge H450
SCCMN2 800〃 82Ha/GeH41xlO-'SCCM pressure
1.0 Torr Power 300W Specific resistance 108Ωcm (P type) 3. Raw material gas Ge H450SCCMN2
800! I B2 Ha /Ge H41X 10-' 80
0M pressure 1. QTorr Power 300W Specific resistance 1080cm (P type) 4, Raw material gas Qe H450s c c xiN 2
8001l PH3/Ge t-1+ 1X
1 0-' SCC~1 pressure horn
1. Q7orr Power 300W Specific resistance 108Ωcm (n'M)5, Raw material gas Ge H450SCCMN2 800I
I PH3/Ge H41 ) 2. Raw material gas GeH,s 1001005CC2
00IJ 82 1-1a /Ge H41X 1
0-5800M Pressure 1.0 Torr Power 100W Specific resistance 109Ωcm (P type) 3. Raw material gas Ge H4100SCCMO22001
I B21-16/GQ H41X 100-23CC Pressure 1.0 Torr Power 100W Specific resistance 1060cm (P type) 4. Raw material gas Ge H4100SCCM02
2007/ PI-13/Ge H41X 1 00-5SCC Pressure 1.0 Torr Power 100W Specific resistance 109ΩCl1 (n type) 5, source gas
GeH41001008CG 200JI PH3/GeH41lX10-2SCC pressure
1.0 Torr Power 100 W Specific resistance 106 Ωcm (n-type) FIG. 8 is a schematic cross-sectional view showing a ceramic sputtering coating apparatus for an elastic sleeve.

The apparatus shown in FIG. 8 is almost similar to the plasma CVD apparatus shown in FIG. There is.

In this sputtering coating apparatus, Ar gas or, in some cases, a mixture of Ar gas and raw material gas is introduced from the gas inlet 106, and these gases turn into plasma, and △r ions attack the target metal in atomic or After being blown out in the form of molecules, ceramics of various compositions are formed while reacting in the plasma of the reactive gas, and are adhered to the substrate 104 as a thin layer.

Typical conditions for the target, raw material gas, pressure, and power used for sputtering coating the target composition of the present invention are shown below.

■, Silicon carbide 1, Target Sintered silicon carbide raw material gas Ar 1108CC Pressure 1, Qx 10-3Torr power
500W 2゜Target Single crystal silicon raw material gas 8r 108C10 8CC5011 Pressure 1, Ox 10' Torr Power
500W ■, Silicon nitride 1, Target Sintered silicon nitride raw material gas Ar 1108CC Pressure 1, Ox 10' Torr Power
500W 2. Target Single crystal silicon raw material gas Ar 10800M NH350 // Pressure 1. OX 10' Torr Power
500W ■, Rized silicon 1, target Silicon oxide raw material gas Ar 1105CC Pressure 1. OXI○-3 Torr Power 500 W Test examples and comparative examples specifically showing the effects of using the developing device of the present invention will be described below.

(Test Example 1) Both the front and back surfaces of an elastic blade made of SUS304 were coated with ceramics containing Si atoms to a thickness of 081 to 20 μm using the plasma CVD coating apparatus shown in FIG.

In addition, the surface of the developing roller was sandblasted to have a surface roughness of 3.0 μmRZ, and the surface of the developing roller was coated with Si atoms using the plasma CVD coating apparatus shown in FIGS. 6 and 7. The ceramic was coated with a thickness of 0°1 to 20 μm.

A non-magnetic component toner containing 10% magnetic powder was stored in the hopper of the developing device in which the above elastic sleeve and developing roller were set, and a line load of 20 ko was applied to it. @Structure of the device shown in Figure 1) 4
When the image was formed on 100,000 sheets of paper using a copying machine of Good images could be continuously obtained even after formation.

In addition, the driving torque in the developing device during image formation is reduced to 71
111 was determined to be 1.8 kg-cm, and no contamination due to toner scattering was observed in the main body of the apparatus.

Next, the composition of the non-magnetic component toner was changed to a positively charged non-magnetic component toner containing a styrene-acrylonitrile copolymer, 4.0% by weight of carbon, and 4% other additives. When an image was formed under the same conditions as above except for the above, a clear image without background fog could be obtained (q).

In addition, when the amount of charge of the toner in this case was measured, it was found to be 1
It was extremely sufficiently charged at 2 μC/g.

(Comparative Example 1) In the above-mentioned test example, using a 5US304H elastic blade not coated with ceramics and a developing roller with electroless Ni plating on the surface of the aluminum roller, paper 10 was developed under the same conditions as in the above test example. When images were formed on 10,000 sheets, the contact portion of the elastic sleeve with the developing roller wore out by 2.0 μm, and the surface roughness of the developing roller, which had an initial surface roughness of 3.0 μmRZ, decreased to 0.6 μmRZ. As a result, the amount of toner conveyed on the developing roller decreases, and in subsequent image formation,
It was not possible to obtain sufficient image density.

Further, when the driving torque in the developing device during image formation was measured, it was as high as 2.5 kg-arII, and the load on the driving device was large compared to the above-mentioned test example.

Roughly speaking, the composition of the non-magnetic component toner was changed to styrene-acrylonitrile copolymer and carbon 4.0ff1.
When an image was formed under the same conditions as above, except that the toner was changed to a positively charged non-magnetic component toner containing 1% and other additives 4 [1%], the charge amount of the toner was 1%.
It was as low as 0 μC/Q, and background fog was seen in the image.

(Test Example 2) Ceramics containing amorphous silicon and amorphous silicon carbide as a matrix were applied to the elastic blade and developing roller used in Test Example 1 above under the film forming conditions described on pages 25 to 28 above. When we formed images using various toners on the coated products and evaluated the suitability of the toners, we found that the optimal toner could be selected depending on the composition of the ceramics, as shown below. .

(The following is a blank space) [Effect of the Invention 1 As explained in detail above, the developing device of the present invention has S
Coated with ceramics containing i and/or Ge atoms, the long-term stability of the copied image and the driving efficiency of the device are excellent.Furthermore, even when using toner with low chargeability, high-quality images can be produced without background fog. images can be obtained.

In other words, since the ceramics have high hardness and excellent wear resistance, wear due to friction of the toner holding body and the layer thinning regulating member is reduced, and the developing device remains stable and good even when operated for a long time. You can get a good image.

Further, since the ceramic has a small coefficient of friction, the friction between the toner holding body and the layer thinning regulating member is reduced, and the driving torque of the developing device can be reduced.

Furthermore, since the electric conductivity and conductivity of the ceramics can be varied over a wide range, by selecting the composition of the ceramics according to the chargeability of the toner, it is possible to change the electrical conductivity even when using toner with low chargeability. This eliminates fogging and density loss when using highly chargeable toner, making it possible to obtain high-quality images regardless of the type of toner.

Therefore, according to the developing device of the present invention, it is possible to always obtain clear images without causing a decrease in image density, blurring of characters, background fogging, etc.

[Brief explanation of the drawing]

FIG. 1 is a schematic cross-sectional explanatory diagram of an electronic copying unit equipped with the developing device of the present invention, FIG. 2 is a schematic cross-sectional explanatory diagram showing the developing device of the present invention, FIG. 3 is a front explanatory diagram of the same part, and FIG. 5 is a cross-sectional explanatory diagram showing the contact state of the toner holding body and the thinning regulating member in the developing device of the present invention, and FIG. 6 is a schematic side cross-sectional view showing a ceramic plasma CVD coating apparatus for a toner holder, FIG. 7 is a schematic plan cross-sectional view of the same, and FIG.
FIG. 2 is a schematic cross-sectional explanatory diagram showing a ceramic sputtering coating apparatus for a yJ layering regulating member. 5...Developing device

Claims (4)

[Claims] (1) A toner holder that holds non-magnetic one-component toner conveyed to develop an electrostatic latent image, a means for supplying the toner to the toner holder, and a means for supplying the toner to the toner holder, and a means for supplying the toner to the toner holder. The developing device is equipped with a thinning regulating member that thins the layer, characterized in that at least the surfaces of the toner holder and the thinning regulating member are coated with ceramics containing Si and/or Ge atoms. developing device. (2) The ceramic containing Si and/or Ge atoms further contains metal atoms selected from Groups III and V of the periodic table. The developing device according to item 1). (3) Ceramics used for coating contain N,
The developing device according to claims (1) and (2), characterized in that the developing device contains at least one type of atom selected from O, H, and halogen. (4) Claims (1) to (3) characterized in that the ceramic used for coating contains 1 to 40 atomic% of H or halogen atoms.
) The developing device described in item 1.