JPH01142594U - - Google Patents

Info

Publication number
JPH01142594U
JPH01142594U JP3768088U JP3768088U JPH01142594U JP H01142594 U JPH01142594 U JP H01142594U JP 3768088 U JP3768088 U JP 3768088U JP 3768088 U JP3768088 U JP 3768088U JP H01142594 U JPH01142594 U JP H01142594U
Authority
JP
Japan
Prior art keywords
disk
compression pump
stationary
housing
thrust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3768088U
Other languages
English (en)
Japanese (ja)
Other versions
JP2546174Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988037680U priority Critical patent/JP2546174Y2/ja
Publication of JPH01142594U publication Critical patent/JPH01142594U/ja
Application granted granted Critical
Publication of JP2546174Y2 publication Critical patent/JP2546174Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988037680U 1988-03-24 1988-03-24 複合真空ポンプ Expired - Lifetime JP2546174Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988037680U JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988037680U JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Publications (2)

Publication Number Publication Date
JPH01142594U true JPH01142594U (zh) 1989-09-29
JP2546174Y2 JP2546174Y2 (ja) 1997-08-27

Family

ID=31264257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988037680U Expired - Lifetime JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Country Status (1)

Country Link
JP (1) JP2546174Y2 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2108844A2 (en) 2008-03-26 2009-10-14 Ebara Corporation Turbo vacuum pump
JP2009235923A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
JP2009257212A (ja) * 2008-04-17 2009-11-05 Ebara Corp ターボ型真空ポンプ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730998A (en) * 1980-06-25 1982-02-19 Westinghouse Electric Corp Method of fixing nuclear waste
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61185696A (ja) * 1985-02-13 1986-08-19 Hitachi Ltd 分子ポンプ
JPS6229796A (ja) * 1985-07-31 1987-02-07 Hitachi Ltd 真空ポンプ
JPH01167495A (ja) * 1987-12-23 1989-07-03 Hitachi Ltd 真空ポンプ
JPH0219694A (ja) * 1988-07-08 1990-01-23 Ebara Res Co Ltd オイルフリー型真空ポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730998A (en) * 1980-06-25 1982-02-19 Westinghouse Electric Corp Method of fixing nuclear waste
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61185696A (ja) * 1985-02-13 1986-08-19 Hitachi Ltd 分子ポンプ
JPS6229796A (ja) * 1985-07-31 1987-02-07 Hitachi Ltd 真空ポンプ
JPH01167495A (ja) * 1987-12-23 1989-07-03 Hitachi Ltd 真空ポンプ
JPH0219694A (ja) * 1988-07-08 1990-01-23 Ebara Res Co Ltd オイルフリー型真空ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2108844A2 (en) 2008-03-26 2009-10-14 Ebara Corporation Turbo vacuum pump
JP2009235923A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
US8109744B2 (en) 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
JP2009257212A (ja) * 2008-04-17 2009-11-05 Ebara Corp ターボ型真空ポンプ

Also Published As

Publication number Publication date
JP2546174Y2 (ja) 1997-08-27

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