JPH01142520A - Measuring microscope - Google Patents

Abstract

PURPOSE:To inspect workpiece without removing it from the table of a machine tool and to three-dimensionally measure large or heavy stuff readily by providing a fitting member loaded onto the tool fitting part of the machine tool. CONSTITUTION:A measuring microscope 1 measures the workpiece 8 fixed to the table 9 by loading the fitting member 7 of the measuring microscope 1 onto a chuck 6 at the end of the working of the workpiece 8. Measurement is as follows: a measuring person focuses an objective lens 5 on the measured point of the workpiece 8 while peeping through a contact lens 2, moves the table 9 to a next measured point, focuses the objective lens 5 similarly, uniformizes the interval between the objective lens 5 and the measured point, reads the coordinates of axes X, Y and Z in each measured point, and calculates distances. Moving amounts in the directions of axes X, Y and Z are digitally displayed on an XYZ axis display device 12 by means of a linear encoder 10 connected to the table 9 and a display device driving circuit 11. Thus, the dimensions of workpiece can be measured simply and precisely.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a measuring microscope capable of three-dimensionally measuring the dimensions of a workpiece machined by a machine tool.

(Prior Art) Conventionally, workpieces processed by machine tools have been inspected by removing the workpiece from the machine tool and placing it on the table of a dedicated measuring microscope, or by measuring it with calipers or a micrometer.

In addition, when measuring a workpiece while it is attached to a machine tool, a dial is fixed to the tool mounting part of the machine tool, a contact point is brought into contact with the workpiece, and the scale of this dial is read and measured.

(Problems to be Solved by the Invention) In the former case of the above-mentioned conventional technology, there is a problem in that the workpiece must be removed from the machine tool once during measurement, which increases the number of inspection steps. Furthermore, it may not be possible to measure small parts or parts with depressions. Furthermore, the table of the measuring microscope was relatively small and not very strong, so large workpieces could not be placed on it.

Furthermore, in the latter case of the above-mentioned conventional technique, there are problems in that the measurement stylus contacts the surface of the workpiece and performs the measurement, which results in a long measurement time and a large measurement error.

The present invention has been made in view of the problems of the prior art described above, and an object of the present invention is to provide a measuring microscope that can easily and accurately measure the dimensions of a workpiece.

[Structure of the invention]

(Means for Solving the Problems) The present invention is a measuring microscope that has a microscope optical system including an objective lens and an eyepiece, and is provided with a mounting member that can be mounted on a tool mounting section of a machine tool.

Further, the present invention has a microscope optical system including an objective lens and an eyepiece, and is provided with a light emitting element and a condensing optical system that connect a spot to the focal position of the objective lens, and is focused by a relative positional relationship with respect to the spot light. The measuring microscope has a hairline indicating the position at the focal point of the microscope optical system.

(Function) The measuring microscope of the present invention is attached to a machine tool so that a workpiece can be measured immediately after being machined.

Further, the measuring microscope of the present invention is capable of objectively and easily focusing an objective lens when it is attached to a machine tool and measures a workpiece.

(Example) Examples of the present invention will be described below based on the drawings.

FIG. 1 shows a first embodiment of the present invention, in which a measuring microscope 1 has an eyepiece 2, a focusing glass 3, a prism 4, and an objective lens 5. Coaxially with the optical axis of the objective lens 5, A mounting member 7 is provided to be mounted on a chuck 6, which is a tool mounting portion of a machine tool.

Further, as is well known, the machine tool is provided with a table 9 for fixing the workpiece 8 and a linear encoder 10 for detecting the amount of movement of this table 9 in the X, Y, and Z axis directions. XY after 11
It is input to the Z-axis display device 12. Here, the X axis and the Y axis refer to orthogonal coordinates within the plane of the table 9, and the Z axis refers to the XY axis.
It is a coordinate axis perpendicular to the axis.

In the measuring microscope 1 of this embodiment, after the machining of the workpiece 8 is completed, the mounting member 7 of the measuring microscope 1 is attached to the chuck 6 while the workpiece 8 is fixed to the table 9. Take measurements. For measurement, the measurer focuses the objective lens 5 on the measurement point of the workpiece 8 while looking through the eyepiece 2, moves the table 9 to the next measurement point, focuses the objective lens 5 in the same way, and then The distance between the measuring point and the measuring point is kept constant so that the distance in the Z-axis direction can also be measured, and the distance between them is calculated by reading the XYZ-axis coordinates of each measuring point. The amount of movement in the XYZ axis directions is converted into an electrical signal by a linear encoder 10 connected to the table 9.
The display drive circuit 11 converts the amount of movement into a signal that can be digitally displayed, and the XYZ-axis display 12 digitally displays the amount of movement.

The measuring microscope 1 of this embodiment is provided with a mounting member 7 for mounting on a chuck 6, which is a tool mounting part of a machine tool, so that the measuring microscope 1 can be mounted without taking out the workpiece 8 from the table 9. The workpiece 8 can be easily inspected by attaching it to a machine tool. In particular, it is extremely easy to attach to the chuck 6, and the positioning is also accurate, and by constantly moving the table 9 to the in-focus position in the Z-axis direction, highly accurate measurements can be made. Furthermore, recent machine tool linear encoders 10 are extremely accurate;
Since the numerical values are displayed digitally, the dimensions of the workpiece can be easily determined. In addition, since the measurement is an optical non-contact measurement that simply focuses the objective lens 5, the accuracy is extremely high (and rapid measurement is possible).

FIG. 2 shows the optical system of the second embodiment of this invention.
The same members as those in the first embodiment are given the same reference numerals, and the description thereof will be omitted.

In this embodiment, in addition to the configuration of the first embodiment, light emitting elements 20 and 21 are provided to facilitate detection of the focal position of the objective lens 5 and to speed up measurement in the Z-axis direction. The condensing optical system 22 condenses the light at the focal point a of the lens 5.
．． 23 are placed. Here, the spot of the light emitting element 20, 21 is reflected on the focusing glass 3 at the focal position a, as shown in FIG. That is, the light is focused so that the spot 24 of the light emitting element 20 is in contact with the hairline e of the focusing glass 3, the spot 25 of the light emitting element 21 is in contact with the hairline f, and the intersection of the spots 24 and 25 is located on the hairline g. Optical system 2
2.23 is located.

Furthermore, when the object to be examined is located at position b, which is nearer than the focal position, or at position C, which is farther from the focal position, the focusing glass 3 has a spora) 24.2.
5 appears as shown in FIG.

According to this embodiment, focusing work when measuring the workpiece 8 can be easily performed by simply looking at the position of the spot light, and in particular measurement in the Z-axis direction can be performed quickly. Variations in measurement by measurers are also reduced.

In addition, the number of light emitting elements may be one (or three or more may be used. In particular, if there are multiple light emitting elements, even if the spot light is blocked depending on the shape of the workpiece, at least one light emitting element may be illuminated. You can easily find the focus position.

〔Effect of the invention〕

Since the measuring microscope of the present invention is provided with a mounting member that is mounted on a tool mounting portion of a machine tool, the workpiece can be inspected without removing the workpiece from the tool mounting portion of the machine tool. Therefore, three-dimensional measurement of large or heavy objects can be easily performed.

Furthermore, since positioning is performed optically without contact, high measurement accuracy and rapid measurement are possible.

Furthermore, since the table on which the workpiece is placed is made from a machine tool, the measuring microscope itself can be made small and light, making it easy to carry and inexpensive.

In addition, since the measuring microscope of the present invention uses spot light for focusing, it is always possible to focus quickly and accurately, making measurement particularly easy in the Z-axis direction, and also making it possible to easily perform measurements due to different operators. The error is also extremely small.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of the first embodiment of the present invention, Fig. 2 is a diagram showing the optical system of the second embodiment of the invention, and Fig. 3 is the spot when focused by the focusing glass of this embodiment. FIG. 4 is a diagram showing the position of the light spot when the focus glass of this embodiment is out of focus. 2... Eyepiece lens, 3... Focusing glass, 5... Objective lens, 6... Chuck (tool attachment part), 7...
Mounting member, 20.21... Light emitting element, 22.23...
・Condensing optical system Fig. 1 Fig. 2

Claims (2)

[Claims] (1) In a measuring microscope that has an objective lens 5 and an eyepiece lens 2 and is attached with a focusing glass 3 with a hairline formed at the imaging position of the objective lens 5, it can be attached to the tool attachment part 6 of a machine tool. A measuring microscope characterized in that a mounting member 7 is provided. (2) In a measuring microscope that has an objective lens 5 and an eyepiece lens 2 and is attached with a focusing glass 3 with a hairline formed at the imaging position of the objective lens 5, it can be attached to the tool attachment part 6 of a machine tool. A measuring microscope characterized in that a mounting member 7 is provided, and light emitting elements 20 and 21 and condensing optical systems 22 and 23 are provided for irradiating a spot light to a focal position of an objective lens 5.