JPH01142457U - - Google Patents
Info
- Publication number
- JPH01142457U JPH01142457U JP3816988U JP3816988U JPH01142457U JP H01142457 U JPH01142457 U JP H01142457U JP 3816988 U JP3816988 U JP 3816988U JP 3816988 U JP3816988 U JP 3816988U JP H01142457 U JPH01142457 U JP H01142457U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- furnace
- adsorber
- vacuum
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 6
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3816988U JPH01142457U (is) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3816988U JPH01142457U (is) | 1988-03-23 | 1988-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01142457U true JPH01142457U (is) | 1989-09-29 |
Family
ID=31264733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3816988U Pending JPH01142457U (is) | 1988-03-23 | 1988-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01142457U (is) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5964516A (ja) * | 1982-10-01 | 1984-04-12 | Fuji Electric Corp Res & Dev Ltd | アモルフアスシリコン膜生成方法 |
-
1988
- 1988-03-23 JP JP3816988U patent/JPH01142457U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5964516A (ja) * | 1982-10-01 | 1984-04-12 | Fuji Electric Corp Res & Dev Ltd | アモルフアスシリコン膜生成方法 |
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