JPH01142181U - - Google Patents

Info

Publication number
JPH01142181U
JPH01142181U JP1988038052U JP3805288U JPH01142181U JP H01142181 U JPH01142181 U JP H01142181U JP 1988038052 U JP1988038052 U JP 1988038052U JP 3805288 U JP3805288 U JP 3805288U JP H01142181 U JPH01142181 U JP H01142181U
Authority
JP
Japan
Prior art keywords
contact
fitted
dielectric material
completed
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988038052U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988038052U priority Critical patent/JPH01142181U/ja
Publication of JPH01142181U publication Critical patent/JPH01142181U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Connecting Devices For Male And Female Coupling (AREA)
JP1988038052U 1988-03-23 1988-03-23 Pending JPH01142181U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988038052U JPH01142181U (US07534539-20090519-C00280.png) 1988-03-23 1988-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988038052U JPH01142181U (US07534539-20090519-C00280.png) 1988-03-23 1988-03-23

Publications (1)

Publication Number Publication Date
JPH01142181U true JPH01142181U (US07534539-20090519-C00280.png) 1989-09-28

Family

ID=31264621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988038052U Pending JPH01142181U (US07534539-20090519-C00280.png) 1988-03-23 1988-03-23

Country Status (1)

Country Link
JP (1) JPH01142181U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019124119A1 (ja) * 2017-12-21 2019-06-27 東京エレクトロン株式会社 基板支持部材、基板処理装置及び基板搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019124119A1 (ja) * 2017-12-21 2019-06-27 東京エレクトロン株式会社 基板支持部材、基板処理装置及び基板搬送装置
JPWO2019124119A1 (ja) * 2017-12-21 2020-12-24 東京エレクトロン株式会社 基板支持部材、基板処理装置及び基板搬送装置

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