JPH01139435U - - Google Patents

Info

Publication number
JPH01139435U
JPH01139435U JP3590488U JP3590488U JPH01139435U JP H01139435 U JPH01139435 U JP H01139435U JP 3590488 U JP3590488 U JP 3590488U JP 3590488 U JP3590488 U JP 3590488U JP H01139435 U JPH01139435 U JP H01139435U
Authority
JP
Japan
Prior art keywords
side plates
semiconductor manufacturing
manufacturing jig
interval
end plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3590488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3590488U priority Critical patent/JPH01139435U/ja
Publication of JPH01139435U publication Critical patent/JPH01139435U/ja
Pending legal-status Critical Current

Links

JP3590488U 1988-03-17 1988-03-17 Pending JPH01139435U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3590488U JPH01139435U (zh) 1988-03-17 1988-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3590488U JPH01139435U (zh) 1988-03-17 1988-03-17

Publications (1)

Publication Number Publication Date
JPH01139435U true JPH01139435U (zh) 1989-09-22

Family

ID=31262533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3590488U Pending JPH01139435U (zh) 1988-03-17 1988-03-17

Country Status (1)

Country Link
JP (1) JPH01139435U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175320A (ja) * 1991-12-24 1993-07-13 Mitsubishi Electric Corp 半導体ウエハカセット
JPH07326657A (ja) * 1994-05-31 1995-12-12 Korea Electron Telecommun 半導体の製造装備のウエハ装着のカセット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175320A (ja) * 1991-12-24 1993-07-13 Mitsubishi Electric Corp 半導体ウエハカセット
JPH07326657A (ja) * 1994-05-31 1995-12-12 Korea Electron Telecommun 半導体の製造装備のウエハ装着のカセット

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