JPH01139435U - - Google Patents
Info
- Publication number
- JPH01139435U JPH01139435U JP3590488U JP3590488U JPH01139435U JP H01139435 U JPH01139435 U JP H01139435U JP 3590488 U JP3590488 U JP 3590488U JP 3590488 U JP3590488 U JP 3590488U JP H01139435 U JPH01139435 U JP H01139435U
- Authority
- JP
- Japan
- Prior art keywords
- side plates
- semiconductor manufacturing
- manufacturing jig
- interval
- end plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000012050 conventional carrier Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590488U JPH01139435U (en, 2012) | 1988-03-17 | 1988-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590488U JPH01139435U (en, 2012) | 1988-03-17 | 1988-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01139435U true JPH01139435U (en, 2012) | 1989-09-22 |
Family
ID=31262533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3590488U Pending JPH01139435U (en, 2012) | 1988-03-17 | 1988-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01139435U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05175320A (ja) * | 1991-12-24 | 1993-07-13 | Mitsubishi Electric Corp | 半導体ウエハカセット |
| JPH07326657A (ja) * | 1994-05-31 | 1995-12-12 | Korea Electron Telecommun | 半導体の製造装備のウエハ装着のカセット |
-
1988
- 1988-03-17 JP JP3590488U patent/JPH01139435U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05175320A (ja) * | 1991-12-24 | 1993-07-13 | Mitsubishi Electric Corp | 半導体ウエハカセット |
| JPH07326657A (ja) * | 1994-05-31 | 1995-12-12 | Korea Electron Telecommun | 半導体の製造装備のウエハ装着のカセット |