JPH01137529U - - Google Patents

Info

Publication number
JPH01137529U
JPH01137529U JP3331088U JP3331088U JPH01137529U JP H01137529 U JPH01137529 U JP H01137529U JP 3331088 U JP3331088 U JP 3331088U JP 3331088 U JP3331088 U JP 3331088U JP H01137529 U JPH01137529 U JP H01137529U
Authority
JP
Japan
Prior art keywords
wafer
resist
wafers
plasma
remove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3331088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3331088U priority Critical patent/JPH01137529U/ja
Publication of JPH01137529U publication Critical patent/JPH01137529U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3331088U 1988-03-14 1988-03-14 Pending JPH01137529U (US07494231-20090224-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3331088U JPH01137529U (US07494231-20090224-C00006.png) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3331088U JPH01137529U (US07494231-20090224-C00006.png) 1988-03-14 1988-03-14

Publications (1)

Publication Number Publication Date
JPH01137529U true JPH01137529U (US07494231-20090224-C00006.png) 1989-09-20

Family

ID=31259964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3331088U Pending JPH01137529U (US07494231-20090224-C00006.png) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH01137529U (US07494231-20090224-C00006.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161825A (ja) * 1983-03-07 1984-09-12 Mitsubishi Electric Corp 半導体素子の製造方法
JPS6117730B2 (US07494231-20090224-C00006.png) * 1975-12-15 1986-05-09 Ricoh Kk

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117730B2 (US07494231-20090224-C00006.png) * 1975-12-15 1986-05-09 Ricoh Kk
JPS59161825A (ja) * 1983-03-07 1984-09-12 Mitsubishi Electric Corp 半導体素子の製造方法

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