JPH01137528U - - Google Patents
Info
- Publication number
- JPH01137528U JPH01137528U JP3265088U JP3265088U JPH01137528U JP H01137528 U JPH01137528 U JP H01137528U JP 3265088 U JP3265088 U JP 3265088U JP 3265088 U JP3265088 U JP 3265088U JP H01137528 U JPH01137528 U JP H01137528U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- outer electrode
- inner electrode
- processing apparatus
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3265088U JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3265088U JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01137528U true JPH01137528U (ru) | 1989-09-20 |
| JPH0713216Y2 JPH0713216Y2 (ja) | 1995-03-29 |
Family
ID=31259203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3265088U Expired - Lifetime JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713216Y2 (ru) |
-
1988
- 1988-03-14 JP JP3265088U patent/JPH0713216Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713216Y2 (ja) | 1995-03-29 |