JPH01137524U - - Google Patents
Info
- Publication number
- JPH01137524U JPH01137524U JP3274588U JP3274588U JPH01137524U JP H01137524 U JPH01137524 U JP H01137524U JP 3274588 U JP3274588 U JP 3274588U JP 3274588 U JP3274588 U JP 3274588U JP H01137524 U JPH01137524 U JP H01137524U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- tube
- chamber
- separation chamber
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3274588U JPH01137524U (OSRAM) | 1988-03-11 | 1988-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3274588U JPH01137524U (OSRAM) | 1988-03-11 | 1988-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137524U true JPH01137524U (OSRAM) | 1989-09-20 |
Family
ID=31259310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3274588U Pending JPH01137524U (OSRAM) | 1988-03-11 | 1988-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137524U (OSRAM) |
-
1988
- 1988-03-11 JP JP3274588U patent/JPH01137524U/ja active Pending