JPH01136106A - Organic light guide - Google Patents
Organic light guideInfo
- Publication number
- JPH01136106A JPH01136106A JP29394687A JP29394687A JPH01136106A JP H01136106 A JPH01136106 A JP H01136106A JP 29394687 A JP29394687 A JP 29394687A JP 29394687 A JP29394687 A JP 29394687A JP H01136106 A JPH01136106 A JP H01136106A
- Authority
- JP
- Japan
- Prior art keywords
- formula
- denotes
- composition
- light
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 239000004793 Polystyrene Substances 0.000 claims abstract description 17
- 229920002223 polystyrene Polymers 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 13
- 229920000642 polymer Polymers 0.000 claims abstract description 7
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052794 bromium Inorganic materials 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 18
- -1 bromine compound Chemical class 0.000 claims description 13
- 238000000206 photolithography Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 4
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- IPZJQDSFZGZEOY-UHFFFAOYSA-N dimethylmethylene Chemical compound C[C]C IPZJQDSFZGZEOY-UHFFFAOYSA-N 0.000 abstract 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 abstract 1
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 12
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 11
- 239000000463 material Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical group [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- QZKVUSSYPPWURQ-UHFFFAOYSA-N 1-methylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C QZKVUSSYPPWURQ-UHFFFAOYSA-N 0.000 description 1
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical group CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001649 bromium compounds Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229940125773 compound 10 Drugs 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- ZLVXBBHTMQJRSX-VMGNSXQWSA-N jdtic Chemical compound C1([C@]2(C)CCN(C[C@@H]2C)C[C@H](C(C)C)NC(=O)[C@@H]2NCC3=CC(O)=CC=C3C2)=CC=CC(O)=C1 ZLVXBBHTMQJRSX-VMGNSXQWSA-N 0.000 description 1
- 229920005684 linear copolymer Polymers 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001627 poly(4-methyl styrene) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002285 poly(styrene-co-acrylonitrile) Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229920006249 styrenic copolymer Polymers 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
- Polymerisation Methods In General (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、フォトレジストを光伝送路とする有機先導波
路に関するもの°である0本有機光導波路の適用分野と
して、光通信用光部品が有り、光分岐結合器、スターカ
ップラ、光アクセッサ等に通用されるものである。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an organic guided waveguide using photoresist as an optical transmission path.As an application field of the 0-wire organic optical waveguide, it is applicable to optical components for optical communication. Yes, it is commonly used in optical branching couplers, star couplers, optical accessors, etc.
フォトレジストを用いた有機先導波路として、従来、種
々の材料が提案されているが、光伝&l損失が大きい、
屈折率が低く支持体の選択の幅が狭い、リソグラフィー
特性が充分でなく光分岐結合部での光損失が大きいなど
の問題があり、光分岐結合器等に通用するのは困難であ
った。Various materials have been proposed for organic guiding waveguides using photoresists, but they suffer from large phototransmission and loss.
It has been difficult to be used in optical branching and coupling devices due to problems such as a low refractive index, a narrow range of support selections, insufficient lithography properties, and large optical loss at the optical branching and coupling portion.
本発明は、上記の問題点を克服すべく鋭意研究を重ねた
結果なされたものであり、その目的は光伝搬損失が小さ
く、高い屈折率を有し、かつ、光分岐結合部での光損失
が小さい有機先導波路を提供することにある。The present invention was made as a result of intensive research to overcome the above problems, and its purpose is to reduce optical propagation loss, have a high refractive index, and reduce optical loss at the optical branching/coupling section. The objective is to provide a small organic guiding waveguide.
本発明は、下記の一般式(A)で表されろ臭素化合物、
r式中XはC4、C(CH,)、、CH−CH,C1又
)及び、下記の一般式(B)で表される繰返し単位を含
むポリスチレン系化合物及び光開始剤を含む組成物を当
該組成物の重合物よりも屈折率の低い支持体上に膜状に
形成した後、フォトリソグラフ法により賦形されたこと
を特徴とする有機先導波路に関与するものである。The present invention provides a bromine compound represented by the following general formula (A), in which X is C4, C(CH,), CH-CH, C1 or), and a compound represented by the following general formula (B). A composition containing a polystyrene compound containing a repeating unit and a photoinitiator is formed into a film on a support having a refractive index lower than that of a polymer of the composition, and then shaped by a photolithography method. This relates to an organic guiding waveguide characterized by:
本発明における上記一般式(A)で表される臭素化物に
おいて、八及び穐の少なくとも一方はアクロイル基又は
メタクロイル基であり、かかる反応性基が重合に関与す
るものである。又、n+mは0〜4の範囲であり、好ま
しくは2〜4の範囲である。In the brominated compound represented by the above general formula (A) in the present invention, at least one of 8 and 8 is an acroyl group or a methacryloyl group, and such a reactive group participates in polymerization. Moreover, n+m is in the range of 0 to 4, preferably in the range of 2 to 4.
本発明の臭素化物を具体的な例を挙げて説明すると、下
記の臭素化物(1)〜(9)が挙げられる0本発明の臭
素化物は単一化合物で用いることができるが、必要に応
じて一般式(A>で表される臭素化物の複数種の混合物
を用いることも可能である。To explain the bromide of the present invention by giving specific examples, the following bromides (1) to (9) may be mentioned.The bromide of the present invention can be used as a single compound, but if necessary, It is also possible to use a mixture of a plurality of brominated compounds represented by the general formula (A>).
本発明における一般式(B)で表される繰返し単位を含
むポリスチレン系化合物において、YはH,CH3、C
HコCHL10C穐、又はCXである。In the polystyrene compound containing the repeating unit represented by the general formula (B) in the present invention, Y is H, CH3, C
Hco CHL10C Aki, or CX.
YがCH−CH!の場合は、かかる反応性基は重合に関
与する。Yは芳香環のどの位置に結合していても良く、
特に限定するものではない。Y is CH-CH! In the case of , such reactive groups participate in the polymerization. Y may be bonded to any position on the aromatic ring,
It is not particularly limited.
本発明におけるポリスチレン系化合物は、一般式(B)
で表される単一の繰返し単位からなるものも使用できる
が、複数種の一般式(B)で表される繰返し単位からな
るものも使用可能である。The polystyrene compound in the present invention has the general formula (B)
Although it is possible to use a single repeating unit represented by formula (B), it is also possible to use a repeating unit composed of multiple types of repeating units represented by general formula (B).
又、本発明のポリスチレン系化合物の繰返し単位として
、必要に応じてブタジェン、アクリロニトリルなどのビ
ニル単量体などを一部導入した共重合体も使用可能であ
る。Furthermore, as a repeating unit of the polystyrene compound of the present invention, a copolymer into which a vinyl monomer such as butadiene or acrylonitrile is partially introduced can be used, if necessary.
本発明のポリスチレン系化合物を、具体的な例を挙げて
説明すると、ポリスチレン、ポリ(p−メチルスチレン
)、ポリ (トクロロスチレン)及びポリ(p−メトキ
シスチレン)等の単一重合体、スチレン−ジビニルベン
ゼン線状共重合体、スチレン−p−メチルスチレン共重
合体、及びp−クロロスチレン−p−メトキシスチレン
共重合体等の複数置換スチレンの共重合体、スチレン−
ブタジェン共重合体、スチレン−アクリロニトリル共重
合体等のスチレン系共重合体等が挙げられる。The polystyrene compound of the present invention will be explained by giving specific examples. Multi-substituted styrene copolymers, such as divinylbenzene linear copolymers, styrene-p-methylstyrene copolymers, and p-chlorostyrene-p-methoxystyrene copolymers, styrene-
Examples include styrenic copolymers such as butadiene copolymers and styrene-acrylonitrile copolymers.
本発明のポリスチレン系化合物の分子量は特に限定され
ないが、1 、000〜100万が好ましい。The molecular weight of the polystyrene compound of the present invention is not particularly limited, but is preferably from 1,000 to 1,000,000.
本発明の組成物において、臭素化物とポリスチレン系化
合物の組合せとしては数多くのものが可能であるが、相
溶性等から当然適当な組合せが存在する。特に一般式(
C)で表される臭素化物とポリスチレンの組合せからな
る組成物は、相溶性、加工性、重合性、光学特性ともに
優れている。In the composition of the present invention, there are many possible combinations of the bromide and the polystyrene compound, but there are naturally appropriate combinations based on compatibility and the like. Especially the general formula (
A composition consisting of a combination of a bromide and polystyrene represented by C) has excellent compatibility, processability, polymerizability, and optical properties.
本発明における組成物において、臭素化物とポリスチレ
ン系化合物の組成比は、当然これらの物性と使用形態に
より最適量が決まるが、好ましい組成比は、臭素化物:
ボリスチレン系化合物−10〜90 : 90〜10の
範囲であり、更に好ましくは、30〜70 : 70〜
30の範囲である。In the composition of the present invention, the optimum composition ratio of the bromide and the polystyrene compound is naturally determined depending on their physical properties and usage form, but the preferred composition ratio is:
Boristyrene compound-10 to 90: 90 to 10, more preferably 30 to 70: 70 to
The range is 30.
本発明における光開始剤は、当該有機先導波路を伝搬さ
せる光に対して実質上透明であるのが好ましい、伝搬さ
せる光は、可視光又は近赤外光が用いられることが多く
、光開始剤としては紫外光又は近紫外光に吸収即ち感度
を有するものが通している。かかる光開始剤としては、
例えば、ベンゾインメチルエーテル、ベンゾインイソブ
チルエーテル、ジメトキシフェニルアセトフェノン、ベ
ンゾフェノン、ミヒラーズケトン、メチルチオキサント
ン、1−フェニル−1,2−プロパンジオン−2−。It is preferable that the photoinitiator in the present invention is substantially transparent to the light propagating through the organic guiding waveguide.Visible light or near-infrared light is often used as the light to propagate, and the photoinitiator As such, those that absorb or are sensitive to ultraviolet light or near ultraviolet light are allowed to pass through. Such photoinitiators include:
For example, benzoin methyl ether, benzoin isobutyl ether, dimethoxyphenylacetophenone, benzophenone, Michler's ketone, methylthioxanthone, 1-phenyl-1,2-propanedione-2-.
−(エトキシカルボニル)オキシム等があるが、これら
に限定されるものではない、又、かかる光開始剤を用い
た場合の当該フォトリソグラフ法に用いる光源としては
、水銀ランプが最も好ましい。Examples include, but are not limited to, -(ethoxycarbonyl)oxime, and the most preferred light source for the photolithographic method using such a photoinitiator is a mercury lamp.
本発明の組成物における光開始剤の適当な含有量は、光
開始剤の吸収係数、重合効率及び有機先導波路の厚みな
どに依存するが、0.1〜10重量%の範囲が好ましく
、更に1〜5重量%の範囲が好ましい。The appropriate content of the photoinitiator in the composition of the present invention depends on the absorption coefficient of the photoinitiator, polymerization efficiency, thickness of the organic guiding waveguide, etc., but is preferably in the range of 0.1 to 10% by weight, and A range of 1 to 5% by weight is preferred.
本発明の組成物は、一般式(A)の臭素化物、一般式(
B)のポリスチレン系化合物及び光開始剤を主な成分と
するものであるが、必要に応じて各種の添加剤を加える
ことが好ましい。添加剤としては、増感剤、安定剤、熱
重合開始剤、可塑剤、着色剤等が挙げられるが、これら
に限定されるものではない。The composition of the present invention comprises a bromide of general formula (A), a bromide of general formula (A),
Although the polystyrene compound and photoinitiator of B) are the main components, it is preferable to add various additives as necessary. Examples of additives include, but are not limited to, sensitizers, stabilizers, thermal polymerization initiators, plasticizers, and colorants.
本発明は、一般式(A)、(B)の化合物及び光開始剤
からなる組成物を、当該組成物の重合物よりも低い屈折
率の支持体上に塗布した後、フォトリソグラフ法により
形成された有機光導波路に関するものである。In the present invention, a composition consisting of the compounds of general formulas (A) and (B) and a photoinitiator is coated on a support having a refractive index lower than that of a polymerized product of the composition, and then formed by a photolithographic method. The present invention relates to an organic optical waveguide.
本発明に用いられる支持体は、屈折率が当該組成物の重
合物より低い材料であれば良い、当該重合物の屈折率は
概ね1.57〜1.63の範囲にあるので、概ね1.5
7以下であれば良い。当該有機先導波路を伝搬させる光
の波長において、当該支持床が吸収を有すると、光伝搬
損失は大きくなるので、出来るだけ透明であるのが好ま
しい、かかる支持体の材料を例として挙げると、ポリエ
チレンテレフタレート、ポリ塩化ビニル、ポリエチレン
、ポリ7クリロニトリル、ポリビニルアルコール、ポリ
メチルメタクリレート、ポリオキシメチレン、ポリプロ
ピレン、ポリメチルペンテン、シリコン樹脂、ポリフッ
化ビニリデン、ポリ四フフ化エチレン等の高分子材料、
ソーダガラス、パイレックスガラス、バイコールガラス
、石英ガラス等のガラス材料及び石英、ADP、RDP
等の単結晶材料などが有る。又、支持体の表面を当該有
機先導波路との接着性を向上させる等の目的で処理を行
うことも可能である。かかる処理の例としては、上記高
分子材料のコロナ放電処理、上記ガラス材料のシランカ
ップリング処理が挙げられる。The support used in the present invention may be any material as long as it has a refractive index lower than that of the polymer of the composition.Since the refractive index of the polymer is approximately in the range of 1.57 to 1.63, approximately 1. 5
It is fine if it is 7 or less. If the support bed has absorption at the wavelength of the light propagating through the organic guide waveguide, the light propagation loss will increase, so it is preferable that the support bed be as transparent as possible. Polymer materials such as terephthalate, polyvinyl chloride, polyethylene, poly7crylonitrile, polyvinyl alcohol, polymethyl methacrylate, polyoxymethylene, polypropylene, polymethylpentene, silicone resin, polyvinylidene fluoride, polytetrafluoroethylene, etc.
Glass materials such as soda glass, Pyrex glass, Vycor glass, quartz glass, quartz, ADP, RDP
There are other single crystal materials such as It is also possible to treat the surface of the support for the purpose of improving adhesion to the organic guiding waveguide. Examples of such treatments include corona discharge treatment of the above-mentioned polymeric material and silane coupling treatment of the above-mentioned glass material.
本発明に用いられる支持体の形状は特に限定されるもの
ではなく、各種の形状のものが使用できるが、当該組成
物を塗布する工程が容易であるところから、板状、シー
ト状及びフィルム状等の形状が好ましい、支持体の厚み
は概ね10I!−以上であれば良く、支持体の形状を保
持する等の目的で他の材料と積層することも可能である
。The shape of the support used in the present invention is not particularly limited, and various shapes can be used. The thickness of the support is preferably approximately 10I! - or above is sufficient, and it is also possible to laminate with other materials for the purpose of maintaining the shape of the support.
本発明において、当該組成物を当該支持体に塗布する方
法は、特に限定されるものではなり、−般に行われてい
る塗布法が適用できる。かかる塗布法の例としては、ス
ピンコード法、バーコード法、ロールコート法、ディン
プ法等が挙げられる。In the present invention, the method of applying the composition to the support is not particularly limited, and commonly used coating methods can be applied. Examples of such coating methods include a spin code method, a bar code method, a roll coat method, a dipping method, and the like.
本発明は、当該組成物をフォトリソグラフ法により形成
された有機先導波路に関するものである。The present invention relates to an organic guiding waveguide formed from the composition by photolithography.
本発明におけるフォトリソグラフ法とは、所望の形状パ
ターンを有するフォトマスクを介して紫外線等の光を支
持体上の組成物に露光し、又は、電子線ビーム等の光を
所望のパターンで組成物に露光した後、露光部と未露光
部との現像液に対する溶解性の差を利用し未露光部を洗
い流し、所望の形状パターンを有する先導波路を得る方
法を言う、上記の露光時に、露光部の当該組成物の重合
を阻害する酸素を低減する目的で、不活性雰囲気下で行
ったり、酸素透過性の低いシートを組成物に密着させる
などの方法を採り入れることも可能である。The photolithography method in the present invention refers to exposing a composition on a support to light such as ultraviolet rays through a photomask having a desired shape pattern, or exposing the composition to light such as an electron beam in a desired pattern. After exposing the exposed area to light, the unexposed area is washed away using the difference in solubility in a developing solution between the exposed area and the unexposed area, and a guiding waveguide having a desired shape pattern is obtained. In order to reduce oxygen that inhibits the polymerization of the composition, it is also possible to adopt methods such as carrying out the reaction in an inert atmosphere or adhering a sheet with low oxygen permeability to the composition.
上記現像液としては、露光部である当該組成物の重合物
に対する溶解性が、未露光部である当該組成物に対する
溶解性よりも低いものであれば特に限定されるものでな
く、又、最適な現像液も当然組成物の組成に依存するが
、一般に有機系現像液が本目的に適している。好ましい
現像液の例を挙げれば、メチルエチルケトン、1.1.
1−トリクロロエタン、トルエン、テトラヒドロフラン
等がある。The above-mentioned developer is not particularly limited as long as the solubility of the composition in the exposed area to the polymer is lower than the solubility in the unexposed area of the composition. Although the type of developer used naturally depends on the composition of the composition, organic developers are generally suitable for this purpose. Examples of preferred developers include methyl ethyl ketone, 1.1.
Examples include 1-trichloroethane, toluene, and tetrahydrofuran.
本発明は、フォトリソグラフ法により形成された有機先
導波路に関するものでる。The present invention relates to an organic guide waveguide formed by photolithography.
本発明の有機光導波路は、露光部の当該組成物の重合物
をコア部とし、当該支持体をクラッド部とするものであ
る。又、支持体上の有機先導波路を、当該有機先導波路
より屈折率の低い材料で塗布等により被覆してクランド
部とすることも可能である。In the organic optical waveguide of the present invention, the polymer of the composition in the exposed area is used as the core part, and the support is used as the cladding part. It is also possible to form a landing portion by coating the organic guiding waveguide on the support with a material having a lower refractive index than the organic guiding waveguide by coating or the like.
本発明における有機先導波路の形状は特に限定されるも
のではないが、厚みは伝搬される光のモードにより最適
な厚みが存在する。シングルモードの場合の厚みは、概
ね1〜lOμ霧であり、マルチモードの場合は、概ね2
0〜1.000 p■である。Although the shape of the organic guide waveguide in the present invention is not particularly limited, there is an optimum thickness depending on the mode of light to be propagated. In the case of single mode, the thickness is approximately 1 to 10 μm, and in the case of multimode, it is approximately 2
It is 0 to 1.000 p■.
又、フォトマスクのパターン形状及び照射ビームの形状
によつて任意の形状の有機先導波路が形成可能である。Further, an organic guiding waveguide having an arbitrary shape can be formed depending on the pattern shape of the photomask and the shape of the irradiation beam.
形状の例としては、直線、曲線、Y分岐、多分岐、8字
等が挙げられる。Examples of shapes include straight lines, curves, Y-branches, multi-branches, 8-shapes, and the like.
次に実施例を示す。 Next, examples will be shown.
実施例1
臭素化物(1)70重量部(以下部と略す)、ポリスチ
レン30部、メチルエチルケトン100部の溶液に、光
開始剤として、ジメトキシフェニルアセトフェノン2部
を加え良く混合した。厚み1−のPMl’lA板に上記
溶液をバーコードした後、70℃て加熱乾燥させ厚み約
100μmの塗膜を得た。直線パターンを有するポリエ
チレンテレフタレート製マスクを介して高圧水銀ランプ
から紫外線を300a+J/c11照射し、70℃で3
0分間加熱した後、メチルエチルケトンで現像して厚み
100μm、幅100μ悄、長さ10cmの先導波路を
得た。 He−Neレーザ光を、先導波路の端面から入
射し、光転&!損失を測定したところ、0.2 dB/
ca+の良好な値を示した。Example 1 To a solution of 70 parts by weight of bromide (1), 30 parts of polystyrene, and 100 parts of methyl ethyl ketone, 2 parts of dimethoxyphenylacetophenone as a photoinitiator was added and mixed well. The above solution was barcoded onto a PMl'lA plate with a thickness of 1-1, and then dried by heating at 70°C to obtain a coating film with a thickness of about 100 μm. UV rays of 300a+J/c11 were irradiated from a high-pressure mercury lamp through a polyethylene terephthalate mask with a linear pattern, and the temperature was 300℃ at 70℃.
After heating for 0 minutes, it was developed with methyl ethyl ketone to obtain a leading waveguide having a thickness of 100 μm, a width of 100 μm, and a length of 10 cm. A He-Ne laser beam is input from the end face of the leading waveguide, and the light is rotated &! When I measured the loss, it was 0.2 dB/
It showed a good value of ca+.
実施例2
臭素化物(2)50部、ポリスチレン50部、O−キシ
レン110部の溶液に、光開始剤として、ジメトキシフ
ェニルアセトフェノン2部を加え良く混合した。Example 2 To a solution of 50 parts of bromide (2), 50 parts of polystyrene, and 110 parts of O-xylene, 2 parts of dimethoxyphenylacetophenone was added as a photoinitiator and mixed well.
シランカップリング処理した厚み11IIIのガラス板
に上記溶液を回転数1500rp@でスピンコードした
後、70℃で加熱乾燥させ厚み約50μmの塗膜を得た
。Y分岐パターンを有するCr石英マスクを介して、高
圧水銀ランプから紫外線を600mJ/aJ、窒素雰囲
気下で照射し、70℃で10分間加熱した後、1.1.
1− )リクロロエタンで現像して、厚み50μ■、線
幅50μ閣、長さ5C■、分岐角2θ−2°の光導波路
を得た。波長0.85μ−の半導体レーザ光を光導波路
の端面から入射し、出射端からの光量を測定したところ
、分岐損失は3dBであった。The above solution was spin-coded onto a silane coupling-treated glass plate having a thickness of 11III at a rotational speed of 1500 rpm, and then dried by heating at 70° C. to obtain a coating film with a thickness of about 50 μm. After irradiating ultraviolet rays of 600 mJ/aJ from a high-pressure mercury lamp in a nitrogen atmosphere through a Cr quartz mask having a Y-branch pattern and heating at 70° C. for 10 minutes, 1.1.
1-) Developed with dichloroethane to obtain an optical waveguide having a thickness of 50μ, a line width of 50μ, a length of 5C, and a branching angle of 2θ-2°. Semiconductor laser light with a wavelength of 0.85 .mu.- was input from the end face of the optical waveguide and the amount of light from the output end was measured, and the branching loss was 3 dB.
実施例3
臭素化物+9)30部、ポリ(p−メチルスチレン)
70部、ジメチルホルムアミド250部、0−キシレン
250部の溶液に、光開始剤として、ベンゾインメチル
エーテル2部を加え良く混合した。熱硬化性フッ素含有
樹脂を厚み50μmに塗布した後、加熱硬化した厚み1
00μ謡のポリエチレンテレフタレートフィルムに、上
記溶液をバーコードした後、70℃で加熱乾燥させ厚み
約50pHの塗膜を得た。直線パターンを有するPET
製マスクを介して高圧水銀ランプから紫外線を1010
0O/−照射し、70℃で15分間加熱した後、メチル
エチルケトンで現像して、厚み50μ霧、幅100μ−
1長さ10c+wの先導波路を得た。 He−Neレー
ザ光を光導波路の端面から入射し、光伝搬損失を測定し
たところ、0.5 dB/amであった。Example 3 30 parts of bromide +9), poly(p-methylstyrene)
To a solution of 70 parts of dimethylformamide, 250 parts of dimethylformamide, and 250 parts of 0-xylene, 2 parts of benzoin methyl ether as a photoinitiator was added and mixed well. After applying thermosetting fluorine-containing resin to a thickness of 50 μm, it was heated and cured to a thickness of 1.
The above solution was barcoded onto a polyethylene terephthalate film of 00 μUo, and then dried by heating at 70° C. to obtain a coating film with a thickness of about 50 pH. PET with linear pattern
Ultraviolet rays from a high-pressure mercury lamp are transmitted through a mask made of
After being irradiated with 0O/- and heated at 70°C for 15 minutes, it was developed with methyl ethyl ketone to give a thickness of 50 μm and a width of 100 μ-
1 A leading wavepath of length 10c+w was obtained. When a He-Ne laser beam was incident on the end face of the optical waveguide and the optical propagation loss was measured, it was found to be 0.5 dB/am.
実施例4〜9
実施例1の臭素化物(1)、ポリスチレンを第1表に示
した組成に変え、紫外線を第1表に示した光量を照射し
た以外は、実施例1と同様の方法で先導波路を作成した
。 He−Neレーザ光による光伝搬損失を第1表に示
した。Examples 4 to 9 The same method as in Example 1 was carried out, except that the bromide (1) and polystyrene of Example 1 were changed to the compositions shown in Table 1, and the ultraviolet rays were irradiated with the amount of light shown in Table 1. A leading wavepath was created. Table 1 shows the optical propagation loss due to the He-Ne laser beam.
第1表 特許出願人 旭化成工業株式会社 代 理 人 弁理士 星野 透Table 1 Patent applicant: Asahi Kasei Industries, Ltd. Representative Patent Attorney Toru Hoshino
Claims (2)
式、化学式、表等があります▼(A) [式中XはCH_2、C(CH_3)_2、CH=CH
、O、又はSO_2;RはCH_3又はH;R_1はC
OCH=CH_2COC(CH_3)=CH_2又はH
;R_2はCOCH=CH_2又はCOC(CH_3)
=CH_2;n+mは0〜4の整数を表す。] 及び、下記の一般式(B)で表される繰返し単位▲数式
、化学式、表等があります▼(B) [式中Yは、H、CH_3、CH=CH_2、OCH_
3又はClを表す。] を含むポリスチレン系化合物及び光開始剤を含む組成物
を当該組成物の重合物よりも屈折率の低い支持体上に膜
状に形成した後、フォトリソグラフ法により賦形された
ことを特徴とする有機光導波路。(1) A bromine compound represented by the general formula (A) below, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (A) [In the formula, X is CH_2, C(CH_3)_2, CH=CH
, O, or SO_2; R is CH_3 or H; R_1 is C
OCH=CH_2COC(CH_3)=CH_2 or H
;R_2 is COCH=CH_2 or COC(CH_3)
=CH_2; n+m represents an integer of 0 to 4. ] And the repeating unit represented by the following general formula (B) ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (B) [In the formula, Y is H, CH_3, CH=CH_2, OCH_
3 or Cl. ] A composition containing a polystyrene compound and a photoinitiator is formed into a film on a support having a refractive index lower than that of a polymer of the composition, and then shaped by a photolithography method. organic optical waveguide.
であり、 ▲数式、化学式、表等があります▼(C) [式中R′はCOCH=CH_2又は▲数式、化学式、
表等があります▼を表す。] ポリスチレン系化合物がポリスチレンである特許請求の
範囲第1項記載の有機光導波路。(2) Brominated compound is a compound represented by the general formula (C) below, and there are ▲mathematical formulas, chemical formulas, tables, etc.▼(C) [In the formula, R' is COCH=CH_2 or ▲mathematical formulas, chemical formulas,
There are tables etc. Represents ▼. ] The organic optical waveguide according to claim 1, wherein the polystyrene compound is polystyrene.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29394687A JPH01136106A (en) | 1987-11-24 | 1987-11-24 | Organic light guide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29394687A JPH01136106A (en) | 1987-11-24 | 1987-11-24 | Organic light guide |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01136106A true JPH01136106A (en) | 1989-05-29 |
Family
ID=17801220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29394687A Pending JPH01136106A (en) | 1987-11-24 | 1987-11-24 | Organic light guide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01136106A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000133793A (en) * | 1998-10-27 | 2000-05-12 | Sony Corp | Light transmission path and method of forming the same |
-
1987
- 1987-11-24 JP JP29394687A patent/JPH01136106A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000133793A (en) * | 1998-10-27 | 2000-05-12 | Sony Corp | Light transmission path and method of forming the same |
JP4529193B2 (en) * | 1998-10-27 | 2010-08-25 | ソニー株式会社 | Method for forming optical transmission line |
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