JPH01135943A - Vibration absorbing unit - Google Patents

Abstract

PURPOSE:To sufficiently absorb earthquake vibration or environmental vibration brought in vibro-isolating and earthquake-isolating beds, by alternately piling up an elastic material and a metal material and compressing the elastic material and the metal material by magnetic force using a magnetic material. CONSTITUTION:Vibration absorbing units 12 are mounted to a predetermined position on a foundation floor 10. The vibration absorbing unit 12, alternately piling up a rubber plate 14 and a metal plate 15, is formed into a column shape. A pair of magnetic materials 16, 17 are arranged in the periphery of a piled structure of the rubber plate 14 and the metal plate 15 and supported to both ends of this piled structure through a flange 19. Hold pressing force acts on the rubber plate 14 and the metal plate 15 by mutually attracting force of the fellow paired magnetic materials 16, 17. In this way, earthquake vibration or environmental vibration, generated in vibro-isolating and earthquake-isolating beds, can be sufficiently absorbed.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a vibration absorption unit, and in particular, it is arranged between a vibration isolation/seismic isolation table and a foundation floor, etc. The present invention relates to a vibration absorption unit that absorbs vibrations.

[Prior art]

Various types of semiconductor manufacturing equipment are installed in clean rooms and the like, and some of these semiconductor manufacturing equipment, such as reduction projection exposure equipment, are extremely sensitive to vibration. Semiconductor manufacturing equipment that dislikes such vibrations (hereinafter referred to as anti-vibration equipment).

) is installed on a vibration isolation/seismic isolation table in a clean room. The vibration isolation/seismic isolation table is provided on a plurality of vibration absorption units, and the plurality of vibration absorption units absorb vibrations occurring on the vibration isolation/seismic isolation table.

FIG. 4 is an explanatory diagram showing the structure of a vibration isolation/seismic isolation table in which a conventional vibration absorption unit is used. As shown in FIG. 4, a vibration absorption unit 73 is disposed at a predetermined position on the foundation floor 71. As shown in FIG. 5, a conventional vibration absorbing unit 73 is constructed by alternately stacking rubber plates (elastic materials) 75 and metal plates 77, and flanges 79 and 79 are attached to the lower and upper ends. The flange 79 at the lower end is fixed to the foundation floor 71, and the flange 79 at the upper end is fixed to the support plate 81.

A viscous damper 83 is provided between the foundation floor 71 and the support plate 81 , and the viscosity damper 83 absorbs the container 85 attached to the foundation floor 71 , the viscous liquid 87 filled in the container 85 , and the support plate 81 . It consists of a resistance member 89 attached to the lower surface. The viscous damper 83 absorbs the vibration of the support plate 81 by receiving resistance from the viscous liquid 87 as a resistance member 89 vibrates in the viscous liquid 87, vibrating with the vibration of the support plate 81.

Further, a vibration isolation/seismic isolation table 93 made of a heavy object is mounted on the support plate 81, and a vibration damping device 9 is mounted on the vibration isolation/seismic isolation table 93.
5 will be installed and installed.

By the way, the natural frequency f generated in the vibration isolation/seismic isolation table 93 is determined by the spring constant of the vibration absorption unit 73 and the weight of the vibration/seismic isolation table and the mounting device.

That is, to explain in detail, the characteristic π of the vibration isolation/seismic isolation table 93 is the constant of pi, K is the spring constant of the plurality of vibration absorption units that support the vibration isolation/seismic isolation table, and G is the gravitational acceleration (980 cm/s2
) and M indicate the total weight (hereinafter referred to as weight M) of the vibration isolation/seismic isolation table 93 supported by the plurality of vibration absorption units 73 and the vibration damping device 95 mounted thereon.

FIG. 6 shows a correlation diagram between the increase and decrease of the weight M and the natural frequency f of the vibration isolation/seismic isolation table 93. As shown in FIG. 6, the frequency becomes higher as the weight M becomes lighter. or,
Figure 6 shows the vibration characteristic areas of various environmental vibrations that occur in vibration isolation/seismic isolation tables, including earthquake vibrations, traffic vibrations such as outdoor cars and trains, mechanical vibrations such as rotating equipment, and building vibrations. The area is shown.

As can be seen from these frequency distributions, when the weight M of the conventional vibration absorbing unit 73 is reduced, that is, when the vibration absorbing unit 73 is not pressed with a constant force from the vertical direction, vibration isolation and It can be seen that the quake table 93 resonates with vibrations on the micron (10-'m) order, such as environmental vibrations such as traffic vibrations and building vibrations, and mechanical vibrations. Therefore, if the transfer device 95 placed on the vibration isolation/seismic isolation table 93 is lightweight and does not meet the rated weight, a problem will occur.
is a weight that is sufficient as a weight, ie, the rated type 1M shown in Fig. 6. is formed.

In such a configuration, the vibration isolation/seismic isolation table 9 of the foundation floor 71
The vibration generated between the
Since the vibration is absorbed by the vibration-resistant field 95, the vibration does not have an adverse effect on the vibration-resistant field 95.

In this case, the vibration isolation/seismic isolation table 93 is formed to have a rated weight M0 as shown in FIG. Become. Therefore, the vibration isolation/seismic isolation table 93 has a rated natural frequency f for each vibration component. Therefore, in the event of an earthquake, the mounted anti-vibration device 95 does not resonate with the vibration component of the earthquake vibration, and there is no risk of the mounted anti-vibration device 95 tipping over on the base isolation table 93. In addition, even in vibrations on the micron order such as constantly occurring traffic vibrations, building vibrations, and mechanical vibrations, no resonance is observed at all, and the image of an electron microscope, which is the anti-vibration device 95, does not blur.
In a reduction projection exposure apparatus or the like, short circuits of wiring patterns do not occur.

[Problem that the invention seeks to solve]

However, such a conventional vibration absorption unit 73
The structure of the vibration isolation/seismic isolation table using the vibration damping device 950 has a total weight of several tons to several tens of tons in order to be able to sufficiently absorb minute vibrations on the micron order without being affected by the weight of the anti-vibration device 950 mounted on it. It is necessary to attach a vibration isolation/seismic isolation table 93 with a rated weight M0 of up to 100 mL on top of the vibration absorbing unit 73. The installation of such a heavy vibration isolation/seismic isolation table 93 requires only half-opening (the vibration isolation/seismic isolation table itself is bulky, the position of the base is high from the foundation floor, and the anti-vibration device 95 has a problem that makes its installation unstable.

The present invention was made in view of these circumstances, and it is possible to sufficiently absorb seismic vibrations or environmental vibrations generated in the vibration isolation/base isolation table even when using a lightweight vibration isolation/base isolation table. The purpose is to propose a vibration absorption unit that can.

[Means for solving problems]

In order to achieve the above-mentioned object, the present invention uses an elastic vibration absorbing unit that is arranged between a vibration isolation/seismic isolation table and a foundation floor, etc., and absorbs vibrations occurring in the vibration isolation/seismic isolation table. A stacked body is formed by stacking materials and metal materials alternately, and magnetic materials supported on the upper and lower sides of the stacked body are respectively provided, and the elastic material and the metal material are compressed by the magnetic force of the magnetic materials. shall be.

[Effect]

According to the vibration absorption unit according to the present invention, the magnetic material pinches the elastic material and the metal material by magnetic force.

This clamping force has the same effect as when pressing an elastic material and a metal material with a heavy vibration isolation/seismic isolation table. Therefore, the magnetic force of the magnetic material can replace the vibration isolation/seismic isolation table for heavy objects, and the vibration absorption unit has the rated natural frequency without being affected by the weight of the vibration isolation/seismic isolation table and the mounted anti-vibration device. and does not resonate with seismic vibrations or environmental vibrations on the micron order.
It is possible to absorb these vibrations that occur in the vibration isolation/seismic isolation table.

〔Example〕

Preferred embodiments of the vibration absorbing unit according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is an explanatory diagram of the structure of a vibration isolation/seismic isolation table using a vibration absorption unit according to the present invention. As shown in FIG. 1, vibration absorbing units 12, 12, etc. according to the present invention are installed at predetermined positions on the foundation floor 10. The vibration absorption unit 12 includes a rubber plate 14 and a metal plate 15 as shown in FIG.
It is formed into a cylindrical shape by stacking them alternately.

Flanges 18 and 19 are crimped to the upper and lower ends of the cylindrical vibration absorbing unit 12. The flange 18 at the lower end is fixed to the foundation floor 10, and the flange 19 at the upper end is fixed to the lower surface of the vibration isolation/seismic isolation table 20. The vibration isolation/seismic isolation table 20 is formed of a lightweight plate, and a vibration damping device 22 is placed on the top surface.

Further, on the upper surface of the lower end flange 18, a plurality of magnetic materials 16,
... are fixed, and magnetic materials 17 ... are fixed to the lower surface of the upper end flange 19 facing each magnetic material 16. These pairs of magnetic materials 16 and 17 are the rubber plate 14 and the metal plate 1.
5 and is supported at both ends of the stack via flanges 1, 9.19. Further, the magnetic material 16 and the magnetic material 17 are formed with different polarities, are spaced apart from each other for a certain period of time, and are arranged so as to be attracted to each other by magnetic force.

The magnetic force of the magnetic material 16, 17 is made of a highly magnetic material having a magnetic flux density of about 104 Gauss, and the attraction force between the magnetic plates 16, 17 is about several kg/cm2. Note that the magnetic material 16.17 may be formed of an electromagnet, and in this case, the magnetic force of the magnetic material 16.17 can be appropriately varied.

According to the vibration absorption unit according to the present invention configured as described above, the vibration generated between the foundation floor 1.0 and the vibration isolation/seismic isolation table 20 can be efficiently absorbed by the vibration absorption units 12, 12... well absorbed. In this case, the vibration absorption unit 12
In this case, due to the mutual attraction between the pair of magnetic materials 16 and 17, a similar clamping force is applied to the rubber plate 14 and the metal plate 15 when pressed by a heavy seismic isolation table. That is, magnetic material 16.1
The magnetic attraction force between the vibration absorbing unit 120 has the effect of applying a clamping force of several tons to several tens of tons to the main body of the vibration absorbing unit 120.

For this reason, the vibration isolation/seismic isolation table 20 on the vibration absorption unit 12
Although the vibration isolation/seismic isolation table 20 is lightweight, the natural frequency f is the rated natural frequency f.

It absorbs and eliminates not only earthquake vibrations, but also minute vibrations on the micron order, such as outdoor traffic vibrations from cars and trains, and indoor equipment vibrations of rotating equipment such as motors and fans. The vibration/seismic isolation table 20 is subjected to vibration isolation/seismic isolation. Note that if an electromagnet is used for the magnetic material 16, 17, the magnet can be changed, so that the magnetic force can be changed appropriately according to the weight of the mounting device 22.

FIG. 3 is an explanatory diagram showing a modification of the structure of a vibration isolation/seismic isolation table using the vibration absorption unit according to the present invention. The members and structures used in the vibration absorption unit 12 and the vibration isolation/seismic isolation table 20 shown in FIG. 3 are the same as those in FIG. It will be omitted. The vibration isolation/seismic isolation table shown in FIG. 3 differs in structure from the vibration isolation/seismic isolation table shown in FIG. 1 in that a viscous damper 24 is provided.

A viscous damper 2 is installed between the foundation floor 10 and the vibration isolation/seismic isolation table 20.
4 is provided, and the viscous damper 24 is attached to a container 26 attached to the foundation floor 10, a viscous liquid 28 filled in the container 26, and a viscous damper 24 attached to the lower surface of the vibration isolation/seismic isolation table 20, with the lower end being in the viscous liquid 28. The resistance member 30 is inserted into the resistance member 30.

In such a configuration, in the viscous damper 24, the resistance member 30, which vibrates with the vibration of the vibration isolation/seismic isolation table 20, absorbs the viscous liquid 28.
By vibrating inside, resistance is received from the viscous liquid 28,
The vibration of the vibration isolation/seismic isolation table 20 is absorbed. .

〔Effect of the invention〕

As explained above, according to the vibration absorption unit according to the present invention, the elastic material and the metal material are stacked alternately, and the elastic material and the metal material are compressed by magnetic force with the magnetic material.
Even when the vibration absorption unit is applied to a lightweight vibration isolation/seismic isolation table and mounted equipment, it can sufficiently absorb seismic vibrations or vibrations on the micron order without causing resonance.

[Brief explanation of the drawing]

Figure 1 shows the i! Figure 2 is a sectional view of the vibration absorption unit according to the present invention, Figure 3 is an explanatory diagram of another structure of a vibration isolation/seismic isolation table in which the vibration absorption unit according to the present invention is used, and Figure 4 is a cross-sectional view of the vibration absorption unit according to the present invention. An explanatory diagram of the structure of a vibration isolation/seismic isolation floor using a conventional vibration absorption unit. Figure 5 is a cross-sectional view of the conventional vibration absorption unit. Figure 6 is an illustration of the weight and natural frequency of the conventional vibration absorption unit. It is a correlation diagram. 10... Foundation floor, 12... Vibration absorption unit,
14...Rubber plate, 15...Metal plate, 16.
17...Magnetic material, 18.19...Flange,
20... Vibration isolation/seismic isolation table, 22... Anti-vibration device.

Claims (2)

[Claims] (1) In the vibration absorption unit, which is placed between the vibration isolation/seismic isolation table and the foundation floor, etc., and absorbs the vibrations generated in the vibration isolation/seismic isolation table, elastic materials and metal materials are alternately stacked. A vibration absorbing unit characterized in that the stacked bodies are stacked, magnetic materials supported on the top and bottom of the stacked bodies are provided, and the elastic material and the metal material are compressed by the magnetic force of the magnetic materials. (2) The vibration absorbing unit according to claim 1, wherein an electromagnet is used as the magnetic material, and the magnetic force can be varied.