JPH01134241A - Electrode for measuring volume resistivity of organic solvent - Google Patents
Electrode for measuring volume resistivity of organic solventInfo
- Publication number
- JPH01134241A JPH01134241A JP29207287A JP29207287A JPH01134241A JP H01134241 A JPH01134241 A JP H01134241A JP 29207287 A JP29207287 A JP 29207287A JP 29207287 A JP29207287 A JP 29207287A JP H01134241 A JPH01134241 A JP H01134241A
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- electrode plate
- org
- volume resistivity
- organic solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003960 organic solvent Substances 0.000 title claims description 34
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 26
- 239000002904 solvent Substances 0.000 abstract 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 15
- 239000012212 insulator Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は有機系溶剤の体積抵抗率測定電極に係り、特に
液温を補正しながら気泡を含んだ体積抵抗率の大きい有
機系溶剤を少量で測定するための体積抵抗率測定電極に
関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electrode for measuring the volume resistivity of an organic solvent, and in particular, the present invention relates to an electrode for measuring the volume resistivity of an organic solvent. This invention relates to a volume resistivity measuring electrode for measuring volume resistivity.
従来の体積抵抗率を測定する電極は、特開昭６１−９０
０４６号公報に記載のように流出入口を設けた庭付円筒
状の容器に液状絶縁物を送り込み、２重に配置した２つ
の円筒状の金属板間に流れる微少電流を測定するように
なっていた。The conventional electrode for measuring volume resistivity is disclosed in Japanese Patent Application Laid-Open No. 1986-90.
As described in Publication No. 046, a liquid insulator is sent into a cylindrical container with a garden equipped with an inlet and an inlet, and the minute current flowing between two cylindrical metal plates arranged in double layers is measured. Ta.
−しかしこのような構造をした電極で体積抵抗率を測定
する時、液状絶縁物中に気泡を含んでいたときには測定
される微少電流が安定しないため忙精度良く測定するこ
とができなかりた。-However, when measuring volume resistivity using an electrode with such a structure, if the liquid insulator contains air bubbles, the minute current measured is unstable, making it difficult to measure with high accuracy.
また、１０３ＭΩ・副以上の体積抵抗率を測定するのに
多量の液状絶縁物が必要であった。Furthermore, a large amount of liquid insulator was required to measure a volume resistivity of 103 MΩ·sub or higher.
上記従来技術は、流出入口を設けた庭付円筒状の容器に
液状絶縁物を満たした状態で体積抵抗率を測定するため
釦多量の液状絶縁物を必要とし、液状絶縁物中に気泡を
含んだままで容器内に流入させると安定した正確な体積
抵抗率を測定することができないという問題があった。The above conventional technology requires a large amount of liquid insulator in order to measure the volume resistivity in a cylindrical container with an inlet and outlet filled with liquid insulator, and the liquid insulator does not contain air bubbles. There is a problem in that if the bulk resistivity is allowed to flow into the container, stable and accurate volume resistivity cannot be measured.
本発明の目的は、液状絶縁物である有機系溶剤中に含ま
れている気泡を分離しながら少量の液量で常時有機系溶
剤の体積抵抗率を精度良く連続的に測定する電極を供給
することくある。An object of the present invention is to provide an electrode that can constantly and accurately measure the volume resistivity of an organic solvent using a small amount of liquid while separating air bubbles contained in the organic solvent, which is a liquid insulator. There are many.
上記目的は、有機系溶剤を円筒状の容器Ｋｉ人させると
きに有機系溶剤中に含まれる気泡を気泡抜き口から流出
口へ分離し、有機系溶剤が接する円筒状の金属電極板の
表面積を必要最少限にすることＫより達成される。The above purpose is to separate the air bubbles contained in the organic solvent from the air outlet to the outlet when the organic solvent is poured into a cylindrical container, and to reduce the surface area of the cylindrical metal electrode plate that the organic solvent comes into contact with. This is achieved by minimizing the necessary minimum.
有機系溶剤を電極本体の流入口から対電極と一定の電圧
をかけた主Ｎ極の２重の円筒状金属板間忙流入させると
き、主電極の上部忙殺けた気泡抜き口から有機系溶剤の
一部といっしょ忙有機系溶剤に含まれた気泡が抜けて電
極本体の流出口へ送られる・気泡を取り去った有機系溶
剤は、円筒状の２つの金属板間を流れた後に主電極板の
内側を通って流出口忙送られて電極本体の流出口へ送ら
れて排出される。When an organic solvent is flowed from the inlet of the electrode body between the double cylindrical metal plates of the counter electrode and the main N pole to which a constant voltage is applied, the organic solvent is flowed from the air bubble vent at the top of the main electrode. Some of the air bubbles contained in the organic solvent escape and are sent to the outlet of the electrode main body.The organic solvent with the air bubbles removed flows between two cylindrical metal plates and is then sent to the main electrode plate. It passes through the inside and is sent to the outlet of the electrode body where it is discharged.
これ釦よって、常時気泡が取り去られた有機系溶剤が円
筒状の主電極と対電極間を流れるので、正確で精度良い
体積抵抗率を測定することができる・
また、有機系溶剤を電極本体の流出口から排出するため
の主電極内部に設ける流路の体積を極力押えることで有
機系溶剤の液量を少量にすることができる。This button allows the organic solvent from which air bubbles have been removed to flow between the cylindrical main electrode and the counter electrode, allowing accurate and precise volume resistivity measurements. By minimizing the volume of the flow path provided inside the main electrode for discharging from the outlet of the organic solvent, the amount of organic solvent can be reduced to a small amount.
本発明を実施例によりさらに詳細に説明する。 The present invention will be explained in more detail with reference to Examples.
第１図は、本発明の実施例である体積抵抗率測定電極の
構造図、第２図は本発明の電源回路図、第３〜第５図は
本発明の電極で測定した結果を示す図である・
第２図忙おいて、直流安定電源１１で常時回路内に一定
電圧をかけ、主電極１、対電極２間に発生する電流を電
流指示器１３で測定することにより有機系溶剤１４の体
積抵抗率を求めることができる。Fig. 1 is a structural diagram of a volume resistivity measuring electrode which is an embodiment of the present invention, Fig. 2 is a power supply circuit diagram of the present invention, and Figs. 3 to 5 are diagrams showing measurement results with the electrode of the present invention. 2, by constantly applying a constant voltage in the circuit with the stable DC power supply 11 and measuring the current generated between the main electrode 1 and the counter electrode 2 with the current indicator 13, the organic solvent 14 The volume resistivity of can be determined.
第゛１図は、上記回路中の電極の構造を示す断面図で、
１は主電極端子、２は対電極端子、４が主電極板、５は
対電極板、３は液温検出器端子、６は液温検出用センサ
と、Ｍ縁物の電極本体１ｏから電極は構成されている・
電極本体１０に設けた臥ロアから有機系溶剤１４から流
入され、有機系溶剤１４に含まれる気泡１５は有機系溶
剤１４の一部といっしょに主電極板４上部に設けた気泡
抜き口８から主電極板の内側の流路に送られる＠気泡を
含まない有機系溶剤１４は、主電極板４と対電極板５の
間に送られ、主電極板４の内側の流路を通って気泡抜き
口８から流出される気泡を含んだ有機系溶剤１４と合流
し、電極本体１０に設けられた流出口９から排出される
。この時、主電極板４の内側の流路に液温検出用センサ
ｄＫより有機系溶剤１４の液温を測定する。FIG. 1 is a cross-sectional view showing the structure of the electrodes in the above circuit.
1 is a main electrode terminal, 2 is a counter electrode terminal, 4 is a main electrode plate, 5 is a counter electrode plate, 3 is a liquid temperature detector terminal, 6 is a sensor for liquid temperature detection, and an electrode from the electrode body 1o of the M edge is composed of
The organic solvent 14 flows in from the lower lower part of the electrode body 10, and the air bubbles 15 contained in the organic solvent 14 are removed together with a part of the organic solvent 14 from the air bubble vent 8 provided on the upper part of the main electrode plate 4. The @bubble-free organic solvent 14 is sent to the channel inside the main electrode plate, and is sent between the main electrode plate 4 and the counter electrode plate 5, and the bubble-free organic solvent 14 passes through the channel inside the main electrode plate 4. It joins with the organic solvent 14 containing bubbles flowing out from the outlet 8 and is discharged from the outlet 9 provided in the electrode body 10 . At this time, the liquid temperature of the organic solvent 14 is measured by a liquid temperature detection sensor dK in the flow path inside the main electrode plate 4.
第３図は、上記回路電極を用いて有機系溶剤１４の体積
抵抗率を測定した結果である。有機系溶剤１４の液温か
上昇すると体積抵抗率は
Ｒ１＝ Ｒｇ ｅＡ（ＴＩ−Ｔり 、−０，−（１）に
表わすような関係で減少する・（０式のＲ１，ＲＪはそ
れぞれ液温ＴＩ’Ｃ，Ｔ２°Ｃにおける体積抵抗率。FIG. 3 shows the results of measuring the volume resistivity of the organic solvent 14 using the circuit electrode described above. As the liquid temperature of the organic solvent 14 increases, the volume resistivity decreases according to the relationship shown in R1 = Rg eA (TI-T, -0, -(1). (R1 and RJ in equation 0 are respectively liquid temperature TI'C, volume resistivity at T2°C.
Ａは定数を示す、そこで、主電極１．対電極２間で発生
する電流を電流指示器１３で測定した値と液温検出用セ
ンサ６で測定して得られだ液温を（１）式に代入すると
とによって、求めたい液温での体積抵抗率を得ることが
できる・尚、電極本体１０の材質は絶縁物のもの（例え
ばポリ四フッ化エチレン）電極板４５の材質はステンレ
ス鋼（ＳＵＳ３１６゛Ｌ）、液温検出用センサ６はステ
ンレス鋼で被覆したものを使用する。A indicates a constant, where the main electrode 1. By substituting the value obtained by measuring the current generated between the counter electrode 2 with the current indicator 13 and the liquid temperature obtained by measuring with the liquid temperature detection sensor 6 into equation (1), the desired liquid temperature can be determined. The material of the electrode body 10 is an insulator (for example, polytetrafluoroethylene), the material of the electrode plate 45 is stainless steel (SUS316L), and the sensor 6 for detecting liquid temperature is Use one coated with stainless steel.
第４，５図は、上記回路電極を用いてイソプロピルアル
コール中のＮα量、水分量と体積抵抗率との関係を求め
た結果である。第４図の横軸がＮａ量、縦軸が液温２０
°Ｃでの体積抵抗率であり、イソプロピルアルコール中
和共存するＮａ量を０．１ｐｐｂ以上検出することがで
きる。第５図の横軸が水分量、縦軸が液温２０°Ｃでの
体積抵抗率であり。FIGS. 4 and 5 show the results of determining the relationship between the amount of Nα, the amount of water, and the volume resistivity in isopropyl alcohol using the above-mentioned circuit electrode. In Figure 4, the horizontal axis is the Na content, and the vertical axis is the liquid temperature 20
It is the volume resistivity at °C, and the amount of Na coexisting with isopropyl alcohol neutralization can be detected at 0.1 ppb or more. In FIG. 5, the horizontal axis is the water content, and the vertical axis is the volume resistivity at a liquid temperature of 20°C.
イソプロピルアルコール中に含有する水分量を０．０２
Ｗｔ ％から検出可能である。尚、上記の例で有機系溶
剤としてイソプμビルアルコールを用いたが、液状絶縁
物であれば同程度の検出が可能である。The amount of water contained in isopropyl alcohol is 0.02
It can be detected from Wt%. Although isopuvyl alcohol was used as the organic solvent in the above example, the same level of detection is possible with any liquid insulator.
本発明によれば、従来測定することが困難であった気泡
を含んだ有機系溶剤の体積抵抗率を精度良く測定するこ
とができる。特忙、有機系溶剤中の不純物イオン濃度や
水分量が問題となる半導体素子製造で用いる有機系溶剤
の品質を連続的に管理できるようになるため、不純物イ
オンなどによる汚染を防止することに役立つ、また、本
発明の電極を使用するととｋより、１０３ＭΩ・個以上
の体積抵抗率を少量の有機系溶剤で測定可能となる−According to the present invention, it is possible to accurately measure the volume resistivity of an organic solvent containing bubbles, which has been difficult to measure conventionally. It will be possible to continuously control the quality of organic solvents used in semiconductor device manufacturing, where impurity ion concentration and water content in organic solvents are problematic, and will help prevent contamination caused by impurity ions. Furthermore, when the electrode of the present invention is used, it becomes possible to measure a volume resistivity of 103 MΩ or more with a small amount of organic solvent.
第１図は本発明の一実施例の体積抵抗率測定電極の断面
図、第２図は本発明の電源回路図、第３図は有機系溶剤
の液温か体積抵抗率忙及ぼす影響を示す線図、８４図は
イソプロピルアルコール中のＮａ量と本発明の電極で測
定した体積抵抗率との関係を示す線図、第５図はイソプ
ロピルアルコール中の水分量と本発明の電極で測定した
体積抵抗率との関係を示す線図である。
４・・・主電極板、５・・・対電極板、６・・・液温検
出用センサ、７・・・流入口、Ｂ・・・気泡抜き口、９
・・・流出口。
１０・・・電極本体、１４・・・有機系溶剤。
捲ｌｒＡ
晃２目
／″）
第５目
７ｔ 蚤 （υ
晃４ｖ４
第６呂
７に分量 ＣＷｔｆ−）Fig. 1 is a cross-sectional view of a volume resistivity measuring electrode according to an embodiment of the present invention, Fig. 2 is a power supply circuit diagram of the present invention, and Fig. 3 is a line showing the influence of the liquid temperature of an organic solvent on the volume resistivity. Figure 84 is a diagram showing the relationship between the amount of Na in isopropyl alcohol and the volume resistivity measured with the electrode of the present invention, and Figure 5 is a diagram showing the relationship between the amount of water in isopropyl alcohol and the volume resistivity measured with the electrode of the present invention. It is a diagram showing the relationship with the rate. 4... Main electrode plate, 5... Counter electrode plate, 6... Sensor for liquid temperature detection, 7... Inflow port, B... Air bubble vent, 9
... Outlet. 10... Electrode body, 14... Organic solvent. Roll lrA Akira 2nd/″) 5th 7t Flea (υ Akira 4v4 Volume 6th Ro7 CWtf-)
Claims (1)
、電極間を満たした有機系溶剤を流れる微少電流から体
積抵抗率を測定することを特徴とする有機系溶剤の体積
抵抗率測定電極。1. Volume resistivity measurement of organic solvents, which is characterized by applying a constant voltage to one side of two concentric metal plates and measuring the volume resistivity from a minute current flowing through the organic solvent filled between the electrodes. electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29207287A JPH01134241A (en) | 1987-11-20 | 1987-11-20 | Electrode for measuring volume resistivity of organic solvent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29207287A JPH01134241A (en) | 1987-11-20 | 1987-11-20 | Electrode for measuring volume resistivity of organic solvent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134241A true JPH01134241A (en) | 1989-05-26 |
Family
ID=17777173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29207287A Pending JPH01134241A (en) | 1987-11-20 | 1987-11-20 | Electrode for measuring volume resistivity of organic solvent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134241A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317214A (en) * | 2005-05-11 | 2006-11-24 | Saginomiya Seisakusho Inc | Electrical conductivity meter |
-
1987
- 1987-11-20 JP JP29207287A patent/JPH01134241A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317214A (en) * | 2005-05-11 | 2006-11-24 | Saginomiya Seisakusho Inc | Electrical conductivity meter |
| JP4611799B2 (en) * | 2005-05-11 | 2011-01-12 | 株式会社鷺宮製作所 | Electric conductivity meter |
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