JPH01134091A - Screw vacuum pump - Google Patents
Screw vacuum pumpInfo
- Publication number
- JPH01134091A JPH01134091A JP62292083A JP29208387A JPH01134091A JP H01134091 A JPH01134091 A JP H01134091A JP 62292083 A JP62292083 A JP 62292083A JP 29208387 A JP29208387 A JP 29208387A JP H01134091 A JPH01134091 A JP H01134091A
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- vacuum pump
- inlet port
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims abstract description 9
- 238000007906 compression Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はスクリュー真空ポンプに係シ、特に到達圧力を
下げるために好適な形状の吸気口を備えるスクリュー真
空ポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a screw vacuum pump, and more particularly to a screw vacuum pump provided with an inlet port having a shape suitable for lowering the ultimate pressure.
従来のこの種のスクリュー真空ポンプにおける吸気口は
、例えば特開昭６ｏ−２３３２５５号公報に記載のよう
に、中間流あるいは分子流の流れを考慮し吸気口からの
流れがロータにスムーズに流入するように吸気部の抵抗
を小さくするため、ロータの半径方向および軸方向から
流入させるような構造となっていた。The intake port in a conventional screw vacuum pump of this type takes into account intermediate flow or molecular flow, so that the flow from the intake port smoothly flows into the rotor, as described in, for example, Japanese Patent Application Laid-Open No. 6O-233255. In order to reduce the resistance at the intake section, the structure was such that the air was allowed to flow in from the radial and axial directions of the rotor.
上記従来技術は、ロータ内への流体吸込口をロータ軸方
向とロータ軸直角方向から同時に吸い込むように形成さ
れており、ロータ吐出口から吸込口への流体の漏れｔ−
最少限にするという点については配慮がなされておらず
、到達圧力をさらに下げるという点から、吸気口形状に
問題があった。In the above conventional technology, the fluid suction port into the rotor is formed to simultaneously suck fluid from the rotor axial direction and the direction perpendicular to the rotor axis, and fluid leakage from the rotor discharge port to the suction port occurs.
No consideration was given to minimizing the pressure, and the shape of the intake port had problems in terms of further lowering the ultimate pressure.
本発明の目的は上述のようにロータ吐出口から吸込口へ
の流体の漏れを最少限にし、真空性能をさらに向上する
ことにある。As described above, an object of the present invention is to minimize the leakage of fluid from the rotor discharge port to the suction port, thereby further improving vacuum performance.
Ｃ問題点を解決するための手段〕
上記目的は、オスロータ、メスロータの外周部ｔ−全て
ケーシングでおおいロータ内への流体吸込口を軸方向の
みとすることによシ達成される。Means for Solving Problem C] The above object is achieved by covering the outer peripheries of the male rotor and female rotor with a casing and making the fluid suction port into the rotor only in the axial direction.
ロータ吸込口（真空側）より吸込まれた流体はロータ内
で昇圧され吐出口（大気側）へ排出される。このとき、
真空性能に影響を与える。The fluid sucked through the rotor suction port (vacuum side) is pressurized within the rotor and is discharged to the discharge port (atmospheric side). At this time,
Affects vacuum performance.
吐出口から吸込口への漏れ量はロータを収納するケーシ
ングとａ−夕闇のすきまとその長さで決まる。本発明に
おいてはロータへの吸込口はロータ軸方向のみに設けら
れているので、ａ−夕の長さ分が全てシール長さとして
有効に作用するので。The amount of leakage from the discharge port to the suction port is determined by the gap and length between the casing that houses the rotor and the a-twilight. In the present invention, since the suction port to the rotor is provided only in the axial direction of the rotor, the entire length of a-2 effectively acts as the seal length.
吐出口から吸込口への漏れ量を最小限におさえることが
でき、真空性能の向上を図ることができる。The amount of leakage from the discharge port to the suction port can be minimized, and vacuum performance can be improved.
以下、本発明の一実施例を第１図、第２図、第３図によ
シ説明する。第１図はスクリュー真空ポンプの側面図、
第２図は本体ブロックの縦断面図、第３図は本発明の効
果を示した実測値の比較図である。第１図において、１
はスクリュー真空ポンプ本体ブロックで、２は増速機構
を収納するギヤケーシング、３は本体ブロックを駆動す
るためのモードルである。本発明は第１図の本体ブロッ
ク１に採用されておシ、その縦断面を示したものが第２
図である。ロータ４はメインケーシング５及び吸込側軸
受を収納する吸込側ケージング６内に両持ちで収納され
ている。７は吸込側軸受を潤滑するための潤滑油をため
ている吸込側カバーである。１０ａ及び１０ｂは軸受８
，９がらのロータ内への油の混入を防止するための軸封
装置である。An embodiment of the present invention will be described below with reference to FIGS. 1, 2, and 3. Figure 1 is a side view of the screw vacuum pump.
FIG. 2 is a longitudinal sectional view of the main body block, and FIG. 3 is a comparison diagram of actual measured values showing the effects of the present invention. In Figure 1, 1
2 is a screw vacuum pump main body block, 2 is a gear casing that houses the speed increasing mechanism, and 3 is a modele for driving the main body block. The present invention is adopted in the main body block 1 shown in Fig. 1, and the longitudinal section thereof is shown in Fig. 2.
It is a diagram. The rotor 4 is housed on both sides within a main casing 5 and a suction side casing 6 that houses a suction side bearing. 7 is a suction side cover that stores lubricating oil for lubricating the suction side bearing. 10a and 10b are bearings 8
, 9 is a shaft sealing device for preventing oil from entering the rotor.
ロータとケーシングによって作シ出される吸気。Intake air produced by the rotor and casing.
移送、圧縮の三工程は全てメインケーシング内で行われ
るようにロータの歯溝は全てメインケーシング内に収納
されている。このとキロータ歯溝の外周はメインケーシ
ング５の一部５ｂで全ておおわれておシ、ロータ４への
気体の吸込口５ａはロータ４の軸方向のみとなっている
。即ちメインケーシング５に設けられた、吸込口５ａか
ら吸込まれた気体は、吸込側ケーシング６に設けられた
吸込ボート６ａを介してロータ４へ流入する構造となっ
ている。ロータ４内へ吸込まれた気体は、その中で移送
、圧縮の工程を経て吐出口５ｃへ、即ち大気へ排出され
る。真空ポンプにおいては大気側（吐出口５ｃ）から真
空側（吸込口Ｓａ）への漏れ量をいかに小さくするかに
よって到達圧力の良否が左右されるので、本発明のよう
に吸込口５ａを軸方向のみとし、ロータ４の外周とメイ
ンケーシング５間のシール長さを吐出口５Ｃから吸込口
５ａまで有効に使うことによシ到達圧力の向上を図るこ
とができる。第３図は本発明の効果を示したもので、横
軸に吸込圧力、縦軸に排気速度をある値をもとにパーセ
ント表示したものである。The tooth spaces of the rotor are all housed within the main casing so that all three processes of transfer and compression are performed within the main casing. In this case, the outer periphery of the rotor tooth space is completely covered with a part 5b of the main casing 5, and the gas suction port 5a to the rotor 4 is only in the axial direction of the rotor 4. That is, the structure is such that gas sucked in from a suction port 5a provided in the main casing 5 flows into the rotor 4 via a suction boat 6a provided in the suction side casing 6. The gas sucked into the rotor 4 is transferred and compressed therein before being discharged to the discharge port 5c, that is, to the atmosphere. In a vacuum pump, the quality of the ultimate pressure depends on how small the amount of leakage from the atmosphere side (discharge port 5c) to the vacuum side (suction port Sa) is. By effectively using the seal length between the outer periphery of the rotor 4 and the main casing 5 from the discharge port 5C to the suction port 5a, the ultimate pressure can be improved. FIG. 3 shows the effect of the present invention, with the horizontal axis representing the suction pressure and the vertical axis representing the exhaust speed expressed as a percentage based on a certain value.
実線が本発明を実施した時の排気速度特性で、破線が実
施前のものである。本実施例によれば、到達圧力の改善
に著しい効果がある。The solid line shows the pumping speed characteristics when the present invention was implemented, and the broken line shows the characteristics before implementation. According to this embodiment, there is a remarkable effect in improving the ultimate pressure.
以上説明したように、本発明によれば真空ポンプの到達
圧力を２５〜３０％低下することができ、真空ポンプの
回転数を変えないで、到達圧力を改善できるという効果
がある。As explained above, according to the present invention, the ultimate pressure of the vacuum pump can be reduced by 25 to 30%, and the ultimate pressure can be improved without changing the rotation speed of the vacuum pump.
第１図は本発明の一実施例を示すスクリュー真空ポンプ
の側面図、第２図は本体ブロックの縦断面図、第３図は
発明の効果を示す実測比較図である。
１・・・本体ブロック、２・・・ギヤケーシング、３・
・・モ）”％４・・・ロータ、５・・・メインケーシン
グ、５ａ・・・吸込口、５Ｃ・・・吐出口、６ａ・・・
吸込ボート、第 ７ 口
３ 七−トル
￥］２［￥］FIG. 1 is a side view of a screw vacuum pump showing an embodiment of the present invention, FIG. 2 is a longitudinal cross-sectional view of a main body block, and FIG. 3 is an actual measurement comparison diagram showing the effects of the invention. 1...Main block, 2...Gear casing, 3.
...Mo)"%4...Rotor, 5...Main casing, 5a...Suction port, 5C...Discharge port, 6a...
Suction boat, 7th port 3 7-tor ¥] 2 [¥]
Claims (1)
ーシングより成り、吸気工程、移送工程、圧縮工程の機
能を有するスクリュー真空ポンプにおいて、前記ロータ
内への流体吸込口をロータ軸方向のみに設けたことを特
徴とするスクリュー真空ポンプ。1. A screw vacuum pump consisting of a male rotor, a female rotor, and a casing that houses them, and having the functions of an intake process, a transfer process, and a compression process, characterized in that a fluid suction port into the rotor is provided only in the axial direction of the rotor. Screw vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62292083A JPH01134091A (en) | 1987-11-20 | 1987-11-20 | Screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62292083A JPH01134091A (en) | 1987-11-20 | 1987-11-20 | Screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134091A true JPH01134091A (en) | 1989-05-26 |
Family
ID=17777324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62292083A Pending JPH01134091A (en) | 1987-11-20 | 1987-11-20 | Screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134091A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8764424B2 (en) | 2010-05-17 | 2014-07-01 | Tuthill Corporation | Screw pump with field refurbishment provisions |
-
1987
- 1987-11-20 JP JP62292083A patent/JPH01134091A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8764424B2 (en) | 2010-05-17 | 2014-07-01 | Tuthill Corporation | Screw pump with field refurbishment provisions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |