JPH01133732U - - Google Patents
Info
- Publication number
- JPH01133732U JPH01133732U JP2994288U JP2994288U JPH01133732U JP H01133732 U JPH01133732 U JP H01133732U JP 2994288 U JP2994288 U JP 2994288U JP 2994288 U JP2994288 U JP 2994288U JP H01133732 U JPH01133732 U JP H01133732U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- chamber head
- thin film
- heads
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2994288U JPH01133732U (en, 2012) | 1988-03-07 | 1988-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2994288U JPH01133732U (en, 2012) | 1988-03-07 | 1988-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133732U true JPH01133732U (en, 2012) | 1989-09-12 |
Family
ID=31254561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2994288U Pending JPH01133732U (en, 2012) | 1988-03-07 | 1988-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133732U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06272027A (ja) * | 1993-03-17 | 1994-09-27 | Fuji Photo Film Co Ltd | 真空蒸着槽の自動洗浄方法及び装置 |
-
1988
- 1988-03-07 JP JP2994288U patent/JPH01133732U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06272027A (ja) * | 1993-03-17 | 1994-09-27 | Fuji Photo Film Co Ltd | 真空蒸着槽の自動洗浄方法及び装置 |