JPH01133067U - - Google Patents

Info

Publication number
JPH01133067U
JPH01133067U JP2746888U JP2746888U JPH01133067U JP H01133067 U JPH01133067 U JP H01133067U JP 2746888 U JP2746888 U JP 2746888U JP 2746888 U JP2746888 U JP 2746888U JP H01133067 U JPH01133067 U JP H01133067U
Authority
JP
Japan
Prior art keywords
clean
storage space
side wall
cargo storage
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2746888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2746888U priority Critical patent/JPH01133067U/ja
Publication of JPH01133067U publication Critical patent/JPH01133067U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP2746888U 1988-02-29 1988-02-29 Pending JPH01133067U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2746888U JPH01133067U (US06521211-20030218-C00004.png) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2746888U JPH01133067U (US06521211-20030218-C00004.png) 1988-02-29 1988-02-29

Publications (1)

Publication Number Publication Date
JPH01133067U true JPH01133067U (US06521211-20030218-C00004.png) 1989-09-11

Family

ID=31249987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2746888U Pending JPH01133067U (US06521211-20030218-C00004.png) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH01133067U (US06521211-20030218-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11345859A (ja) * 1998-04-04 1999-12-14 Tokyo Electron Ltd 処理装置及び処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4729285U (US06521211-20030218-C00004.png) * 1971-04-23 1972-12-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4729285U (US06521211-20030218-C00004.png) * 1971-04-23 1972-12-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11345859A (ja) * 1998-04-04 1999-12-14 Tokyo Electron Ltd 処理装置及び処理方法

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