JPH01132948U - - Google Patents
Info
- Publication number
- JPH01132948U JPH01132948U JP2532188U JP2532188U JPH01132948U JP H01132948 U JPH01132948 U JP H01132948U JP 2532188 U JP2532188 U JP 2532188U JP 2532188 U JP2532188 U JP 2532188U JP H01132948 U JPH01132948 U JP H01132948U
- Authority
- JP
- Japan
- Prior art keywords
- piping
- liquid
- detection device
- chemical liquid
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2532188U JPH01132948U (it) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2532188U JPH01132948U (it) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01132948U true JPH01132948U (it) | 1989-09-11 |
Family
ID=31245956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2532188U Pending JPH01132948U (it) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01132948U (it) |
-
1988
- 1988-02-26 JP JP2532188U patent/JPH01132948U/ja active Pending