JPH01132948U - - Google Patents
Info
- Publication number
- JPH01132948U JPH01132948U JP2532188U JP2532188U JPH01132948U JP H01132948 U JPH01132948 U JP H01132948U JP 2532188 U JP2532188 U JP 2532188U JP 2532188 U JP2532188 U JP 2532188U JP H01132948 U JPH01132948 U JP H01132948U
- Authority
- JP
- Japan
- Prior art keywords
- piping
- liquid
- detection device
- chemical liquid
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例の配管漏液検知装置
の配管図、第２図は従来の漏液検知装置の配管図
である。
１，５……貯液タンク、２……送液用ポンプ、
３……配管、４……建物、６……循環ポンプ、７
……ＰＨ計、８……表示部、９……半導体ウエハ
の処理装置、１０……薬液槽、１１……クリーン
ルーム、１２……容器、１３……検知帯、１４…
…漏液検知装置本体。
FIG. 1 is a piping diagram of a piping liquid leakage detection device according to an embodiment of the present invention, and FIG. 2 is a piping diagram of a conventional liquid leakage detection device. 1, 5...Liquid storage tank, 2...Liquid feeding pump,
3...Piping, 4...Building, 6...Circulation pump, 7
. . . PH meter, 8 .
...Leakage detection device body.
Claims (1)
記薬液の漏れを検出する配管漏液検知装置におい
て、前記配管のまわりに、水の循環する新らたな
配管を設けて２重構造となし、前記水の成分変化
を測定する手段を設けたことを特徴とする配管漏
液検知装置。 In a piping liquid leakage detection device for detecting leakage of the chemical liquid from the piping that sends the chemical liquid from the liquid storage tank to the device, a new piping for circulating water is provided around the piping to create a double structure, A piping leak detection device characterized by comprising means for measuring a change in the composition of the water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2532188U JPH01132948U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2532188U JPH01132948U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01132948U true JPH01132948U (en) | 1989-09-11 |
Family
ID=31245956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2532188U Pending JPH01132948U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01132948U (en) |
-
1988
- 1988-02-26 JP JP2532188U patent/JPH01132948U/ja active Pending