JPH01130542U - - Google Patents
Info
- Publication number
- JPH01130542U JPH01130542U JP2779188U JP2779188U JPH01130542U JP H01130542 U JPH01130542 U JP H01130542U JP 2779188 U JP2779188 U JP 2779188U JP 2779188 U JP2779188 U JP 2779188U JP H01130542 U JPH01130542 U JP H01130542U
- Authority
- JP
- Japan
- Prior art keywords
- side walls
- wafers
- semiconductor wafer
- storage jig
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000004615 ingredient Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2779188U JPH01130542U (pl) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2779188U JPH01130542U (pl) | 1988-03-01 | 1988-03-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01130542U true JPH01130542U (pl) | 1989-09-05 |
Family
ID=31250594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2779188U Pending JPH01130542U (pl) | 1988-03-01 | 1988-03-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01130542U (pl) |
-
1988
- 1988-03-01 JP JP2779188U patent/JPH01130542U/ja active Pending