JPH01130253U - - Google Patents
Info
- Publication number
- JPH01130253U JPH01130253U JP2625788U JP2625788U JPH01130253U JP H01130253 U JPH01130253 U JP H01130253U JP 2625788 U JP2625788 U JP 2625788U JP 2625788 U JP2625788 U JP 2625788U JP H01130253 U JPH01130253 U JP H01130253U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detection element
- signal line
- input side
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026257U JPH0722040Y2 (ja) | 1988-02-29 | 1988-02-29 | 電子線マイクロアナライザー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026257U JPH0722040Y2 (ja) | 1988-02-29 | 1988-02-29 | 電子線マイクロアナライザー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130253U true JPH01130253U (enExample) | 1989-09-05 |
| JPH0722040Y2 JPH0722040Y2 (ja) | 1995-05-17 |
Family
ID=31247723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988026257U Expired - Lifetime JPH0722040Y2 (ja) | 1988-02-29 | 1988-02-29 | 電子線マイクロアナライザー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722040Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226757A (ja) * | 1985-07-25 | 1987-02-04 | Shimadzu Corp | 誘導結合プラズマ質量分析装置 |
-
1988
- 1988-02-29 JP JP1988026257U patent/JPH0722040Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226757A (ja) * | 1985-07-25 | 1987-02-04 | Shimadzu Corp | 誘導結合プラズマ質量分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0722040Y2 (ja) | 1995-05-17 |