JPH01130253U - - Google Patents
Info
- Publication number
- JPH01130253U JPH01130253U JP2625788U JP2625788U JPH01130253U JP H01130253 U JPH01130253 U JP H01130253U JP 2625788 U JP2625788 U JP 2625788U JP 2625788 U JP2625788 U JP 2625788U JP H01130253 U JPH01130253 U JP H01130253U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detection element
- signal line
- input side
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は、本考案の電子線マイクロアナライザ
についての一実施例を示す概略の説明図であり、
電子線検出器を中心に示す図である。
図中の符号については、１は電子線マイクロア
ナライザ、２は試料照射部、３は試料部、４は電
子線照射部、５は半導体反射電子検出器、６は電
子線照射口、７は光検出素子、８は照射面、９は
二次電子検出器、１０はシンチレータ、１１は光
検出素子、１２は出力端、１３は信号線、１４は
中央処理装置（ＣＰＵ）、１５は入力側、１６は
出力端、１７は増幅器、１８は入力側、１９は信
号線、２０は出力側、２１はスナツプスイツチ、
２２は端子、２３は接触片、２４は出力側端子、
２５は入力側、２６は信号出力側、２７は入力側
、２８は信号線、２９は作動側回路、３０は作動
側回路、３１は高圧側電源、３２は出力端、３３
は増幅器、３４は入力側、３５は信号線、３６は
出力側、３７は端子である。
FIG. 1 is a schematic explanatory diagram showing one embodiment of the electron beam microanalyzer of the present invention.
It is a diagram mainly showing an electron beam detector. Regarding the symbols in the figure, 1 is the electron beam microanalyzer, 2 is the sample irradiation section, 3 is the sample section, 4 is the electron beam irradiation section, 5 is the semiconductor backscattered electron detector, 6 is the electron beam irradiation port, and 7 is the light beam irradiation section. Detection element, 8 is an irradiation surface, 9 is a secondary electron detector, 10 is a scintillator, 11 is a photodetection element, 12 is an output end, 13 is a signal line, 14 is a central processing unit (CPU), 15 is an input side, 16 is an output end, 17 is an amplifier, 18 is an input side, 19 is a signal line, 20 is an output side, 21 is a snap switch,
22 is a terminal, 23 is a contact piece, 24 is an output side terminal,
25 is the input side, 26 is the signal output side, 27 is the input side, 28 is the signal line, 29 is the operating side circuit, 30 is the operating side circuit, 31 is the high voltage side power supply, 32 is the output end, 33
is an amplifier, 34 is an input side, 35 is a signal line, 36 is an output side, and 37 is a terminal.
Claims (1)
において、備えられている電子線検出素子の周囲
に光検出素子が設けられていることを特徴とする
電子線信号検出器。 An electron beam signal detector including an electron beam signal detection element, characterized in that a photodetection element is provided around the provided electron beam detection element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026257U JPH0722040Y2 (en) | 1988-02-29 | 1988-02-29 | Electron microanalyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026257U JPH0722040Y2 (en) | 1988-02-29 | 1988-02-29 | Electron microanalyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130253U true JPH01130253U (en) | 1989-09-05 |
| JPH0722040Y2 JPH0722040Y2 (en) | 1995-05-17 |
Family
ID=31247723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988026257U Expired - Lifetime JPH0722040Y2 (en) | 1988-02-29 | 1988-02-29 | Electron microanalyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722040Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226757A (en) * | 1985-07-25 | 1987-02-04 | Shimadzu Corp | Inductive coupling plasma mass spectrograph |
-
1988
- 1988-02-29 JP JP1988026257U patent/JPH0722040Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226757A (en) * | 1985-07-25 | 1987-02-04 | Shimadzu Corp | Inductive coupling plasma mass spectrograph |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0722040Y2 (en) | 1995-05-17 |