JPH01129856U - - Google Patents
Info
- Publication number
- JPH01129856U JPH01129856U JP2541088U JP2541088U JPH01129856U JP H01129856 U JPH01129856 U JP H01129856U JP 2541088 U JP2541088 U JP 2541088U JP 2541088 U JP2541088 U JP 2541088U JP H01129856 U JPH01129856 U JP H01129856U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- laser tube
- liquid injection
- injection pipe
- drain pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図および第２図はこの考案の実施例に係り
、第１図はエキシマレーザ装置の縦断正面図、第
２図はその縦断側面図である。第３図は従来例の
縦断正面図である。
１……レーザ管、２……主放電部、２ａ……カ
ソード、２ｂ……アノード、３……ピーキングキ
ヤパシタ、４……ピン電極、５……クロスフロー
フアン、６……フアンガイド、７……熱交換器、
８……洗浄液噴射パイプ、８ａ……ノズル、９…
…開閉バルブ、１５……ドレインパイプ、１６…
…開閉バルブ。
1 and 2 relate to an embodiment of this invention, with FIG. 1 being a longitudinal sectional front view of an excimer laser device, and FIG. 2 being a longitudinal sectional side view thereof. FIG. 3 is a longitudinal sectional front view of the conventional example. DESCRIPTION OF SYMBOLS 1... Laser tube, 2... Main discharge part, 2a... Cathode, 2b... Anode, 3... Peaking capacitor, 4... Pin electrode, 5... Cross flow fan, 6... Fan guide, 7 ……Heat exchanger,
8...Cleaning liquid injection pipe, 8a...Nozzle, 9...
...Opening/closing valve, 15...Drain pipe, 16...
...open/close valve.
Claims (1)
ーザ管内の各構造物に対して洗浄液を噴射する洗
浄液噴射パイプと、この洗浄液噴射パイプに介装
された開閉バルブと、前記レーザ管の底部から導
出されたドレインパイプと、このドレインパイプ
に介装された開閉バルブとを備えたエキシマレー
ザ装置。 A cleaning liquid injection pipe that is inserted into the laser tube and injects cleaning liquid to the inner wall of the laser tube and each structure in the laser tube, an on-off valve that is interposed in this cleaning liquid injection pipe, and a cleaning liquid injection pipe that is inserted from the bottom of the laser tube. An excimer laser device equipped with a drain pipe and an on-off valve installed in the drain pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2541088U JPH01129856U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2541088U JPH01129856U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129856U true JPH01129856U (en) | 1989-09-04 |
Family
ID=31246122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2541088U Pending JPH01129856U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129856U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0423376A (en) * | 1990-05-15 | 1992-01-27 | Toshiba Corp | Device and method for cleaning gas laser apparatus |
-
1988
- 1988-02-26 JP JP2541088U patent/JPH01129856U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0423376A (en) * | 1990-05-15 | 1992-01-27 | Toshiba Corp | Device and method for cleaning gas laser apparatus |