JPH01129832U - - Google Patents

Info

Publication number
JPH01129832U
JPH01129832U JP2460388U JP2460388U JPH01129832U JP H01129832 U JPH01129832 U JP H01129832U JP 2460388 U JP2460388 U JP 2460388U JP 2460388 U JP2460388 U JP 2460388U JP H01129832 U JPH01129832 U JP H01129832U
Authority
JP
Japan
Prior art keywords
wafer
fixing
main body
holes
vacuum suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2460388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2460388U priority Critical patent/JPH01129832U/ja
Publication of JPH01129832U publication Critical patent/JPH01129832U/ja
Pending legal-status Critical Current

Links

JP2460388U 1988-02-26 1988-02-26 Pending JPH01129832U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2460388U JPH01129832U (US06521211-20030218-C00004.png) 1988-02-26 1988-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2460388U JPH01129832U (US06521211-20030218-C00004.png) 1988-02-26 1988-02-26

Publications (1)

Publication Number Publication Date
JPH01129832U true JPH01129832U (US06521211-20030218-C00004.png) 1989-09-04

Family

ID=31244589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2460388U Pending JPH01129832U (US06521211-20030218-C00004.png) 1988-02-26 1988-02-26

Country Status (1)

Country Link
JP (1) JPH01129832U (US06521211-20030218-C00004.png)

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