JPH01129824U - - Google Patents
Info
- Publication number
- JPH01129824U JPH01129824U JP2459688U JP2459688U JPH01129824U JP H01129824 U JPH01129824 U JP H01129824U JP 2459688 U JP2459688 U JP 2459688U JP 2459688 U JP2459688 U JP 2459688U JP H01129824 U JPH01129824 U JP H01129824U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cleaning
- semiconductor
- holding means
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 5
- 239000012530 fluid Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2459688U JPH01129824U (no) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2459688U JPH01129824U (no) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129824U true JPH01129824U (no) | 1989-09-04 |
Family
ID=31244576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2459688U Pending JPH01129824U (no) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129824U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015109381A (ja) * | 2013-12-05 | 2015-06-11 | 株式会社ディスコ | 洗浄装置および切削装置 |
-
1988
- 1988-02-26 JP JP2459688U patent/JPH01129824U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015109381A (ja) * | 2013-12-05 | 2015-06-11 | 株式会社ディスコ | 洗浄装置および切削装置 |