JPH01129643U - - Google Patents
Info
- Publication number
- JPH01129643U JPH01129643U JP2102388U JP2102388U JPH01129643U JP H01129643 U JPH01129643 U JP H01129643U JP 2102388 U JP2102388 U JP 2102388U JP 2102388 U JP2102388 U JP 2102388U JP H01129643 U JPH01129643 U JP H01129643U
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- jig
- pure water
- holder
- measurement sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011156 evaluation Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す模型的概念図
、第２図は従来の評価治具を示す模型的概念図で
ある。
１１……評価治具のホルダー、１２……回折格
子の測定試料、１３，１４……回折格子の限界を
示す標準試料、１５……純水、１６……透明容器
、１７……肉眼、１８……照明ランプ、１９……
ピンセツト。
FIG. 1 is a conceptual diagram showing an embodiment of the present invention, and FIG. 2 is a conceptual diagram showing a conventional evaluation jig. 11...Evaluation jig holder, 12...Diffraction grating measurement sample, 13, 14...Standard sample showing the limit of diffraction grating, 15...Pure water, 16...Transparent container, 17...Naked eye, 18 ...Lighting lamp, 19...
Tweezers.
Claims (1)
入して該回折格子表面での光の反射状況を評価す
る治具において、測定試料を保持するホルダーに
、回折格子の良品限界を表わす１枚以上の標準試
料を装備したことを特徴とする回折格子評価治具
。 In a jig that evaluates the state of light reflection on the surface of a diffraction grating by placing a diffraction grating formed on a semiconductor substrate into pure water, a piece representing the acceptable quality limit of the diffraction grating is placed in the holder that holds the measurement sample. A diffraction grating evaluation jig characterized by being equipped with the above standard samples.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2102388U JPH01129643U (en) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2102388U JPH01129643U (en) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129643U true JPH01129643U (en) | 1989-09-04 |
Family
ID=31237887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2102388U Pending JPH01129643U (en) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129643U (en) |
-
1988
- 1988-02-19 JP JP2102388U patent/JPH01129643U/ja active Pending
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