JPH0112832B2 - - Google Patents

Info

Publication number
JPH0112832B2
JPH0112832B2 JP56031839A JP3183981A JPH0112832B2 JP H0112832 B2 JPH0112832 B2 JP H0112832B2 JP 56031839 A JP56031839 A JP 56031839A JP 3183981 A JP3183981 A JP 3183981A JP H0112832 B2 JPH0112832 B2 JP H0112832B2
Authority
JP
Japan
Prior art keywords
film
thin film
metal thin
target
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56031839A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57145977A (en
Inventor
Kunio Hibino
Takashi Suzuki
Toshiaki Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56031839A priority Critical patent/JPS57145977A/ja
Publication of JPS57145977A publication Critical patent/JPS57145977A/ja
Publication of JPH0112832B2 publication Critical patent/JPH0112832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Formation Of Insulating Films (AREA)
  • Physical Vapour Deposition (AREA)
JP56031839A 1981-03-04 1981-03-04 Formation of protective film Granted JPS57145977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56031839A JPS57145977A (en) 1981-03-04 1981-03-04 Formation of protective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56031839A JPS57145977A (en) 1981-03-04 1981-03-04 Formation of protective film

Publications (2)

Publication Number Publication Date
JPS57145977A JPS57145977A (en) 1982-09-09
JPH0112832B2 true JPH0112832B2 (https=) 1989-03-02

Family

ID=12342218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56031839A Granted JPS57145977A (en) 1981-03-04 1981-03-04 Formation of protective film

Country Status (1)

Country Link
JP (1) JPS57145977A (https=)

Also Published As

Publication number Publication date
JPS57145977A (en) 1982-09-09

Similar Documents

Publication Publication Date Title
US8009387B2 (en) Forming an aluminum alloy oxynitride underlayer and a diamond-like carbon overcoat to protect a magnetic recording head and/or media
JP2531438B2 (ja) 磁気ヘッドおよびその製造方法
HK139194A (en) A process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
JPS6180527A (ja) 磁気記録媒体用耐摩耗・耐腐蝕性膜の作成方法
JPH0697502B2 (ja) 強磁性記録媒体
US5104709A (en) Magnetic recording medium which includes a protective layer, an adhesion strengthening substance and a lubricant layer
EP0576376B1 (en) Cobalt platinum magnetic film and method of fabrication thereof
JPH0112834B2 (https=)
JPH0112832B2 (https=)
JPH0160545B2 (https=)
JPS62114124A (ja) 磁気デイスクの製造方法
JPH0112833B2 (https=)
JPS63297208A (ja) 硬質非晶質炭素膜
JPH021222B2 (https=)
JPS60121526A (ja) 磁気記録媒体
JPH048509B2 (https=)
JPH049870B2 (https=)
JPH04313812A (ja) 磁気ディスク
JPS58188333A (ja) 磁気記録媒体
JPH0383224A (ja) 磁気ディスク
JPH02130721A (ja) 磁気ディスク
JPH0621343B2 (ja) 高耐食薄膜の形成方法
JPH049868B2 (https=)
JP2751396B2 (ja) 磁気ディスク
JPH0239017B2 (https=)