JPH01127605A - Production of pure cr or high-cr alloy wire rod - Google Patents

Production of pure cr or high-cr alloy wire rod

Info

Publication number
JPH01127605A
JPH01127605A JP28238687A JP28238687A JPH01127605A JP H01127605 A JPH01127605 A JP H01127605A JP 28238687 A JP28238687 A JP 28238687A JP 28238687 A JP28238687 A JP 28238687A JP H01127605 A JPH01127605 A JP H01127605A
Authority
JP
Japan
Prior art keywords
capsule
pure
hot
powder
swaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28238687A
Other languages
Japanese (ja)
Inventor
Takeo Mizuguchi
水口 丈夫
Mutsuo Kazuyasu
一安 六夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP28238687A priority Critical patent/JPH01127605A/en
Publication of JPH01127605A publication Critical patent/JPH01127605A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To produce a pure Cr wire rod which has no defects such as cracks with high productivity by packing pure Cr powder into a capsule and subjecting the capsule to vacuum sealing, HIP, hot swaging, surface conditioning, capsule coating, and hot swaging successively under specific conditions. CONSTITUTION:The pure Cr powder or high-Cr alloy powder is packed into the capsule and is vacuum sealed under 10<-3>mmHg. This capsule is then subjected to hot isostatic press molding for >=30 minutes at >=1000 deg.C and under >=500kgf/cm<2> pressure. The molding is heated to 850-1300 deg.C and is subjected to the hot swaging down to about the wire diameter at which the defects such as cracks are not generated; thereafter, the surface characteristics are conditioned by removing the oxide layer on the outside peripheral face of the work by centerless grinding. The work is further coated with the capsule to retard the cooling of the work interior and is heated to 850-1300 deg.C, following which the work is hot swaged down to the desired wire diameter. The capsule is removed by centerless grinding or etching.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、純Cr又は高Cr合金線材を粉末冶金法によ
り製造する方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing pure Cr or high Cr alloy wire by powder metallurgy.

〔従来の技術〕[Conventional technology]

純Cr、又は高Cr合金は、ミラー用ガラス上へのコー
ティング、熱的絶縁物、耐摩耗用保護材。
Pure Cr or high Cr alloys are used as coatings on glass for mirrors, as thermal insulators, and as wear-resistant protection materials.

スイッチング材、各種電極材、あるいは半導体産業の分
野で多く使用されている。
It is widely used as switching materials, various electrode materials, and in the semiconductor industry.

従来、高密度の純Cr又は高Cr合金を製造する方法と
しては、特公昭60−58289号、特開昭62−17
4373号に開示されるものが知られている。これらの
方法は、粉末冶金法を適用するものであり、概ね、 (イ)所望組成をなす原料粉末を金属容器中(本願明細
書中ではカプセルと記す)に加熱下で真空封入する。
Conventionally, methods for manufacturing high-density pure Cr or high Cr alloys include Japanese Patent Publication No. 60-58289 and Japanese Patent Application Laid-open No. 62-17.
The one disclosed in No. 4373 is known. These methods apply a powder metallurgy method, and generally include (a) vacuum-sealing a raw material powder having a desired composition into a metal container (referred to as a capsule in the present specification) under heating;

(ロ)熱間等方静水圧プレス(以下HIPと記す)にて
加圧焼結する、 (ハ)所定温度、加工率で熱間加工する、(ニ)金属容
器を研削等の手段で除去する、の一連の工程からなる製
造方法であって、主にスパッタリングターゲットの製造
に適用されている。
(b) Sintering under pressure using a hot isostatic press (hereinafter referred to as HIP), (c) Hot working at a predetermined temperature and processing rate, (d) Removing the metal container by grinding or other means. This manufacturing method consists of a series of steps, and is mainly applied to manufacturing sputtering targets.

該製造方法は、高密度で内部欠陥のない部材を生産性よ
く製造することができ有用な方法である。
This manufacturing method is a useful method because it can manufacture members with high density and no internal defects with high productivity.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前記特公昭60−58289号公報に記載の製造方法は
、前述のようにスパッタリング用ターゲットの製造を目
的としたものであり、主に最終形態として板状物品の製
造に適用されるものである。
The manufacturing method described in Japanese Patent Publication No. 60-58289 is aimed at manufacturing a sputtering target as described above, and is mainly applied to manufacturing a plate-shaped article in its final form.

純Cr又は高Cr合金の適用用途は先にも述べた通りで
あるが、電極材、スイッチング材等用途によっては小径
の線、棒状材(本明細書中では単に線材という)として
の要求がある。
The applications of pure Cr or high Cr alloys are as mentioned above, but depending on the application, such as electrode materials and switching materials, there is a demand for small diameter wires and rods (herein simply referred to as wires). .

本発明者らは前記製造方法、具体的にはHIP−圧延法
により線材を製造する実験・検討を行った。
The present inventors conducted experiments and studies to manufacture a wire rod using the above manufacturing method, specifically, the HIP-rolling method.

5US304鋼製の100φのカプセルに純Cr粉末を
充填、10°5■l1gにて真空引きして密封した。次
いで、このカプセルを温度1180℃、100100O
/aJの条件下で2時間HIP処理した。HIP後のカ
プセル外径は80φであった。これを温度範囲950〜
1150℃で30φまで熱間圧延を行った。圧延後の断
面を第1図に示すが、カプセルに材料欠陥の原因となる
ようなシワが発生していた。更に、7.0■φまで圧延
を実施しカプセルを除去し外観を確認したところ、全長
にわたり亀裂が生じていた。
A 100φ capsule made of 5US304 steel was filled with pure Cr powder and sealed by vacuuming at 10°5μl1g. Next, this capsule was heated to a temperature of 1180°C and 100100O.
HIP treatment was performed for 2 hours under the conditions of /aJ. The outer diameter of the capsule after HIP was 80φ. This temperature range is 950 ~
Hot rolling was performed at 1150°C to a diameter of 30φ. The cross section after rolling is shown in FIG. 1, and the capsule had wrinkles that could cause material defects. Furthermore, when rolling was carried out to 7.0 φ, the capsule was removed, and the appearance was checked, cracks had occurred over the entire length.

以上の実験・検討結果から明らかなように、。As is clear from the above experimental and study results.

(イ)HIP後熱後熱間圧上り線材を製造しようとする
と、カプセルにしわがより好ましくない。
(a) When attempting to produce a hot-rolled wire rod after hot heating after HIP, wrinkles in the capsule are more undesirable.

したがって、線材加工時にカプセルと内部とが同時に加
工される必要がある、 (ロ)被加工材が小径化すると、温度低下が大きくなり
、亀裂等の材料欠陥が生じやすくなる。
Therefore, it is necessary to process the capsule and the inside at the same time when processing the wire. (b) As the diameter of the workpiece becomes smaller, the temperature drop increases and material defects such as cracks are more likely to occur.

という問題がある。There is a problem.

本発明は、以上の問題点を解消した純Cr又は高Cr合
金線材の製造方法の提供を目的とする。
An object of the present invention is to provide a method for manufacturing pure Cr or high Cr alloy wire that eliminates the above problems.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者は種々検討した結果、前記問題点のうち、カプ
セルのしわ発生は、HIP後の加工を圧延によらず、ス
ェージング加工を採用すれば解消できること、および、
被加工材の小径化による温度低下は、被加工材が小径化
した際に温度低下を防止する程度の厚さのカプセルを被
覆し、全体として太径の状態で加工すればよいことを知
見した。
As a result of various studies, the present inventor found that among the above problems, the generation of wrinkles in the capsule can be solved by adopting swaging processing instead of rolling after HIP processing, and
We discovered that to reduce the temperature drop due to the reduction in the diameter of the workpiece, it is sufficient to coat the workpiece with a capsule thick enough to prevent the temperature drop when the diameter of the workpiece is reduced, and process the workpiece in a large diameter state as a whole. .

すなわち本発明は、純Cr又は高Cr合金粉末を用い線
材を製造する方法であって、 (イ)純Cr又は高Cr合金粉末をカプセルに充填しl
10−3IIllH以下で真空密封する工程、(ロ)i
ooo℃以上、500kgf/aJ以上の圧力で30分
以上熱間等方静水圧成形する工程、 (ハ)850〜1300℃の温度に加熱し、亀裂等の欠
陥が生じない程度の線径まで熱間スェージング加工する
工程、 (ニ)表面酸化層を除去するとともに、表面性状を整え
る工程。
That is, the present invention is a method of manufacturing a wire rod using pure Cr or high Cr alloy powder, comprising: (a) filling a capsule with pure Cr or high Cr alloy powder;
Step of vacuum sealing at 10-3IIllH or less, (b) i
A step of hot isostatic pressing at ooo℃ or higher and a pressure of 500kgf/aJ or higher for 30 minutes or more; (c) heating to a temperature of 850 to 1300℃ to a wire diameter that does not cause defects such as cracks; (iv) a step of removing the surface oxidation layer and adjusting the surface texture;

(ホ)次いで実施される熱間スェージング加工時に加熱
された線材が冷却し難いようにカプセルで再度被覆する
工程、 (へ)850−1300℃の温度に加熱し、所望する線
径まで熱間スェージング加工する工程、 からなることを特徴とする純Cr又は高Cr合金線材の
製造方法である。
(e) A step of re-covering the heated wire with a capsule so that it is difficult to cool down during the hot swaging process, (f) heating to a temperature of 850-1300°C and hot swaging to the desired wire diameter. A method for manufacturing a pure Cr or high Cr alloy wire, comprising the following steps:

以下、前記(イ)〜(へ)の各工程について説明する。Each of the steps (a) to (f) above will be explained below.

(イ)工程 カプセル密封を10−3■Hg以下とするのは、これ以
上だと原料粉末に付着しているガスや水分等の除去が十
分に行なわれず、焼結の困難性をまねいたり、内部欠陥
を生じさせたりするからである。
(b) Process capsule sealing should be 10-3■Hg or less because if it is higher than this, gases, moisture, etc. adhering to the raw material powder will not be removed sufficiently, leading to difficulty in sintering. This is because internal defects may occur.

なお、カプセルはHIP、熱間スェージングに耐えられ
るものであれば特に限定されない。
Note that the capsule is not particularly limited as long as it can withstand HIP and hot swaging.

(ロ)工程 純Cr粉末又は高Cr合金粉末を圧密焼結する工程であ
り、十分な圧密密度を得るためには、1000℃以上、
圧力500kgf/cm2以上で30分以上の処理を必
要とする。
(b) Process This is a process of consolidating and sintering pure Cr powder or high Cr alloy powder.
Processing for 30 minutes or more is required at a pressure of 500 kgf/cm2 or more.

(ハ)工程 本工程のように加工を圧延ではなく、スェージング加工
とすることにより、カプセルのしわ発生が防止される。
(c) Process By using swaging processing instead of rolling as in the main step, the generation of wrinkles in the capsule can be prevented.

加熱温度は、850℃未満では割れ、キズ等の材料欠陥
が発生し、また1300℃を越えると酸化が激しくスェ
ージングが困難となるから。
If the heating temperature is less than 850°C, material defects such as cracks and scratches will occur, and if it exceeds 1300°C, oxidation will be severe and swaging will be difficult.

850℃以上1300℃以下とする。The temperature shall be 850°C or higher and 1300°C or lower.

(ニ)工程 スェージング加工後、被加工材の外周面は凹凸状になっ
ている。このような形状不良は、次工程での良好なカプ
セル被覆(接合)状態が得られず。
(d) After the process swaging process, the outer peripheral surface of the workpiece has an uneven shape. Such shape defects make it impossible to obtain a good capsule covering (bonding) state in the next process.

次いで行なわれるスェージング加工上問題となる。This poses a problem in the subsequent swaging process.

そこで本工程で表面性状を整えるのである。センタレス
研削により容易に実施することができる。
Therefore, the surface texture is adjusted in this process. This can be easily carried out by centerless grinding.

一方、スェージング加工後は被加工材は表面酸化してお
り、本工程は形状不良と同様に良好なカプセル被覆状態
を阻害する酸化法除去も同時に兼ねるものである。
On the other hand, after the swaging process, the surface of the workpiece is oxidized, and this process also serves to remove the oxidation method, which not only prevents shape defects but also hinders good capsule coverage.

(ホ)工程 本工程は、引き続いて行なわれるスェージング加工時に
被加工物が小径化した際に中心部の純Cr粉末又は高C
r合金の温度低下を防止するために、被加工物を見掛上
太径化させ温度維持を図るために行なわれるものである
(e) Process This process is performed when the diameter of the workpiece is reduced during the subsequent swaging process.
In order to prevent the temperature of the r-alloy from decreasing, the diameter of the workpiece is apparently increased to maintain the temperature.

被覆するカプセルは、結果的に温度低下を防止し得る肉
厚を有するものであればよく、肉厚の厚いものを1重と
して用いてもよいし、肉厚の薄いものを2重以上として
用いても良い。
The capsule to be coated may have a wall thickness that can prevent a temperature drop as a result, and a thick walled capsule may be used as a single layer, or a thin walled capsule may be used as two or more layers. It's okay.

なお、良好な被覆状態を得るためにカプセル被覆後HI
 Pを適用することが望ましい。
In addition, in order to obtain a good coating condition, HI
It is desirable to apply P.

(へ)工程 最終的に所望する線径まで加工する工程である。(f) Process This is the process of processing the wire to the final desired diameter.

加工温度は前記(ハ)工程と同様の理由により加熱温度
は850−1300℃に規定される。
The processing temperature is set at 850-1300° C. for the same reason as in step (c) above.

以上の(イ)〜(へ)工程終了後はセンタレス研削等の
機械加工により、または塩酸、王水等でエツチングして
カプセルを除去すれば良い、なお、カプセルが少々残存
していてもかまわない場合には。
After completing the above steps (a) to (f), the capsules can be removed by mechanical processing such as centerless grinding, or by etching with hydrochloric acid, aqua regia, etc. It is okay if some capsules remain. in case of.

カプセルを全て除去する必要がないことは言うまでもな
い。
It goes without saying that it is not necessary to remove all the capsules.

〔実施例〕〔Example〕

以下本発明を実施例に基づき説明する。 The present invention will be explained below based on examples.

(実施例) SUS304鋼製の外径27mφ、内径23.7■φ、
450mQのカプセルに純Cr粉末(純度99.6%′
)を充填し、10’ mHgにて真空吸引して密封した
(Example) Made of SUS304 steel, outer diameter 27mφ, inner diameter 23.7■φ,
Pure Cr powder (purity 99.6%') in a 450mQ capsule
) and sealed by vacuum suction at 10' mHg.

このカプセルを1180℃、1000気圧の条件で2時
間HIP処理を施した。HIP終了後(カプセル寸法は
外径25−φX400mm)、1200℃に加熱し、外
径10.6■φになるまでスェージング加工を実施した
。スェージング加工終了後、センタレス研削にて外径9
.8閣φになるまで研削しカプセルを除去したが1問題
となるキズ、亀裂等の欠陥は確認できなかった。
This capsule was subjected to HIP treatment at 1180° C. and 1000 atm for 2 hours. After HIP was completed (capsule dimensions were outer diameter 25-φ x 400 mm), the capsule was heated to 1200° C. and swaged until the outer diameter became 10.6 φ. After swaging, centerless grinding is performed to obtain an outer diameter of 9
.. The capsule was removed by grinding until it had a diameter of 8 mm, but no defects such as scratches or cracks could be found.

次に、前記外径9.8−φの純Cr焼結体を外径13.
8a*φの5US304鋼製のカプセルに挿入し。
Next, the pure Cr sintered body with an outer diameter of 9.8-φ was placed into the pure Cr sintered body with an outer diameter of 13.
Insert into a capsule made of 5US304 steel of 8a*φ.

さらに該カプセルを外径17.3■φの5US304鋼
製のカプセルに挿入(2重カプセル)、真空脱気密封し
、再度HIPIP処理施した。HIP処理条件は、温度
1180℃、圧力1000気圧、時間2時間である。
Further, the capsule was inserted into a capsule made of 5US304 steel with an outer diameter of 17.3 φ (double capsule), vacuum degassed and sealed, and HIPIP treatment was performed again. The HIP treatment conditions were a temperature of 1180° C., a pressure of 1000 atm, and a time of 2 hours.

HIP終了後の外径は16.5重mφであり、これを1
200℃に加熱し、外径4.7−φになるまでスェージ
ング加工を繰り返した。スェージング加工終了後、セン
タレス研削により2.8閤φまで研削し、カプセルを除
去したが、欠陥はごくわずかであり、満足できる状態で
あった。
The outer diameter after HIP is 16.5 mφ, which is
It was heated to 200°C and the swaging process was repeated until the outer diameter became 4.7-φ. After the swaging process was completed, the capsule was ground to 2.8 diameter by centerless grinding and the capsule was removed, but there were very few defects and the condition was satisfactory.

(比較例) 純Cr粉末のカプセルへの充填、密封、)(IP処理ま
で上述の実施例と同様な工程により圧密化を行なった0
寸法は実施例と同様で外径25■φ×400■悲である
(Comparative example) Filling of pure Cr powder into capsules, sealing, )
The dimensions are the same as in the example, with an outer diameter of 25 mm x 400 mm.

次いで、1200℃に加熱し、外径7.0膿φまでスェ
ージング加工を行なった後センタレス研削によりカプセ
ルを除去した。外観の状況を確認したところ、全長にわ
たり亀裂が生じていた。これは。
Next, the capsule was heated to 1200° C., swaged to an outer diameter of 7.0 φ, and then the capsule was removed by centerless grinding. When we checked the exterior, we found that cracks had formed along the entire length. this is.

7.0膿φ程度の小径になると材料の温度低下が顕著に
なるためと考えられる。
This is thought to be due to the fact that the temperature of the material decreases significantly when the diameter is as small as about 7.0 pusφ.

〔発明の効果〕〔Effect of the invention〕

以上説明のように、従来困難とされていた純Cr又は高
Cr合金の線材を欠陥がなく、かつ生産性よく製造する
ことを可能にするものであり、産業上非常に有効である
As explained above, it is possible to manufacture pure Cr or high Cr alloy wire rods without defects and with good productivity, which has been considered difficult in the past, and is very effective industrially.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、純Cr粉末を充填、HIP後に熱間圧延した
ときのカプセル断面を示す図である。 1 : Cr成形体、2:カプセル 第1図
FIG. 1 is a diagram showing a cross section of a capsule filled with pure Cr powder, hot rolled after HIP. 1: Cr molded body, 2: Capsule Figure 1

Claims (1)

【特許請求の範囲】 粉末冶金法により純Cr又は高Cr合金線材を製造する
方法であって、 (イ)純Cr粉末又は高Cr合金粉末をカプセルに充填
し、10^−^3mmHg以下で真空密封する工程、 (ロ)1000℃以上、500kgf/cm^2以上の
圧力で30分間以上熱間等方静水圧成形する工程、 (ハ)850〜1300℃の温度に加熱し、亀裂等の欠
陥が生じない程度の線径まで熱間スエージング加工する
工程、 (ニ)表面酸化層を除去するとともに、表面性状を整え
る工程、 (ホ)次いで実施される熱間スエージング加工した時に
、被加工材の内部が冷却し難いようにカプセルで被覆す
る工程、 (ヘ)850〜1300℃の温度に加熱し、所望する線
径まで熱間スエージング加工する工程、 からなることを特徴とする純Cr又は高Cr合金線材の
製造方法。
[Claims] A method for producing pure Cr or high Cr alloy wire rod by powder metallurgy, comprising: (a) filling a capsule with pure Cr powder or high Cr alloy powder and vacuuming at 10^-^3 mmHg or less; (b) Hot isostatic pressing at a temperature of 1000°C or higher and a pressure of 500kgf/cm^2 or more for 30 minutes or more; (c) Heating to a temperature of 850 to 1300°C to eliminate defects such as cracks. (d) removing the surface oxidation layer and adjusting the surface properties; (e) hot swaging to a wire diameter that does not cause Pure Cr characterized by comprising the following steps: (f) covering the material with a capsule so that the inside of the material is difficult to cool down; (f) heating to a temperature of 850 to 1300°C and hot swaging to a desired wire diameter. Or a method for producing a high Cr alloy wire.
JP28238687A 1987-11-09 1987-11-09 Production of pure cr or high-cr alloy wire rod Pending JPH01127605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28238687A JPH01127605A (en) 1987-11-09 1987-11-09 Production of pure cr or high-cr alloy wire rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28238687A JPH01127605A (en) 1987-11-09 1987-11-09 Production of pure cr or high-cr alloy wire rod

Publications (1)

Publication Number Publication Date
JPH01127605A true JPH01127605A (en) 1989-05-19

Family

ID=17651726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28238687A Pending JPH01127605A (en) 1987-11-09 1987-11-09 Production of pure cr or high-cr alloy wire rod

Country Status (1)

Country Link
JP (1) JPH01127605A (en)

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