JPH01127268U - - Google Patents
Info
- Publication number
- JPH01127268U JPH01127268U JP2184388U JP2184388U JPH01127268U JP H01127268 U JPH01127268 U JP H01127268U JP 2184388 U JP2184388 U JP 2184388U JP 2184388 U JP2184388 U JP 2184388U JP H01127268 U JPH01127268 U JP H01127268U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoresistance layer
- semiconductor
- pressure sensor
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2184388U JPH01127268U (pt) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2184388U JPH01127268U (pt) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01127268U true JPH01127268U (pt) | 1989-08-31 |
Family
ID=31239430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2184388U Pending JPH01127268U (pt) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127268U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009265012A (ja) * | 2008-04-28 | 2009-11-12 | Fujikura Ltd | 半導体センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5839069A (ja) * | 1981-08-31 | 1983-03-07 | Shimadzu Corp | 半導体ダイヤフラム |
-
1988
- 1988-02-23 JP JP2184388U patent/JPH01127268U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5839069A (ja) * | 1981-08-31 | 1983-03-07 | Shimadzu Corp | 半導体ダイヤフラム |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009265012A (ja) * | 2008-04-28 | 2009-11-12 | Fujikura Ltd | 半導体センサ |