JPH01127260U - - Google Patents
Info
- Publication number
- JPH01127260U JPH01127260U JP2265988U JP2265988U JPH01127260U JP H01127260 U JPH01127260 U JP H01127260U JP 2265988 U JP2265988 U JP 2265988U JP 2265988 U JP2265988 U JP 2265988U JP H01127260 U JPH01127260 U JP H01127260U
- Authority
- JP
- Japan
- Prior art keywords
- layer metal
- lower layer
- insulating film
- metal
- mim capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 25
- 239000003990 capacitor Substances 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000016507 interphase Effects 0.000 claims 2
- 239000010410 layer Substances 0.000 description 13
- 239000011229 interlayer Substances 0.000 description 3
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2265988U JPH01127260U (enExample) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2265988U JPH01127260U (enExample) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01127260U true JPH01127260U (enExample) | 1989-08-31 |
Family
ID=31240970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2265988U Pending JPH01127260U (enExample) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127260U (enExample) |
-
1988
- 1988-02-22 JP JP2265988U patent/JPH01127260U/ja active Pending