JPH01126562U - - Google Patents

Info

Publication number
JPH01126562U
JPH01126562U JP2112588U JP2112588U JPH01126562U JP H01126562 U JPH01126562 U JP H01126562U JP 2112588 U JP2112588 U JP 2112588U JP 2112588 U JP2112588 U JP 2112588U JP H01126562 U JPH01126562 U JP H01126562U
Authority
JP
Japan
Prior art keywords
flow path
flow controller
carrier gas
branch
discharged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2112588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2112588U priority Critical patent/JPH01126562U/ja
Publication of JPH01126562U publication Critical patent/JPH01126562U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP2112588U 1988-02-22 1988-02-22 Pending JPH01126562U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2112588U JPH01126562U (US20100268047A1-20101021-C00003.png) 1988-02-22 1988-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2112588U JPH01126562U (US20100268047A1-20101021-C00003.png) 1988-02-22 1988-02-22

Publications (1)

Publication Number Publication Date
JPH01126562U true JPH01126562U (US20100268047A1-20101021-C00003.png) 1989-08-29

Family

ID=31238076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2112588U Pending JPH01126562U (US20100268047A1-20101021-C00003.png) 1988-02-22 1988-02-22

Country Status (1)

Country Link
JP (1) JPH01126562U (US20100268047A1-20101021-C00003.png)

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