JPH01126008A - Thin profile crystal vibrator - Google Patents
Thin profile crystal vibratorInfo
- Publication number
- JPH01126008A JPH01126008A JP28462087A JP28462087A JPH01126008A JP H01126008 A JPH01126008 A JP H01126008A JP 28462087 A JP28462087 A JP 28462087A JP 28462087 A JP28462087 A JP 28462087A JP H01126008 A JPH01126008 A JP H01126008A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- case
- crystal resonator
- vibrator
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 34
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 abstract description 7
- 230000035939 shock Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 8
- 238000009966 trimming Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電子機器産業では著しい発展がみられる高密
度実装化に貢献するものであり、主に表面高密度実装用
部品として供給されているフラット形水晶振動子のケー
ス内の配置に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention contributes to high-density packaging, which has seen remarkable progress in the electronics industry, and is mainly supplied as parts for high-density surface mounting. This relates to the arrangement within the case of a flat type crystal resonator.
本発明は、水晶振動子の最も重要な基本特性である発振
周波数の精度を安定に保持することを目的とし、振動子
の重りを除去した周波数調整に際し、その除去された重
りを安定化させるために工夫をこらしたものであり、除
去された金属がセラミックのランダムな粗面に密着させ
たものであり、特に機械的衝撃、機械的振動に強い信幀
性に優れた水晶振動子を得るものである。The purpose of the present invention is to stably maintain the accuracy of the oscillation frequency, which is the most important basic characteristic of a crystal resonator, and to stabilize the removed weight when adjusting the frequency by removing the weight of the resonator. The removed metal is brought into close contact with the random rough surfaces of the ceramic, resulting in a highly reliable crystal resonator that is particularly resistant to mechanical shock and vibration. It is.
第2図は従来の薄形水晶振動子の周波数調整後の密封前
後の断面構造図であり、(イ)は密封前、(ロ)は密封
後の状態である。1はケース、2はキャップ、3は振動
子であり、振動子の一端がケースに装着されケースと電
気的に導通している。振動子の他の一端のケースと対向
していない側に周波数調整用の重り4通常メタルめっき
が設けられており、通常周波数調整は重り部にレーザビ
ームを照射、レーザートリミング法により重りを瞬時加
熱溶解飛散除去により規定の値に入れている。FIG. 2 is a cross-sectional structural diagram of a conventional thin crystal resonator before and after frequency adjustment and sealing, where (a) shows the state before sealing and (b) shows the state after sealing. 1 is a case, 2 is a cap, and 3 is a vibrator. One end of the vibrator is attached to the case and is electrically connected to the case. A weight 4 usually metal plated for frequency adjustment is provided on the other end of the vibrator, which is not facing the case, and frequency adjustment is usually done by irradiating the weight with a laser beam and instantaneously heating the weight using the laser trimming method. The value has been brought to the specified value by dissolving and removing scattering.
(イ)の場合はその後洗浄乾燥を施してキャップをケー
スと一体的に溶接密閉している。(ロ)の場合はケース
と一体的に形成されたキャップ2が透明なガラスで作ら
れており、ガラスを通してレーザトリミング法により振
動子の重りを除去し周波数調整することは公知の事実で
ある。In case (a), the cap is then washed and dried, and the cap is welded and sealed integrally with the case. In the case of (b), the cap 2 integrally formed with the case is made of transparent glass, and it is a known fact that the weight of the vibrator is removed and the frequency is adjusted by laser trimming through the glass.
しかし従来のこのような薄形水晶振動子は、第2図(イ
)の場合はレーザートリミングにより飛散した重りの一
部が振動子周辺に付着し洗浄乾燥後は所定の周波数から
ずれるという欠点がある。However, such conventional thin crystal resonators have the disadvantage that, in the case shown in Figure 2 (a), some of the weight scattered during laser trimming adheres to the area around the resonator, and the frequency deviates from the predetermined frequency after cleaning and drying. be.
(ロ)の場合は飛散した重りがガラスキャップ内面6゛
に付着することにより、機械的衝撃や機械的振動等の負
荷を加えると、振動子面上に再付着など脱落することに
よる重り効果で周波数のバラツキが生じるという欠点が
ある。このガラスキャップの内面6°からの脱落は、そ
の表面構造がフラットな濡面をなし、そのため飛散した
電層材料の付着力が弱く、大きな欠点であった。In the case of (b), the scattered weight adheres to the inner surface 6 of the glass cap, and when a load such as mechanical shock or mechanical vibration is applied, it re-adheres to the vibrator surface and falls off, resulting in a weight effect. The disadvantage is that frequency variations occur. This falling off from the 6° inner surface of the glass cap was a major drawback because its surface structure was a flat wetted surface, and therefore the adhesion of the scattered electrical layer material was weak.
上記問題点を解決するために本発明はなされたものであ
り、第1図(イ)(ロ)に示すようにケース1と透明な
ガラスキャップ2と振動子3で構成されている空間の中
に振動子の重り部4をケースの底面と対向した側に設け
られていることを特徴としている0周波数は透明な振動
子を通しレーザトリミング法により調整される。The present invention has been made to solve the above problems, and as shown in FIGS. The 0 frequency is adjusted by the laser trimming method through the transparent vibrator.
上記のように、振動子面上の重りをケースと対向した側
に設はレーザビームを透明な振動子を通して重りをトリ
ミングすると、飛散除去された重りはケース底面5に付
着金属5゛となって付着されるが、その付着の状態は蒸
着に近くケース底面に強固に密着される。これはセラミ
ックの焼結された表面構造がランダムな粗面を形成し、
そのため密着力は強固となる。なお、レーザビームは透
明な振動子と重りの界面に照射され、その界面は鏡面と
なっているためレーザーの散乱が少なく効率よくトリミ
ングされることにより重りが周辺に飛散することもない
。As mentioned above, when the weight on the vibrator surface is set on the side facing the case and the laser beam is passed through the transparent vibrator to trim the weight, the scattered and removed weight becomes a metal layer 5 attached to the bottom surface 5 of the case. However, the state of the adhesion is close to that of vapor deposition, and it is tightly adhered to the bottom of the case. This is because the sintered surface structure of the ceramic forms a random rough surface,
Therefore, the adhesion is strong. Note that the laser beam is irradiated onto the interface between the transparent vibrator and the weight, and since the interface is a mirror surface, there is little scattering of the laser and efficient trimming prevents the weight from scattering around.
このように本発明は重り飛散粒子の影響は極めて少なく
、機械的衝撃あるいは機械的振動による周波数のバラツ
キが極めて少ない精度が良く信鯨性のよい薄形水晶振動
子を提供するものである。As described above, the present invention provides a thin crystal resonator which is highly accurate and has excellent accuracy and has very little influence from weight-scattered particles and very little variation in frequency due to mechanical shock or mechanical vibration.
以下に本発明を実施例に基づいて詳細に説明する。第3
図はセラミックケース1と32KHzで音叉形水晶振動
子3とガラスキャップ2から構成されており、振動子に
は重り^Uめっき部4とケースとの接着部^Uめっき1
5が同一面上に形成されている。The present invention will be explained in detail below based on examples. Third
The figure shows a ceramic case 1, a 32KHz tuning fork crystal oscillator 3, and a glass cap 2.The oscillator has a weight ^U plating part 4 and the adhesive part between the case ^U plating 1
5 are formed on the same surface.
組立の手順として、ケース内面一端に振動子接着部6が
設けられており、接着部6に振動子Auめっき15を導
電性接着剤により強固に接合される。すなわち振動子重
りメツキ部4はセラミックケース底部5と対向して配置
される。この段階でレーザトリミング法により周波調整
をすると第1図(イ)の状態になり重りを除去して飛散
した^Uはセラミックケース底部に強固に蒸着され付着
金属5°となり周辺への飛散は極めて少ない、その後洗
浄乾燥工程を通しガラスキャップ2を半田封止材により
密封する。As an assembly procedure, a vibrator adhesive portion 6 is provided at one end of the inner surface of the case, and the vibrator Au plating 15 is firmly bonded to the adhesive portion 6 using a conductive adhesive. That is, the vibrator weight plated portion 4 is disposed facing the ceramic case bottom portion 5. At this stage, when the frequency is adjusted by the laser trimming method, the state shown in Figure 1 (a) is obtained, and the weight is removed and the scattered ^U is firmly deposited on the bottom of the ceramic case, and the attached metal becomes 5 degrees, and scattering to the surrounding area is extremely difficult. Thereafter, the glass cap 2 is sealed with a solder sealant through a washing and drying process.
以上の工程を通して作られた本発明の薄形水晶振動子を
第2図(イ)の工程で作られた従来の薄形水晶振動子と
比較してみると、周波数規格値32.768 K Hz
±10ppmに対して本発明水晶振動子は100%満足
するが、従来方法で作られた水晶振動子の周波数は32
.768KHz±、’S ppmと低めに移項し、さら
に周波数のバラツキも大きくなる0以上より本発明は精
度が良く周波数ずれのない薄形水晶振動子を提供するこ
とができ効果が大であることは明らかである。Comparing the thin crystal resonator of the present invention manufactured through the above process with the conventional thin crystal resonator manufactured through the process shown in Figure 2 (a), the standard frequency value is 32.768 KHz.
The crystal resonator of the present invention is 100% satisfied with ±10 ppm, but the frequency of the crystal resonator made by the conventional method is 32
.. The present invention can provide a thin crystal resonator with good precision and no frequency shift, and is highly effective. it is obvious.
他の実施例として、前記実施例の水晶振動子をケースと
接合した工程の次にガラスキャップ2を同様に半田封止
材により密封し、その後レーザトリミング法により周波
数調整を施した本発明の薄形振動子についてその効果を
説明する。As another embodiment, the glass cap 2 is similarly sealed with a solder sealing material after the process of joining the crystal resonator of the above embodiment with the case, and then the frequency is adjusted by laser trimming. The effects of shaped resonators will be explained.
第4図は本発明の詳細な説明するグラフであり、第4図
(ロ)は従来の薄形水晶振動子の第4図(イ)は本発明
の薄形水晶振動子の機械的衝撃強度に対する周波数の変
動を示したものである。FIG. 4 is a graph explaining the present invention in detail. FIG. 4 (b) shows the mechanical impact strength of the conventional thin crystal resonator, and FIG. 4 (a) shows the mechanical impact strength of the thin crystal resonator of the present invention. This shows the frequency fluctuations for .
初期周波数値はいずれも32.768KHz±5ppm
に調整されたものであり、機械的衝撃強度は5000
Gと10000 Gをそれぞれ加えた。第4図から明ら
かなように従来の薄形水晶振動子は加速術%[5000
G 。Initial frequency values are all 32.768KHz±5ppm
The mechanical impact strength is 5000
G and 10000 G were added respectively. As is clear from Fig. 4, the conventional thin crystal resonator has an acceleration rate of %[5000
G.
10000Gに対してそれぞれ±15ppm、±40p
p rnとバラツキが大きくなっている。これに対して
本発明の薄形水晶振動子は5000 Gでは変化なく、
10000 Gでは±7ppmとバラツキが極めて小さ
い。±15ppm and ±40p for 10000G, respectively
The variation in p rn is increasing. On the other hand, the thin crystal resonator of the present invention does not change at 5000 G,
At 10,000 G, the variation is extremely small at ±7 ppm.
以上より本発明の機械的信頼性に対する周波数安定性に
対する効果が大きいことは明らかである。From the above, it is clear that the present invention has a great effect on mechanical reliability and frequency stability.
以上本発明の効果をまとめると周波数調整時の重りの飛
散による影響を極力少なくしたことにより、周波数精度
のよい機械的信頼性に優れた薄形圧電振動子を簡単な方
法で作ることができ、工業的価値が大であることは明ら
かである。To summarize the effects of the present invention as described above, by minimizing the influence of scattering weights during frequency adjustment, a thin piezoelectric vibrator with good frequency accuracy and excellent mechanical reliability can be manufactured by a simple method. It is clear that the industrial value is great.
なお本発明は音叉形水晶振動子に限るものではなく、例
えば縦振動形水晶振動子あるいは、CTカット形水晶振
動子等透明な振動子ならばいずれにも適用できるもので
ある。Note that the present invention is not limited to a tuning fork type crystal resonator, but can be applied to any transparent resonator such as a longitudinal vibrating type crystal resonator or a CT cut type crystal resonator.
第1図(イ)、(ロ)は本発明の薄形水晶振動子の断面
図であり重り部4はケース5の底面と対向して配置され
ている。第2図(イ)、(ロ)は従来の薄形水晶振動子
の断面図であり重り部4はケース5と反対側の振動子面
に施されている。第3図は本発明の薄形音叉水晶振動子
の組立分解図であり、音叉重り4はセラミックケース1
に対向して施されている。第4図は機械的衝撃試験の周
波数のバラツキを表したものであり、(イ)は本発明の
(ロ)は従来の薄形水晶振動子の特性図である。
1・・・セラミックケース
2・・・ガラスキャップ
3・・・水晶振動子
4・・・重りメツキ部
5・・・ケース底部
5” ・・付着金属
以上
出願人 セイコー電子部品株式会社
木キ咀の振動子の竹4五聞FIGS. 1A and 1B are cross-sectional views of the thin crystal resonator of the present invention, in which the weight portion 4 is disposed facing the bottom surface of the case 5. FIG. FIGS. 2A and 2B are cross-sectional views of a conventional thin crystal resonator, in which the weight portion 4 is provided on the surface of the resonator opposite to the case 5. FIG. FIG. 3 is an exploded view of the thin tuning fork crystal resonator of the present invention, in which the tuning fork weight 4 is attached to the ceramic case 1.
It is placed opposite. FIG. 4 shows the frequency variation of the mechanical shock test, in which (a) is a characteristic diagram of the present invention and (b) is a characteristic diagram of a conventional thin crystal resonator. 1...Ceramic case 2...Glass cap 3...Crystal oscillator 4...Weight plated part 5...Case bottom 5"...More than attached metal Applicant: Seiko Electronic Components Co., Ltd. Oscillator bamboo 4 gomon
Claims (1)
一方の面に周波数調整用重りを設け、前記セラミックケ
ースと透明なガラス板からなるキャップとの間の空間に
前記水晶振動子を配置したものにおいて、前記水晶振動
子の前記周波数調整用重りが前記セラミックケースの底
部に対向して配置されていることを特徴とする薄形水晶
振動子。A crystal resonator housed in a ceramic case, in which a frequency adjustment weight is provided on one surface of the crystal resonator, and the crystal resonator is arranged in a space between the ceramic case and a cap made of a transparent glass plate. . A thin crystal resonator, characterized in that the frequency adjustment weight of the crystal resonator is disposed facing the bottom of the ceramic case.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62284620A JP2756559B2 (en) | 1987-11-11 | 1987-11-11 | Manufacturing method of piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62284620A JP2756559B2 (en) | 1987-11-11 | 1987-11-11 | Manufacturing method of piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01126008A true JPH01126008A (en) | 1989-05-18 |
JP2756559B2 JP2756559B2 (en) | 1998-05-25 |
Family
ID=17680819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62284620A Expired - Lifetime JP2756559B2 (en) | 1987-11-11 | 1987-11-11 | Manufacturing method of piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2756559B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004328701A (en) * | 2003-04-28 | 2004-11-18 | Piedekku Gijutsu Kenkyusho:Kk | Manufacturing method of crystal oscillator |
JP2007243681A (en) * | 2006-03-09 | 2007-09-20 | Daishinku Corp | Surface-mounting type piezoelectric vibration device |
JP2007243995A (en) * | 2001-10-31 | 2007-09-20 | Piedekku Gijutsu Kenkyusho:Kk | Method of manufacturing quartz oscillator |
JP2009100480A (en) * | 2008-10-14 | 2009-05-07 | Piedekku Gijutsu Kenkyusho:Kk | Quartz crystal unit and method of manufacturing quartz crystal oscillator |
JP2009189039A (en) * | 2001-10-31 | 2009-08-20 | Piedekku Gijutsu Kenkyusho:Kk | Method for manufacturing quartz crystal unit |
JP2012231233A (en) * | 2011-04-25 | 2012-11-22 | Citizen Finetech Miyota Co Ltd | Processing method of thin film, frequency adjusting method of piezoelectric resonator, and electronic device |
JP2013243753A (en) * | 2002-01-11 | 2013-12-05 | Piedekku Gijutsu Kenkyusho:Kk | Method for manufacturing crystal vibrator, crystal unit and crystal oscillator |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015128268A (en) | 2013-12-27 | 2015-07-09 | セイコーエプソン株式会社 | Vibration element, vibrator, oscillator, electronic apparatus, physical quantity sensor, movable body and frequency adjustment method of vibration element |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5652491A (en) * | 1979-10-03 | 1981-05-11 | Matsushita Refrigeration | Vendor temperature controller |
JPS5718372A (en) * | 1980-07-08 | 1982-01-30 | Fujitsu Ltd | Semiconductor photoreceiving element |
-
1987
- 1987-11-11 JP JP62284620A patent/JP2756559B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5652491A (en) * | 1979-10-03 | 1981-05-11 | Matsushita Refrigeration | Vendor temperature controller |
JPS5718372A (en) * | 1980-07-08 | 1982-01-30 | Fujitsu Ltd | Semiconductor photoreceiving element |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007243995A (en) * | 2001-10-31 | 2007-09-20 | Piedekku Gijutsu Kenkyusho:Kk | Method of manufacturing quartz oscillator |
JP2009189039A (en) * | 2001-10-31 | 2009-08-20 | Piedekku Gijutsu Kenkyusho:Kk | Method for manufacturing quartz crystal unit |
JP2013243753A (en) * | 2002-01-11 | 2013-12-05 | Piedekku Gijutsu Kenkyusho:Kk | Method for manufacturing crystal vibrator, crystal unit and crystal oscillator |
JP2004328701A (en) * | 2003-04-28 | 2004-11-18 | Piedekku Gijutsu Kenkyusho:Kk | Manufacturing method of crystal oscillator |
JP2007243681A (en) * | 2006-03-09 | 2007-09-20 | Daishinku Corp | Surface-mounting type piezoelectric vibration device |
JP2009100480A (en) * | 2008-10-14 | 2009-05-07 | Piedekku Gijutsu Kenkyusho:Kk | Quartz crystal unit and method of manufacturing quartz crystal oscillator |
JP2012231233A (en) * | 2011-04-25 | 2012-11-22 | Citizen Finetech Miyota Co Ltd | Processing method of thin film, frequency adjusting method of piezoelectric resonator, and electronic device |
Also Published As
Publication number | Publication date |
---|---|
JP2756559B2 (en) | 1998-05-25 |
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