JPH01125549U - - Google Patents

Info

Publication number
JPH01125549U
JPH01125549U JP2202288U JP2202288U JPH01125549U JP H01125549 U JPH01125549 U JP H01125549U JP 2202288 U JP2202288 U JP 2202288U JP 2202288 U JP2202288 U JP 2202288U JP H01125549 U JPH01125549 U JP H01125549U
Authority
JP
Japan
Prior art keywords
wafer
carry
suction port
exposure apparatus
suctioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2202288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2202288U priority Critical patent/JPH01125549U/ja
Publication of JPH01125549U publication Critical patent/JPH01125549U/ja
Pending legal-status Critical Current

Links

JP2202288U 1988-02-22 1988-02-22 Pending JPH01125549U (US20020051482A1-20020502-M00020.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2202288U JPH01125549U (US20020051482A1-20020502-M00020.png) 1988-02-22 1988-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2202288U JPH01125549U (US20020051482A1-20020502-M00020.png) 1988-02-22 1988-02-22

Publications (1)

Publication Number Publication Date
JPH01125549U true JPH01125549U (US20020051482A1-20020502-M00020.png) 1989-08-28

Family

ID=31239767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2202288U Pending JPH01125549U (US20020051482A1-20020502-M00020.png) 1988-02-22 1988-02-22

Country Status (1)

Country Link
JP (1) JPH01125549U (US20020051482A1-20020502-M00020.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006090580A1 (ja) * 2005-02-24 2006-08-31 Fujifilm Corporation シート体位置決め保持方法及び機構並びにそれを用いた描画装置
JP2010284580A (ja) * 2009-06-10 2010-12-24 Hitachi Plant Technologies Ltd 塗布装置及び塗布方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006090580A1 (ja) * 2005-02-24 2006-08-31 Fujifilm Corporation シート体位置決め保持方法及び機構並びにそれを用いた描画装置
JP2010284580A (ja) * 2009-06-10 2010-12-24 Hitachi Plant Technologies Ltd 塗布装置及び塗布方法
TWI460020B (zh) * 2009-06-10 2014-11-11 Hitachi Ltd Smearing and smearing method

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