JPH01125356U - - Google Patents
Info
- Publication number
- JPH01125356U JPH01125356U JP2167288U JP2167288U JPH01125356U JP H01125356 U JPH01125356 U JP H01125356U JP 2167288 U JP2167288 U JP 2167288U JP 2167288 U JP2167288 U JP 2167288U JP H01125356 U JPH01125356 U JP H01125356U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- thin film
- forming apparatus
- wall
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2167288U JPH01125356U (tr) | 1988-02-20 | 1988-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2167288U JPH01125356U (tr) | 1988-02-20 | 1988-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125356U true JPH01125356U (tr) | 1989-08-25 |
Family
ID=31239112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2167288U Pending JPH01125356U (tr) | 1988-02-20 | 1988-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125356U (tr) |
-
1988
- 1988-02-20 JP JP2167288U patent/JPH01125356U/ja active Pending