JPH01123079A - Amorphous ni-p alloy - Google Patents
Amorphous ni-p alloyInfo
- Publication number
- JPH01123079A JPH01123079A JP28119687A JP28119687A JPH01123079A JP H01123079 A JPH01123079 A JP H01123079A JP 28119687 A JP28119687 A JP 28119687A JP 28119687 A JP28119687 A JP 28119687A JP H01123079 A JPH01123079 A JP H01123079A
- Authority
- JP
- Japan
- Prior art keywords
- nickel
- ions
- agent
- amorphous
- complexing agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 22
- 239000000956 alloy Substances 0.000 title claims abstract description 22
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000007747 plating Methods 0.000 claims abstract description 34
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000011574 phosphorus Substances 0.000 claims abstract description 31
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 31
- 239000008139 complexing agent Substances 0.000 claims abstract description 27
- 229910018104 Ni-P Inorganic materials 0.000 claims abstract description 16
- 229910018536 Ni—P Inorganic materials 0.000 claims abstract description 16
- 238000005260 corrosion Methods 0.000 claims abstract description 15
- 230000007797 corrosion Effects 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 12
- 238000007772 electroless plating Methods 0.000 claims abstract description 10
- 239000003002 pH adjusting agent Substances 0.000 claims abstract description 8
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 4
- 229910001453 nickel ion Inorganic materials 0.000 claims description 50
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims description 28
- 238000001556 precipitation Methods 0.000 claims description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 24
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 7
- 239000011889 copper foil Substances 0.000 abstract description 5
- 230000008021 deposition Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 abstract 7
- 238000000151 deposition Methods 0.000 abstract 2
- 229910001096 P alloy Inorganic materials 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 11
- 239000010410 layer Substances 0.000 description 10
- 235000015165 citric acid Nutrition 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910001413 alkali metal ion Inorganic materials 0.000 description 4
- -1 alkali metal salt Chemical class 0.000 description 4
- 230000005389 magnetism Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000001509 sodium citrate Substances 0.000 description 4
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 4
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 3
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 3
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 3
- 229910001415 sodium ion Inorganic materials 0.000 description 3
- FTLYMKDSHNWQKD-UHFFFAOYSA-N (2,4,5-trichlorophenyl)boronic acid Chemical compound OB(O)C1=CC(Cl)=C(Cl)C=C1Cl FTLYMKDSHNWQKD-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 2
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 2
- 235000011130 ammonium sulphate Nutrition 0.000 description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 2
- PHFQLYPOURZARY-UHFFFAOYSA-N chromium trinitrate Chemical compound [Cr+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O PHFQLYPOURZARY-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- YNQRWVCLAIUHHI-UHFFFAOYSA-L dilithium;oxalate Chemical compound [Li+].[Li+].[O-]C(=O)C([O-])=O YNQRWVCLAIUHHI-UHFFFAOYSA-L 0.000 description 2
- IRXRGVFLQOSHOH-UHFFFAOYSA-L dipotassium;oxalate Chemical compound [K+].[K+].[O-]C(=O)C([O-])=O IRXRGVFLQOSHOH-UHFFFAOYSA-L 0.000 description 2
- 229960002449 glycine Drugs 0.000 description 2
- 235000013905 glycine and its sodium salt Nutrition 0.000 description 2
- AMXOYNBUYSYVKV-UHFFFAOYSA-M lithium bromide Chemical compound [Li+].[Br-] AMXOYNBUYSYVKV-UHFFFAOYSA-M 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- IIPYXGDZVMZOAP-UHFFFAOYSA-N lithium nitrate Chemical compound [Li+].[O-][N+]([O-])=O IIPYXGDZVMZOAP-UHFFFAOYSA-N 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229960003975 potassium Drugs 0.000 description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 description 2
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 229940085605 saccharin sodium Drugs 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- ZNCPFRVNHGOPAG-UHFFFAOYSA-L sodium oxalate Chemical compound [Na+].[Na+].[O-]C(=O)C([O-])=O ZNCPFRVNHGOPAG-UHFFFAOYSA-L 0.000 description 2
- 229940039790 sodium oxalate Drugs 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- CYDQOEWLBCCFJZ-UHFFFAOYSA-N 4-(4-fluorophenyl)oxane-4-carboxylic acid Chemical compound C=1C=C(F)C=CC=1C1(C(=O)O)CCOCC1 CYDQOEWLBCCFJZ-UHFFFAOYSA-N 0.000 description 1
- BDDLHHRCDSJVKV-UHFFFAOYSA-N 7028-40-2 Chemical compound CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O BDDLHHRCDSJVKV-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910021555 Chromium Chloride Inorganic materials 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- RAGLTCMTCZHYEJ-UHFFFAOYSA-K azanium;chromium(3+);disulfate Chemical compound [NH4+].[Cr+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RAGLTCMTCZHYEJ-UHFFFAOYSA-K 0.000 description 1
- HJMZMZRCABDKKV-UHFFFAOYSA-N carbonocyanidic acid Chemical compound OC(=O)C#N HJMZMZRCABDKKV-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- OIDPCXKPHYRNKH-UHFFFAOYSA-J chrome alum Chemical compound [K]OS(=O)(=O)O[Cr]1OS(=O)(=O)O1 OIDPCXKPHYRNKH-UHFFFAOYSA-J 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- QSWDMMVNRMROPK-UHFFFAOYSA-K chromium(3+) trichloride Chemical compound [Cl-].[Cl-].[Cl-].[Cr+3] QSWDMMVNRMROPK-UHFFFAOYSA-K 0.000 description 1
- WYYQVWLEPYFFLP-UHFFFAOYSA-K chromium(3+);triacetate Chemical compound [Cr+3].CC([O-])=O.CC([O-])=O.CC([O-])=O WYYQVWLEPYFFLP-UHFFFAOYSA-K 0.000 description 1
- GRWVQDDAKZFPFI-UHFFFAOYSA-H chromium(III) sulfate Chemical compound [Cr+3].[Cr+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O GRWVQDDAKZFPFI-UHFFFAOYSA-H 0.000 description 1
- XZQOHYZUWTWZBL-UHFFFAOYSA-L chromium(ii) bromide Chemical compound [Cr+2].[Br-].[Br-] XZQOHYZUWTWZBL-UHFFFAOYSA-L 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- JCCYXJAEFHYHPP-OLXYHTOASA-L dilithium;(2r,3r)-2,3-dihydroxybutanedioate Chemical compound [Li+].[Li+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O JCCYXJAEFHYHPP-OLXYHTOASA-L 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- XIXADJRWDQXREU-UHFFFAOYSA-M lithium acetate Chemical compound [Li+].CC([O-])=O XIXADJRWDQXREU-UHFFFAOYSA-M 0.000 description 1
- 229940071264 lithium citrate Drugs 0.000 description 1
- WJSIUCDMWSDDCE-UHFFFAOYSA-K lithium citrate (anhydrous) Chemical compound [Li+].[Li+].[Li+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O WJSIUCDMWSDDCE-UHFFFAOYSA-K 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 229910001386 lithium phosphate Inorganic materials 0.000 description 1
- HGPXWXLYXNVULB-UHFFFAOYSA-M lithium stearate Chemical compound [Li+].CCCCCCCCCCCCCCCCCC([O-])=O HGPXWXLYXNVULB-UHFFFAOYSA-M 0.000 description 1
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 description 1
- GKQWYZBANWAFMQ-UHFFFAOYSA-M lithium;2-hydroxypropanoate Chemical compound [Li+].CC(O)C([O-])=O GKQWYZBANWAFMQ-UHFFFAOYSA-M 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- UCDPMNSCCRBWIC-UHFFFAOYSA-N orthosulfamuron Chemical compound COC1=CC(OC)=NC(NC(=O)NS(=O)(=O)NC=2C(=CC=CC=2)C(=O)N(C)C)=N1 UCDPMNSCCRBWIC-UHFFFAOYSA-N 0.000 description 1
- CMOAHYOGLLEOGO-UHFFFAOYSA-N oxozirconium;dihydrochloride Chemical compound Cl.Cl.[Zr]=O CMOAHYOGLLEOGO-UHFFFAOYSA-N 0.000 description 1
- 239000006179 pH buffering agent Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000005408 paramagnetism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 description 1
- 235000011056 potassium acetate Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- PHZLMBHDXVLRIX-UHFFFAOYSA-M potassium lactate Chemical compound [K+].CC(O)C([O-])=O PHZLMBHDXVLRIX-UHFFFAOYSA-M 0.000 description 1
- 239000001521 potassium lactate Substances 0.000 description 1
- 235000011085 potassium lactate Nutrition 0.000 description 1
- 229960001304 potassium lactate Drugs 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 229940114930 potassium stearate Drugs 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 239000001472 potassium tartrate Substances 0.000 description 1
- 229940111695 potassium tartrate Drugs 0.000 description 1
- 235000011005 potassium tartrates Nutrition 0.000 description 1
- ANBFRLKBEIFNQU-UHFFFAOYSA-M potassium;octadecanoate Chemical compound [K+].CCCCCCCCCCCCCCCCCC([O-])=O ANBFRLKBEIFNQU-UHFFFAOYSA-M 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- HELHAJAZNSDZJO-OLXYHTOASA-L sodium L-tartrate Chemical compound [Na+].[Na+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O HELHAJAZNSDZJO-OLXYHTOASA-L 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000001540 sodium lactate Substances 0.000 description 1
- 235000011088 sodium lactate Nutrition 0.000 description 1
- 229940005581 sodium lactate Drugs 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- RYYKJJJTJZKILX-UHFFFAOYSA-M sodium octadecanoate Chemical compound [Na+].CCCCCCCCCCCCCCCCCC([O-])=O RYYKJJJTJZKILX-UHFFFAOYSA-M 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 229940080350 sodium stearate Drugs 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000001433 sodium tartrate Substances 0.000 description 1
- 229960002167 sodium tartrate Drugs 0.000 description 1
- 235000011004 sodium tartrates Nutrition 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- TWQULNDIKKJZPH-UHFFFAOYSA-K trilithium;phosphate Chemical compound [Li+].[Li+].[Li+].[O-]P([O-])([O-])=O TWQULNDIKKJZPH-UHFFFAOYSA-K 0.000 description 1
- CENHPXAQKISCGD-UHFFFAOYSA-N trioxathietane 4,4-dioxide Chemical compound O=S1(=O)OOO1 CENHPXAQKISCGD-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 1
- ZXAUZSQITFJWPS-UHFFFAOYSA-J zirconium(4+);disulfate Chemical compound [Zr+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O ZXAUZSQITFJWPS-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は、加熱後も非磁性状態を維持可能な非晶質N
i −P合金に関する。更には、耐食性及び耐摩耗性
を備えた非晶質N i −P合金に関する〈従来の技術
〉
従来、N i −P合金を非晶質とするためには、P含
有量を略7,4原子%以上としなければならないことが
知られている。更には常温雰囲気下で非晶質状態を安定
させるためには、P含有量を15〜25%としなければ
ならない、そして本発明者らは、下記組成のめつき浴を
調製して、無電解めっきによりP含有量が15〜25%
であるN1−P合金を製造する方法を提案している(特
開昭60−248882号公報参照)。[Detailed Description of the Invention] <Industrial Application Field> The present invention provides amorphous N that can maintain a non-magnetic state even after heating.
Regarding i-P alloy. Furthermore, <prior art> regarding an amorphous Ni-P alloy having corrosion resistance and wear resistance. Conventionally, in order to make a Ni-P alloy amorphous, the P content is approximately 7. It is known that the content must be at least atomic percent. Furthermore, in order to stabilize the amorphous state at room temperature, the P content must be 15 to 25%, and the present inventors prepared a plating bath with the following composition and electroless P content is 15-25% depending on plating
proposed a method for manufacturing N1-P alloy (see Japanese Patent Laid-Open No. 60-248882).
浴組成(比較例2) 、 (mol /j2
)硫酸ニッケル 0.13次亜リン酸ナ
トリウム 0.09クエン酸ナトリウム
0.17サツカリンナトリウム 0.0042
C+oHIsN 2 N a s O70,001!7
希硫酸、アンモニア水でpH(=5.0)調製純水で1
ふとする。Bath composition (comparative example 2), (mol /j2
) Nickel sulfate 0.13 Sodium hypophosphite 0.09 Sodium citrate
0.17 Satucharin Sodium 0.0042
C+oHIsN 2 Na s O70,001!7
Adjust pH (=5.0) with dilute sulfuric acid and aqueous ammonia.1 with pure water.
I suddenly thought about it.
尚、上記成分において、硫酸ニッケルはニッケルイオン
を、次°亜リン酸ナトリウムはニッケルイオンの還元剤
を、クエン酸ナトリウムはニッケルイオンの錯化剤を、
サッカリンナトリウムは応力減少剤を、C+oHIsN
2 N aso 7は第1リン析出促進剤を指す。尚
、錯化剤であるクエン酸ナトリウムはめつき浴中で完全
に′f!11111tシている。そして、クエン酸成分
はCaLOyとして、ニッケルケルイオンに対するmo
l比で1/3.5(ニッケルイオン/ CaHsQy
;以下同じ)の値である。In addition, in the above ingredients, nickel sulfate is a nickel ion, sodium hypophosphite is a nickel ion reducing agent, sodium citrate is a nickel ion complexing agent,
Saccharin sodium is a stress reducer, C+oHIsN
2 N aso 7 refers to the primary phosphorus precipitation promoter. Note that sodium citrate, which is a complexing agent, is completely 'f!' in the plating bath. There are 11111t. The citric acid component is expressed as CaLOy, with a mo of nickel Kel ion.
l ratio of 1/3.5 (nickel ion/CaHsQy
; the same applies hereafter).
〈発明が解決しようとする問題点〉
しかしながら、上記発明により製造されたN1−P合金
は、加熱されると、従来のこの種の合金と同様に、非晶
質状態から結晶質状態へ変性してしまい(第1表の比較
例2参照)、耐摩耗性、耐食性、触媒性、非磁性等の所
望の性能を奏さなくなる。<Problems to be Solved by the Invention> However, when the N1-P alloy manufactured by the above invention is heated, it changes from an amorphous state to a crystalline state, similar to conventional alloys of this type. (See Comparative Example 2 in Table 1), and the desired properties such as wear resistance, corrosion resistance, catalytic properties, and non-magnetic properties are no longer exhibited.
かかる合金をエレクトロニクスの分野(例えば、■導体
回路の形成、■導体回路やコネクタ一部表面の保護皮膜
として、■磁気ヘッド、ロータリーエンコーダの摺動表
面層として、開閉器の接点部の表面強化層など)に利用
したとき、可動時の導体周辺に生ずる磁界や摺動摩擦に
より、また接点部ではスパークにより昇温され、磁性体
等の性質を帯びるように変性するおそれがある。更には
、装置組み付は時のハンダゴテその他の熱加工治具の影
響を受け、昇温されることもある。このようにして、当
該合金が変性すると、周辺素子への磁気干渉を起こした
り、磁気媒体の高速走行を阻害したり、ノイズ発生の原
因となる等の問題点を生じる。Such alloys can be used in the field of electronics (for example, ■ Formation of conductor circuits, ■ As a protective film on the surface of conductor circuits and parts of connectors, ■ As sliding surface layers for magnetic heads and rotary encoders, and as surface reinforcement layers for contact parts of switches. etc.), there is a risk that the temperature will rise due to the magnetic field and sliding friction generated around the conductor when it is moving, and due to sparks at the contact point, causing it to change to take on properties such as magnetic material. Furthermore, during device assembly, the temperature may rise due to the influence of soldering irons and other heat processing jigs. When the alloy is denatured in this way, problems arise such as causing magnetic interference with peripheral elements, inhibiting high-speed running of the magnetic medium, and causing noise generation.
ことに、キの対策として、結晶構造においても磁気的影
習のない貴金属(Rh、Pd、Pt、AU等)を用いて
いるが、製造コストが嵩むので好ましくない。Particularly, as a countermeasure against the above problem, noble metals (Rh, Pd, Pt, AU, etc.) which have no magnetic influence even in the crystal structure are used, but this is not preferable because the manufacturing cost increases.
そこで、この発明は、かかる貴金属に代る安価なもであ
って、加熱されても変性しない非晶質N1−P合金を提
供することを目的とする。Therefore, it is an object of the present invention to provide an amorphous N1-P alloy that is an inexpensive alternative to such noble metals and does not change even when heated.
〈問題点を解決するための手段〉
本発明者は、上記目的を達成すべく特開昭60−248
882号公報で提案した発明を改良していった結果、非
晶質のN1−P合金を無電解めっきにより製造する場合
において、ニッケルイオンの錯化剤を所定量用いればよ
いことを見い出し、本発明に想到した。<Means for Solving the Problems> In order to achieve the above object, the present inventor has disclosed
As a result of improving the invention proposed in Publication No. 882, it was discovered that when manufacturing an amorphous N1-P alloy by electroless plating, it is sufficient to use a predetermined amount of a nickel ion complexing agent. I came up with an invention.
即ち、第1の発明は、600℃で加熱した後も、非磁性
状態を維持し、下記成分(ア)又は(イ)を含んだめっ
き浴であって、錯化剤の内のくえん酸成分が、ニッケル
イオンに対する。pal比で1:8.0〜1 : 10
.0含まれているもの、またはそれに相当する量の他の
錯化剤が含まれているものを用いて、無電解めっきによ
り製造される非晶質Ni −P合金である。That is, the first invention is a plating bath that maintains a non-magnetic state even after heating at 600°C and contains the following components (a) or (b), wherein the citric acid component of the complexing agent but for nickel ions. PAL ratio 1:8.0 to 1:10
.. This is an amorphous Ni--P alloy manufactured by electroless plating using a complexing agent containing 0 or an equivalent amount of another complexing agent.
(ア)ニッケルイオン ニッケルイオンの還元剤 ニッケルイオンの錯化剤 pH調整剤 第2リン析出促進剤。(a) Nickel ion Nickel ion reducing agent Complexing agent for nickel ions pH adjuster Secondary phosphorus precipitation accelerator.
(イ)ニッケルイオン
ニッケルイオンの還元剤
ニッケルイオンの錯化剤
pH調整剤
第1リン析出促進剤及び第2リン析出促進剤また、第2
の発明は、600℃で加熱した後も、非磁性状態を維持
するとともに、硝酸(69,8%)に対する耐食性を備
え、既述の成分(ア)又は(イ)を含んだめっき浴であ
って、錯化剤の内のくえん酸成分が、ニッケルイオンに
対するlll01比で178.0〜1 : 10.0含
まれ、またはそれに相当する量の他の錯化剤が含まれる
とともに、元素周期律表のrVa族又はVIa族の金属
が、ニッケルイオンにmol対する比でl:o、15(
ニッケルイオン二金属)以上溶存しているものを用いて
、無電解めっきにより製造される非晶質N i −P合
金である。(a) Nickel ion Reducing agent for nickel ions Complexing agent for nickel ions pH adjuster First phosphorus precipitation promoter and second phosphorus precipitation promoter Also, second phosphorus precipitation promoter
The invention is a plating bath that maintains a non-magnetic state even after heating at 600°C, has corrosion resistance against nitric acid (69.8%), and contains the above-mentioned component (a) or (b). The citric acid component of the complexing agent is contained in an lll01 ratio of 178.0 to 1:10.0 with respect to nickel ions, or an equivalent amount of other complexing agents is contained, and the periodic law of the elements is The rVa group or VIa group metals in the table are nickel ions in a mol ratio of l:o, 15(
It is an amorphous Ni-P alloy manufactured by electroless plating using dissolved nickel ions (two metals) or more.
〈手段の詳細な説明〉 以下、上記手段について詳細に説明する。<Detailed explanation of means> The above means will be explained in detail below.
まずζ第1の発明の非晶質N i −P合金を形成する
ためのめつき浴について説明する。First, a plating bath for forming the amorphous N i -P alloy of the ζ first invention will be described.
めっき浴は、■ニッケルイオン、■ニッケルイオンの還
元剤、■ニッケルイオンの錯化剤、■第2リン析出促進
剤、■第1リン析出促進剤及び■その他の薬剤を含んで
いる。The plating bath contains (1) nickel ions, (2) a reducing agent for nickel ions, (2) a complexing agent for nickel ions, (2) a secondary phosphorus precipitation promoter, (2) a primary phosphorus precipitation promoter, and (2) other agents.
■ニッケルイオン
ニッケルイオンは、通常塩(硫酸ニッケル、塩化ニッケ
ル等)のかたちで添加され、めっき浴11中0.03〜
0.20mol含まれている(以下、0.03〜0.2
0Iloj / Itと表わす)。■Nickel ions Nickel ions are usually added in the form of salts (nickel sulfate, nickel chloride, etc.), and 0.03~
Contains 0.20 mol (hereinafter, 0.03 to 0.2
0Iloj/It).
■ニッケルイオンの還元剤
ニッケルイオンの還元剤には、次亜リン酸ナトリウムを
用いる。添加量は0.05〜0.40mol / 11
とする。■Nickel ion reducing agent Sodium hypophosphite is used as the nickel ion reducing agent. Addition amount is 0.05-0.40mol/11
shall be.
■ニッケルイオンの錯化剤
ニッケルイオンの錯化剤としては、くえん酸、こはく酸
、酒石酸及びグルコン酸等のオキシカルボン酸とその塩
類、アミノ酢酸及びEDTA等ポリアポリアミノカルボ
ン酸又は2種以上が挙げられる。■Complexing agents for nickel ions Examples of complexing agents for nickel ions include oxycarboxylic acids and their salts such as citric acid, succinic acid, tartaric acid, and gluconic acid, and polyapoliaminocarboxylic acids such as aminoacetic acid and EDTA, or two or more thereof. It will be done.
めっき浴中に含まれる量は、くえん酸(C:6H507
としてめつき浴中に存在する)の場合、ニッケルイオン
に対するll1O1比で1:8.O〜1 : 10.0
とする。こはく酸等の他の錯化剤では、それぞれの錯化
能力に応じて、くえん酸の場合に相当する量とする(実
施例6.7参照)。The amount contained in the plating bath is citric acid (C:6H507
present in the plating bath), the ll1O1 ratio to nickel ions is 1:8. O~1: 10.0
shall be. For other complexing agents, such as succinic acid, the amounts are comparable to those for citric acid, depending on the respective complexing capacity (see Example 6.7).
くえん酸の場合において、ニッケルイオンに対するmo
l比が1:8.0未満になると、600℃で加熱したと
き非磁性を維持できない(比較例3゜4参照)。また、
ニッケルイオンに対するmol比が1710.0を越え
ると、めっきの析出速度が低下するので、それぞれ好ま
しくない。尚、当該mol比が1/10.0を越えた場
合にも、非晶質N1−P合金は600℃で加熱したとき
非磁性状態を維持できた。In the case of citric acid, mo for nickel ion
When the l ratio is less than 1:8.0, nonmagnetism cannot be maintained when heated at 600°C (see Comparative Example 3°4). Also,
If the molar ratio to nickel ions exceeds 1710.0, the deposition rate of plating decreases, which is not preferable. Note that even when the molar ratio exceeded 1/10.0, the amorphous N1-P alloy was able to maintain a nonmagnetic state when heated at 600°C.
上記量のくえん酸は、通常アルカリ金属塩としてめっき
浴中へ添加される(他のオキシカルボン酸も同様である
)。この場合、ナトリウム塩として加えるときには、ニ
ッケルイオンとナトリウムイオンとのll1O1比を1
:1.9〜1:3.5(ニッケルイオン:ナトリウムイ
オン;以下同じ)とすることが好ましい。1:1.9未
満の条件では、銅板を被めっき材としたときに、当該銅
板が侵食されるという不具合がある。また、1:3.5
を超えてナトリウムイオンを存在させる必要はない。The above amount of citric acid is usually added to the plating bath as an alkali metal salt (the same applies to other oxycarboxylic acids). In this case, when adding it as a sodium salt, the ll1O1 ratio of nickel ions and sodium ions is set to 1.
:1.9 to 1:3.5 (nickel ion:sodium ion; the same applies hereinafter) is preferable. If the ratio is less than 1:1.9, there will be a problem that the copper plate will be eroded when the copper plate is used as the material to be plated. Also, 1:3.5
It is not necessary to have sodium ions present in excess of .
また、リチウム、カリウムなどのアルカリ金属塩として
加えるときには、アルカリ金属イオンの量を、後述の第
2リン析出促進剤との関係で調整する必要がある。Furthermore, when adding as an alkali metal salt such as lithium or potassium, the amount of the alkali metal ion needs to be adjusted in relation to the second phosphorus precipitation promoter described later.
■第2リン析出促進剤
第2リン析出促進剤には、既述の公報に示されている硫
酸アンモニウム、硫酸リチウム、硫酸カリウム、硫酸ア
ンモニウムから選ばれる1種又は2種以上のものを用い
ることができる。■Second phosphorus precipitation accelerator As the secondary phosphorus precipitation accelerator, one or more types selected from ammonium sulfate, lithium sulfate, potassium sulfate, and ammonium sulfate shown in the above-mentioned publications can be used. .
更には、この発明を検討するうちに、本発明者は、第2
リン析出促進剤として、リチウムイオンが重要なことを
見い出した。つまり、第2リン析出促進剤として、上記
のものの他に、塩化リチウム、塩化カリウム、塩化ナト
リウム、臭化リチウム、臭化カリウム、臭化ナトリウム
、硝酸リチウム1硝酸カリウム、硝酸ナトリウム、リン
酸リチウム、リン酸カリウム、リン酸ナトリウム、はう
酸リチウム、はう酸カリウム、はう酸ナトリウム、硫酸
ナトリウム等の無機塩、酢酸リチウム、酢酸カリウム、
酢酸ナトリウム、くえん酸リチウム、くえん酸カリウム
、くえん酸ナトリウム、酒石酸リチウム、酒石酸カリウ
ム、酒石酸ナトリウム、乳酸リチウム、乳酸カリウム、
乳酸ナトリウム、しゆう酸リチウム、しゆう酸カリウム
、しゆう酸ナトリウム、ステアリン酸リチウム、ステア
リン酸カリウム、ステアリン酸ナトリウム等有機塩−f
ill又は2 ff11以上を用いることができる。尚
、このアルカリ金属イオンは錯化剤成分とともに加えら
れることがある(各実施例参照)。Furthermore, while considering this invention, the inventor discovered the second
We discovered that lithium ions are important as phosphorus precipitation promoters. In other words, in addition to the above-mentioned secondary phosphorus precipitation promoters, lithium chloride, potassium chloride, sodium chloride, lithium bromide, potassium bromide, sodium bromide, lithium nitrate, potassium nitrate, sodium nitrate, lithium phosphate, phosphorus Inorganic salts such as acid potassium, sodium phosphate, lithium oxalate, potassium oxalate, sodium oxalate, sodium sulfate, lithium acetate, potassium acetate,
Sodium acetate, lithium citrate, potassium citrate, sodium citrate, lithium tartrate, potassium tartrate, sodium tartrate, lithium lactate, potassium lactate,
Organic salts such as sodium lactate, lithium oxalate, potassium oxalate, sodium oxalate, lithium stearate, potassium stearate, sodium stearate, etc.-f
ill or 2 ff11 or more can be used. Note that this alkali metal ion may be added together with a complexing agent component (see each example).
めっき浴における第2リン析出促進剤としてのアルカリ
金属イオンの量は、第1リン析出促進剤を共存させない
場合において、ニッケルイオンに対するll1O1比で
1:0.50(ニッケルイオン:アルカリ金属イオン:
以下同じ)以上であることが好ましい。1 : 0.5
0未満になると、非磁性のN1−P合金が得られない(
第1表の比較例7参照)。The amount of alkali metal ions as the second phosphorus precipitation promoter in the plating bath is 1:0.50 (nickel ions:alkali metal ions:
The same applies hereinafter) or more is preferable. 1 : 0.5
If it is less than 0, a non-magnetic N1-P alloy cannot be obtained (
(See Comparative Example 7 in Table 1).
■第1リン析出促進剤
第1リン析出促進剤には、既述の公報に示されているC
+aHISN 2 N a 307 (以下、HE
DTA)を用いることができ。■First phosphorus precipitation accelerator The first phosphorus precipitation accelerator includes C
+aHISN 2 N a 307 (hereinafter referred to as HE
DTA) can be used.
更には、この発明を検討するうちに、第1リン析出促進
剤として、他のアミン類も作用することが見い出された
。Furthermore, while studying this invention, it was discovered that other amines also act as primary phosphorus precipitation promoters.
第1リン析出促進剤に適用できるアミン類として、ED
TA、ニトリロ酢酸、アミノ酢酸、ジエチレントリアミ
ン・トリ酢酸、ジエチレントリアミン・ペンタ酢酸、イ
ミノジ酢酸、シクロヘキシレンジアミン・テトラ酢酸を
挙げることができる。尚、これらのアミン類は、単体若
しくはこれらのアルカリ金属塩のかたちで、めっき浴へ
添加される。As amines applicable to the primary phosphorus precipitation promoter, ED
Examples include TA, nitriloacetic acid, aminoacetic acid, diethylenetriamine/triacetic acid, diethylenetriamine/pentaacetic acid, iminodiacetic acid, and cyclohexylenediamine/tetraacetic acid. Note that these amines are added to the plating bath either alone or in the form of their alkali metal salts.
既述の公報に示されたもの以外の第1リン析出促進剤と
第2リン析出促進剤は、ニッケルイオンの錯化剤が通常
量のめつき浴の場合−非晶質N1−P合金は加熱により
磁性体へ変性する(第3表の比較例A−G参照)−にも
、適用される。The first phosphorus precipitation promoter and the second phosphorus precipitation promoter other than those shown in the above-mentioned publications are used in the case of a plating bath containing a normal amount of a nickel ion complexing agent - in the case of an amorphous N1-P alloy. This also applies to materials that change into magnetic materials by heating (see Comparative Examples A to G in Table 3).
これら第2リン析出促進剤と■第1リン析出促進剤は、
第2リン析出促進剤の一方、若しくは両方がめつき浴へ
加えられる。These secondary phosphorus precipitation accelerators and ■ primary phosphorus precipitation accelerators are:
One or both of the secondary phosphorus precipitation promoters are added to the plating bath.
■その他の薬剤
その他のめつき浴に含まれる薬剤としては、−殻内な希
硫酸、希塩酸及びアンモニア等のpH調整剤(これによ
り、めっき浴のpHは5.0〜5.2に調整される)、
無機酸、有機酸とそのアルカリ塩等の解離定数の小さい
成分等のpH緩衝剤、サッカリンナトリウム等の応力I
H&剤等が挙げられる。■Other chemicals Other chemicals contained in the plating bath include - pH adjusting agents such as dilute sulfuric acid, dilute hydrochloric acid, and ammonia (this adjusts the pH of the plating bath to 5.0 to 5.2. ),
pH buffering agents such as components with small dissociation constants such as inorganic acids, organic acids and their alkali salts, stress I such as saccharin sodium, etc.
Examples include H& agents.
次に、第2の発明の非晶質N i −P合金を形成する
ためのめつき浴について説明をする。Next, a plating bath for forming the amorphous Ni-P alloy of the second invention will be explained.
このめっき浴は、既述の第1の発明のめつき浴へ、更に
元素周期律表のIVa族又はVr a族の金属が溶存さ
れているものである。This plating bath is the same as the plating bath of the first aspect of the invention described above, in which a metal of group IVa or group Vra of the periodic table of elements is further dissolved.
IV a 族の金属の中ではジルコニウム、■a族の金
属の中ではクロムが好ましい。これらの金属は、塩化ジ
ルコニウム、オキシ塩化ジルコニウム。Zirconium is preferred among the IV a group metals, and chromium is preferred among the a group metals. These metals are zirconium chloride and zirconium oxychloride.
硫酸ジルコニウム、オキシ硫酸ジルコニウム、及び硫酸
クロム、塩化クロム、硫酸カリウムクロム、酢酸クロム
、硝酸クロム、硫酸クロムアンモニウム、臭化クロム等
のかたちでめっき浴へ添加される。It is added to the plating bath in the form of zirconium sulfate, zirconium oxysulfate, chromium sulfate, chromium chloride, potassium chromium sulfate, chromium acetate, chromium nitrate, chromium ammonium sulfate, chromium bromide, etc.
該金属の添加量は、ニッケルイオンに対するm。The amount of the metal added is m relative to nickel ions.
l比で、1:0.15(ニッケルイオン:該金属;以下
同じ)以上である。1:0.15未満では、耐食性に劣
るので好ましくない(第2表の比較例9参照)。また、
本発明者の検討によれば、1:1.20を超えて添加す
る必要はない。The ratio is 1:0.15 (nickel ion:the metal; the same applies hereinafter) or more. If it is less than 1:0.15, it is not preferable because the corrosion resistance is poor (see Comparative Example 9 in Table 2). Also,
According to the studies of the present inventors, there is no need to add more than 1:1.20.
上記各めっき浴を用いて、−数的な作業により、無電解
めっきを行なう。尚、被めっき材は、讃材その他の金属
、セラミックス、半導体、プラスチック等特に限定され
ないが、金属以外の場合には、前処理(エツチングや触
媒層の形成等)が必要となる。Using each of the above plating baths, electroless plating is performed through numerical operations. The material to be plated is not particularly limited, and may include wood and other metals, ceramics, semiconductors, plastics, etc., but in the case of materials other than metals, pretreatment (etching, formation of a catalyst layer, etc.) is required.
〈発明の効果〉
以上説明した第1の発明の非晶質N i −P合金は、
600℃で加熱されても、非磁性状態を維持できる。こ
れにより、エレクトロニクスの分野(例えば、■導体回
路の形成、■導体回路やコネクタ一部表面の保護皮膜と
して、■磁気ヘッド、ロータリーエンコーダの摺動表面
層として、開閉器の接点部の表面強化層など)に利用可
能となる。<Effects of the Invention> The amorphous Ni-P alloy of the first invention described above has the following characteristics:
Even when heated at 600°C, it can maintain its non-magnetic state. As a result, it can be used in the field of electronics (for example, ■ Formation of conductor circuits, ■ As a protective film on the surface of conductor circuits and parts of connectors, ■ As a sliding surface layer for magnetic heads and rotary encoders, and as a surface reinforcement layer for contact parts of switchgears. etc.) will be available.
そして、この非晶質N i −P合金は無電解めっきに
より製造されるので、均質で均一厚みに形成できZ安価
であるという効果もある。Since this amorphous Ni--P alloy is manufactured by electroless plating, it can be formed to be homogeneous and have a uniform thickness, and has the advantage of being inexpensive.
尚、この発明の非晶質N i −P合金を600℃で加
熱しても、これが非磁性状態を維持していることは、当
該N1−P合金が、600℃で加熱されても非晶質を維
持可能なことを、推定させる。The fact that the amorphous Ni-P alloy of this invention maintains its non-magnetic state even when heated at 600°C means that the N1-P alloy is amorphous even when heated at 600°C. It is assumed that quality can be maintained.
600℃以下の温度(例えば270℃)で加熱したとき
にも、非晶質N i −P合金の自己発熱反応のため、
非晶質N i −P合金は当該加熱温度以上に昇温され
ると考えられる。Even when heated at a temperature below 600°C (e.g. 270°C), due to the self-heating reaction of the amorphous Ni-P alloy,
It is considered that the amorphous Ni-P alloy is heated to a temperature higher than the heating temperature.
第2の発明の非晶質N i −P合金は、上記第1の発
明の非晶質N i −P合金の効果に加えて、硝酸(6
9,8%)に対する耐食性を有する。In addition to the effects of the amorphous Ni-P alloy of the first invention, the amorphous Ni-P alloy of the second invention has the following properties:
9.8%).
この明細書において、「硝酸(69,8%)に対する耐
食性を有する」とは、10μmの厚さの非晶質N1−P
合金層を硝酸(89,8%)へ14時間以上浸したとき
、当該合金層が消失しないことをいう。In this specification, "having corrosion resistance to nitric acid (69.8%)" means amorphous N1-P with a thickness of 10 μm.
This means that the alloy layer does not disappear when the alloy layer is immersed in nitric acid (89.8%) for 14 hours or more.
尚、硝酸(Ii9.8%)に対する耐食性を有すること
は、この第2の発明の非晶質N i −P合金が、通常
のN1−P合金以上の耐食性を有することを示す。通常
はIN〜2N塩酸に対する耐食性が検討される。また、
本発明者の検討により、濃塩酸(35%)に対する耐食
性も確認されている。In addition, the fact that it has corrosion resistance to nitric acid (Ii 9.8%) indicates that the amorphous Ni-P alloy of the second invention has corrosion resistance higher than that of a normal N1-P alloy. Corrosion resistance to IN to 2N hydrochloric acid is usually examined. Also,
Corrosion resistance against concentrated hydrochloric acid (35%) has also been confirmed through studies by the present inventors.
かかる耐食性の向上に伴ない、第2の発明の非晶質N
i −P合金では耐摩耗性も向上していると推定される
。Along with such improvement in corrosion resistance, the amorphous N of the second invention
It is presumed that the i-P alloy also has improved wear resistance.
〈実施例〉
以下、上記効果を確認するための実施例について説明を
する。<Example> Hereinafter, an example for confirming the above effects will be described.
第1の発明
実施例用のめつき浴及び比較例用のめつき浴は、それぞ
れ第1表に示す成分を含有している。The plating bath for the first invention example and the plating bath for the comparative example each contain the components shown in Table 1.
このようなめつき浴(90℃)を用いて、無電解めっき
により20μmX5cmX5cmの銅箔の両面へ、10
μmの厚さの非晶質N1−P合金層を形成した。比較例
8は、75μmX1.2cmX O,55c mのステ
ンレス鋼(SUS304)である(銅箔と略同じ重量と
しである)。Using such a plating bath (90°C), 10% of the copper foil was coated on both sides of a 20 μm x 5 cm x 5 cm copper foil by electroless plating.
An amorphous N1-P alloy layer with a thickness of μm was formed. Comparative Example 8 is a 75 μm×1.2 cm×55 cm stainless steel (SUS304) (approximately the same weight as the copper foil).
磁性感応試験は、上記により得られた試験片1を第1図
の如く、曲率半径が略0.25cmの支持台3に裁置し
、Sm−Co磁石5を試験片1の端部へ水平方向と垂直
方向の両方向から接近させて、試験片1が動くかどうか
を目視により判断した(磁性感応試験I)。試験片が動
いた場合をX、かすかに動く場合を△、動かない場合を
◎とした。結果を第1表に示す。In the magnetic sensitivity test, the test piece 1 obtained above is placed on a support stand 3 with a radius of curvature of approximately 0.25 cm, as shown in FIG. It was visually judged whether the test piece 1 moved by approaching it from both the direction and the perpendicular direction (magnetic sensitivity test I). When the test piece moved, it was evaluated as X, when it moved slightly, it was evaluated as △, and when it did not move, it was evaluated as ◎. The results are shown in Table 1.
尚、磁石5は、(BH)max=22NG・Oe1外形
6φX高さ5mm:3000Gaussのものを5個直
列に重ねて、棒状にしたものである更に磁石5を除去し
た後、磁針を、磁石5を接近させた試験片1の端部へ、
接近させる。そして、残留磁気で磁針が振れるかどうか
を目視により判断した(磁性感応試験I+ ) 、、磁
針が振れた場合を×1振れない場合を◎とした。結果を
81表に示す。In addition, the magnet 5 is made into a bar shape by stacking five 3000 Gauss in series (BH)max=22NG・Oe1 outer diameter 6φ×height 5mm.After removing the magnet 5, the magnetic needle is To the end of the test piece 1, which is approached by
bring them closer. Then, it was visually determined whether the magnetic needle could swing due to residual magnetism (Magnetic Sensitivity Test I+).If the magnetic needle swings, it is evaluated as ×1 if it does not swing. The results are shown in Table 81.
この非晶質N1−P合金層は、実施例用のめつき浴から
形成されたもの、及び比較例1〜7用のめつぎ浴から形
成されたものを問わず、加熱前のものは、非磁性を示し
た。Regardless of whether this amorphous N1-P alloy layer was formed from the plating bath for Examples or from the plating bath for Comparative Examples 1 to 7, the layer before heating was It showed non-magnetism.
その後、各試験片を600℃で10分加熱し、上記磁性
感応試験Iを繰り返した。同様に結果を第1表に示す。Thereafter, each test piece was heated at 600° C. for 10 minutes, and the above magnetic sensitivity test I was repeated. Similarly, the results are shown in Table 1.
実施例の非晶質N1−P合金層では、加熱前、加熱後と
もに非磁性を示したのに対し、加熱後の第4.5比較例
では常磁性を、残りの比較例は全部が硬磁性を示した。The amorphous N1-P alloy layer of the example exhibited non-magnetism both before and after heating, while the 4.5 comparative example after heating showed paramagnetism, and the remaining comparative examples all showed hardness. It showed magnetism.
次に、第2表の各実施例9〜12に示した成分を含有
しためつき浴を用いて、20μmx5cmx5cmの銅
箔の両面へ、10μmの厚さの非晶質N1−P合金層を
形成した(第2の発明)。Next, a 10 μm thick amorphous N1-P alloy layer was formed on both sides of a 20 μm x 5 cm x 5 cm copper foil using a matting bath containing the components shown in Examples 9 to 12 in Table 2. (Second invention).
これについては、上記磁性感応試験の他に、下記耐食性
試験を、加熱前後において行なった。Regarding this, in addition to the magnetic sensitivity test described above, the following corrosion resistance test was conducted before and after heating.
この耐食性試験は、試験片1を濃塩酸又は濃硝酸へ浸し
、試験片1が消失するかどうかを目視により判定した。In this corrosion resistance test, the test piece 1 was immersed in concentrated hydrochloric acid or concentrated nitric acid, and whether or not the test piece 1 disappeared was visually determined.
消失した時間を第2表に示す。尚、表中の1は表中の時
間を経過してもN1−P合金が消失しないことを指す。The time of disappearance is shown in Table 2. Note that 1 in the table indicates that the N1-P alloy does not disappear even after the time specified in the table has passed.
第2表の結果から、第8〜11実施例では、好適な耐食
性を示すことがわかる。From the results in Table 2, it can be seen that Examples 8 to 11 exhibit suitable corrosion resistance.
第3表に示す検討例A−Gは、この発明には含まれない
が、従来公報(特開昭60−248882号公報)に記
載されたものとは異なるめっき浴により製造されたにも
かかわらず、加熱前においては、非磁性を示した。よっ
て、検討例A−GのN1−P合金は非晶質であることが
推定される。Study examples A to G shown in Table 3 are not included in the present invention, although they were manufactured using a different plating bath from that described in the conventional publication (Japanese Unexamined Patent Publication No. 60-248882). First, it exhibited nonmagnetic properties before heating. Therefore, it is presumed that the N1-P alloys of Study Examples A to G are amorphous.
尚、めっき条件は第1表と同じである。The plating conditions are the same as in Table 1.
第1図は、磁性感応試験Iの方法を示す斜視図である。 l・・・試験片、 5・・・磁石。 特 許 出 願 人 FIG. 1 is a perspective view showing the method of magnetic sensitivity test I. l... test piece, 5...Magnet. Patent applicant
Claims (1)
錯化剤の内のくえん酸成分が、ニッケルイオンに対する
mol比で1:8.0〜1:10.0(ニッケルイオン
:C_6H_5O_7)含まれているもの、またはそれ
に相当する量の他の錯化剤が含まれているものを用いて
、 無電解めつきにより製造される 非晶質Ni−P合金: (ア)ニッケルイオン ニッケルイオンの還元剤 ニッケルイオンの錯化剤 pH調整剤 第2リン析出促進剤。 (イ)ニッケルイオン ニッケルイオンの還元剤 ニッケルイオンの錯化剤 pH調整剤 第1リン析出促進剤及び第2リン析出促進剤(2)60
0℃で加熱した後も、非磁性状態を維持するとともに、 硝酸(69.8%)に対する耐食性を備え、下記成分(
ア)又は(イ)を含んだめつき浴であつて、錯化剤の内
のくえん酸成分が、ニッケルイオンに対するmol比で
1:8.0〜1:10.0(ニッケルイオン:C_6H
_5O_7)含まれ、またはそれに相当する量の他の錯
化剤が含まれるとともに、元素周期律表のIVa族又はV
Ia族の金属が、ニッケルイオンに対するmol比で1
:0.15(ニッケルイオン:該金属)以上溶存してい
るものを用いて、 無電解めつきにより製造される 非晶質Ni−P合金; (ア)ニッケルイオン ニッケルイオンの還元剤 ニッケルイオンの錯化剤 pH調整剤 第2リン析出促進剤。 (イ)ニッケルイオン ニッケルイオンの還元剤 ニッケルイオンの錯化剤 pH調整剤 第1リン析出促進剤及び第2リン析出促進剤(1) A plating bath that maintains a non-magnetic state even after heating at 600°C and contains the following components (a) or (b),
Among the complexing agents, the citric acid component is contained in a molar ratio of 1:8.0 to 1:10.0 (nickel ion: C_6H_5O_7) to nickel ions, or other complexes in an equivalent amount Amorphous Ni-P alloy manufactured by electroless plating using an agent containing: (a) Nickel ion Reducing agent for nickel ions Complexing agent for nickel ions pH adjusting agent Secondary phosphorus precipitation Accelerator. (a) Nickel ion Reducing agent for nickel ions Complexing agent for nickel ions pH adjuster Primary phosphorus precipitation promoter and second phosphorus precipitation promoter (2) 60
It maintains its non-magnetic state even after heating at 0℃, has corrosion resistance against nitric acid (69.8%), and contains the following ingredients (
A plating bath containing a) or (b), wherein the citric acid component in the complexing agent is in a molar ratio of 1:8.0 to 1:10.0 (nickel ion: C_6H
_5O_7) or a corresponding amount of other complexing agents, as well as group IVa or V of the Periodic Table of the Elements.
Group Ia metal has a molar ratio of 1 to nickel ion.
: Amorphous Ni-P alloy produced by electroless plating using 0.15 (nickel ions: the metal) or more dissolved; (a) Nickel ions Reducing agent for nickel ions Nickel ions Complexing agent pH adjuster secondary phosphorus precipitation promoter. (a) Nickel ion Nickel ion reducing agent Nickel ion complexing agent pH adjuster Primary phosphorus precipitation promoter and secondary phosphorus precipitation promoter
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28119687A JPH01123079A (en) | 1987-11-06 | 1987-11-06 | Amorphous ni-p alloy |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28119687A JPH01123079A (en) | 1987-11-06 | 1987-11-06 | Amorphous ni-p alloy |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01123079A true JPH01123079A (en) | 1989-05-16 |
Family
ID=17635684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28119687A Pending JPH01123079A (en) | 1987-11-06 | 1987-11-06 | Amorphous ni-p alloy |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01123079A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02225676A (en) * | 1989-02-23 | 1990-09-07 | Nec Corp | Electroless plating bath |
AU747666B2 (en) * | 1999-02-24 | 2002-05-16 | Hachiyo Engineering Co., Ltd. | Heat pump system of combination of ammonia cycle and carbon dioxide cycle |
JP2004124261A (en) * | 2002-10-04 | 2004-04-22 | Enthone Inc | Electroless precipitation method for metal |
CN100429698C (en) * | 2004-11-30 | 2008-10-29 | 富士通株式会社 | Method of forming NiP nonmagnetic film and method of manufacturing magnetic head using the film |
CN104152879A (en) * | 2014-08-26 | 2014-11-19 | 安捷利电子科技(苏州)有限公司 | A method of manufacturing barrier material-plated copper foil |
CN107523816A (en) * | 2017-08-23 | 2017-12-29 | 广东光华科技股份有限公司 | Chemical nickel plating phosphor bath |
CN114438481A (en) * | 2022-01-24 | 2022-05-06 | 四川轻化工大学 | Amorphous nickel-phosphorus alloy coating and preparation method thereof |
-
1987
- 1987-11-06 JP JP28119687A patent/JPH01123079A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02225676A (en) * | 1989-02-23 | 1990-09-07 | Nec Corp | Electroless plating bath |
AU747666B2 (en) * | 1999-02-24 | 2002-05-16 | Hachiyo Engineering Co., Ltd. | Heat pump system of combination of ammonia cycle and carbon dioxide cycle |
JP2004124261A (en) * | 2002-10-04 | 2004-04-22 | Enthone Inc | Electroless precipitation method for metal |
CN100429698C (en) * | 2004-11-30 | 2008-10-29 | 富士通株式会社 | Method of forming NiP nonmagnetic film and method of manufacturing magnetic head using the film |
CN104152879A (en) * | 2014-08-26 | 2014-11-19 | 安捷利电子科技(苏州)有限公司 | A method of manufacturing barrier material-plated copper foil |
CN107523816A (en) * | 2017-08-23 | 2017-12-29 | 广东光华科技股份有限公司 | Chemical nickel plating phosphor bath |
CN114438481A (en) * | 2022-01-24 | 2022-05-06 | 四川轻化工大学 | Amorphous nickel-phosphorus alloy coating and preparation method thereof |
CN114438481B (en) * | 2022-01-24 | 2023-07-07 | 四川轻化工大学 | Amorphous nickel-phosphorus alloy coating and preparation method thereof |
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