JPH01122254U - - Google Patents

Info

Publication number
JPH01122254U
JPH01122254U JP1837988U JP1837988U JPH01122254U JP H01122254 U JPH01122254 U JP H01122254U JP 1837988 U JP1837988 U JP 1837988U JP 1837988 U JP1837988 U JP 1837988U JP H01122254 U JPH01122254 U JP H01122254U
Authority
JP
Japan
Prior art keywords
collimator
slit
opening
several
bending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1837988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH062198Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1837988U priority Critical patent/JPH062198Y2/ja
Publication of JPH01122254U publication Critical patent/JPH01122254U/ja
Application granted granted Critical
Publication of JPH062198Y2 publication Critical patent/JPH062198Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1837988U 1988-02-15 1988-02-15 微細ビーム成形装置 Expired - Lifetime JPH062198Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1837988U JPH062198Y2 (ja) 1988-02-15 1988-02-15 微細ビーム成形装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1837988U JPH062198Y2 (ja) 1988-02-15 1988-02-15 微細ビーム成形装置

Publications (2)

Publication Number Publication Date
JPH01122254U true JPH01122254U (xx) 1989-08-18
JPH062198Y2 JPH062198Y2 (ja) 1994-01-19

Family

ID=31232974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1837988U Expired - Lifetime JPH062198Y2 (ja) 1988-02-15 1988-02-15 微細ビーム成形装置

Country Status (1)

Country Link
JP (1) JPH062198Y2 (xx)

Also Published As

Publication number Publication date
JPH062198Y2 (ja) 1994-01-19

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