JPH0339240U - - Google Patents

Info

Publication number
JPH0339240U
JPH0339240U JP10021689U JP10021689U JPH0339240U JP H0339240 U JPH0339240 U JP H0339240U JP 10021689 U JP10021689 U JP 10021689U JP 10021689 U JP10021689 U JP 10021689U JP H0339240 U JPH0339240 U JP H0339240U
Authority
JP
Japan
Prior art keywords
slit
ion source
longitudinal direction
plasma generation
extracting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10021689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10021689U priority Critical patent/JPH0339240U/ja
Publication of JPH0339240U publication Critical patent/JPH0339240U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10021689U 1989-08-28 1989-08-28 Pending JPH0339240U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10021689U JPH0339240U (xx) 1989-08-28 1989-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10021689U JPH0339240U (xx) 1989-08-28 1989-08-28

Publications (1)

Publication Number Publication Date
JPH0339240U true JPH0339240U (xx) 1991-04-16

Family

ID=31649235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10021689U Pending JPH0339240U (xx) 1989-08-28 1989-08-28

Country Status (1)

Country Link
JP (1) JPH0339240U (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022510966A (ja) * 2018-12-12 2022-01-28 アクセリス テクノロジーズ， インコーポレイテッド テーラード引出し開口を有するイオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022510966A (ja) * 2018-12-12 2022-01-28 アクセリス テクノロジーズ， インコーポレイテッド テーラード引出し開口を有するイオン源

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