JPH01122060U - - Google Patents
Info
- Publication number
- JPH01122060U JPH01122060U JP1510988U JP1510988U JPH01122060U JP H01122060 U JPH01122060 U JP H01122060U JP 1510988 U JP1510988 U JP 1510988U JP 1510988 U JP1510988 U JP 1510988U JP H01122060 U JPH01122060 U JP H01122060U
- Authority
- JP
- Japan
- Prior art keywords
- bottomed cylindrical
- magnetic
- cylindrical support
- plate
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000498 cooling water Substances 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1510988U JPH01122060U (enExample) | 1988-02-09 | 1988-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1510988U JPH01122060U (enExample) | 1988-02-09 | 1988-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122060U true JPH01122060U (enExample) | 1989-08-18 |
Family
ID=31226877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1510988U Pending JPH01122060U (enExample) | 1988-02-09 | 1988-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122060U (enExample) |
-
1988
- 1988-02-09 JP JP1510988U patent/JPH01122060U/ja active Pending