JPH01121837U - - Google Patents
Info
- Publication number
- JPH01121837U JPH01121837U JP1668488U JP1668488U JPH01121837U JP H01121837 U JPH01121837 U JP H01121837U JP 1668488 U JP1668488 U JP 1668488U JP 1668488 U JP1668488 U JP 1668488U JP H01121837 U JPH01121837 U JP H01121837U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical inner
- laser beam
- head
- inspection device
- condensing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1668488U JPH01121837U (ko) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1668488U JPH01121837U (ko) | 1988-02-10 | 1988-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01121837U true JPH01121837U (ko) | 1989-08-18 |
Family
ID=31229825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1668488U Pending JPH01121837U (ko) | 1988-02-10 | 1988-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01121837U (ko) |
-
1988
- 1988-02-10 JP JP1668488U patent/JPH01121837U/ja active Pending