JPH01121142A - Movable stage - Google Patents
Movable stageInfo
- Publication number
- JPH01121142A JPH01121142A JP27971487A JP27971487A JPH01121142A JP H01121142 A JPH01121142 A JP H01121142A JP 27971487 A JP27971487 A JP 27971487A JP 27971487 A JP27971487 A JP 27971487A JP H01121142 A JPH01121142 A JP H01121142A
- Authority
- JP
- Japan
- Prior art keywords
- balancer
- moved
- mass
- speed
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
- B23Q11/0035—Arrangements for preventing or isolating vibrations in parts of the machine by adding or adjusting a mass, e.g. counterweights
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は移動ステージに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a moving stage.
従来の技術としては例えば、特公昭６２−６５５号公報
に示されている移動ステージがある。As a conventional technique, for example, there is a moving stage shown in Japanese Patent Publication No. 62-655.
従来の移動ステージは、テーブルと、前記テーブルを移
動させるための駆動機構と、前記テーブルと等しい質量
のバランサを有し、前記バランサを前記テーブルと同期
して前記テーブルと逆方向に移動させる機構とを含んで
構成される。A conventional movement stage includes a table, a drive mechanism for moving the table, and a balancer having a mass equal to that of the table, and a mechanism for moving the balancer in synchronization with the table in a direction opposite to the table. It consists of:
次に、従来の移動ステージについて図面を参照して詳細
に説明する。Next, a conventional moving stage will be described in detail with reference to the drawings.
第２図は従来の移動ステージの一例を示す斜視図である
。FIG. 2 is a perspective view showing an example of a conventional moving stage.
移動ステージ１２０は、テーブル１２１と、テーブル１
２１と等しい質量を有するバランサ１２４と、送りねじ
１３０と、リニアガイド１３１のを含んで構成される。The moving stage 120 includes a table 121 and a table 1.
21, a feed screw 130, and a linear guide 131.
送りねじ１３０はテーブル１２１の送り部のねじ１３０
ａとバランサの送り部のねし１３０ｂとでは同一ピッチ
て逆向きにねじが切ってあり、これによってテーブル１
２１と同じ質量のバランサ１２４とテーブル１２１とは
逆方向に動くためにテーブル１２１の移動による反作用
は相殺される。この結果チーフル１２１の動きの反作用
による振動を防ぐことが出来る。The feed screw 130 is the screw 130 of the feed portion of the table 121.
a and the thread 130b of the feed section of the balancer are threaded at the same pitch and in opposite directions.
Since the balancer 124, which has the same mass as 21, and the table 121 move in opposite directions, the reaction caused by the movement of the table 121 is canceled out. As a result, vibrations caused by the reaction of the movement of the chiffle 121 can be prevented.
従来の移動ステージではテーブル１２１の反作用を打ち
消すためのバランサ１２４はテーブル１２１と同量のス
トロークを必要とする。In conventional translation stages, the balancer 124 to counteract the reaction of the table 121 requires the same amount of stroke as the table 121.
上述した従来の移動ステージは、テーブルと等しい質量
のバランサをテーブルと同じ速さで逆向きに動かす事で
テーブルを動かす際に生ずるテーブルからの反作用を相
殺しているために、バランサはテーブルと同量のストロ
ークを必要とするので、装置が大きくなり、大きい設置
面積を必要とするという欠点があった。The conventional moving stage described above cancels the reaction from the table that occurs when moving the table by moving the balancer, which has the same mass as the table, at the same speed as the table in the opposite direction, so the balancer has the same mass as the table. This has the disadvantage that the device is large and requires a large footprint because of the large amount of stroke required.
本発明の移動ステージは、テーブルと、前記テーブルを
移動させるための駆動機構と、前記テーブルの質量の所
定量倍の質量のバランサを有し、前記バランサを前記テ
ーブルと同期して前記テーブルの移動速度に対し前記所
定量の逆数倍の速さで前記テーブルと逆方向に移動させ
る機構とを含んで構成される。The moving stage of the present invention includes a table, a drive mechanism for moving the table, and a balancer whose mass is a predetermined amount times the mass of the table, and the balancer moves the table in synchronization with the table. The table includes a mechanism that moves the table in the opposite direction at a speed that is a reciprocal of the predetermined amount.
〔実施例〕
次に本発明の実施例について図面を参照して詳細に説明
する。[Example] Next, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明の１実施例を示す斜視図である。FIG. 1 is a perspective view showing one embodiment of the present invention.
第１図に示す移動ステージは右側が右ねじて左側が左ね
じが切っであるボールスクリュー１０と、右ねじと螺合
している第１のポールナツト２０と、左ねじと螺合して
いる第２のポールナツト３０と、リニアガイド４０と、
ポールナツト２０に結合されているテーブル５０と、テ
ーブル５０と同じ質量でポールナツト３０に結合されて
いるバランサ６０と、ボールスクリュー１０を回転させ
るモータ７０と、フランジ８０とを含んて構成される。The moving stage shown in FIG. 1 includes a ball screw 10 with a right-hand thread on the right side and a left-hand thread on the left side, a first pole nut 20 screwed with the right-hand screw, and a first pole nut 20 screwed with the left-hand screw. 2 pole nut 30, linear guide 40,
It is configured to include a table 50 coupled to the pole nut 20, a balancer 60 having the same mass as the table 50 and coupled to the pole nut 30, a motor 70 for rotating the ball screw 10, and a flange 80.
本実施例ではバランサ６０はテーブル５０のＮ倍の質量
を持たせである。In this embodiment, the balancer 60 has a mass N times that of the table 50.
テーブル５０の移動はモータ７０を回転させる事で行な
われる。即ちモータ７０を回転させてホールスクリュー
１０を回転させると、その回転方向、回転数に従ってポ
ールナツト２０が左右に移動しポールナツト２０に結合
されているテーブル５０を移動させる。The table 50 is moved by rotating the motor 70. That is, when the motor 70 is rotated to rotate the hole screw 10, the pole nut 20 moves left and right according to the rotation direction and rotation speed, thereby moving the table 50 coupled to the pole nut 20.
この際、ボールスクリュー１０の右側は左側とは逆向き
に１／Ｎのピッチでねじが切っであるのでポールナツト
３０に結合されているバランサ６０はテーブル５０とは
反対方向に１／Ｎの速さで移動する。テーブル５０とバ
ランサ６ｏの質量は１：Ｎなので、テーブル５０が移動
する時に発生する反作用は打ち消されてフランジ８ｏの
外には力を与えない。At this time, since the right side of the ball screw 10 is threaded at a pitch of 1/N in the opposite direction to the left side, the balancer 60 connected to the pole nut 30 is threaded at a speed of 1/N in the opposite direction to the table 50. Move with. Since the mass of the table 50 and the balancer 6o is 1:N, the reaction generated when the table 50 moves is canceled out and no force is applied to the outside of the flange 8o.
この様にテーブル５０の移動による反作用を打ち消すの
にバランサ６０の動く量はテーブル５゜の１．／Ｎで良
いので、装置を小型化することが出来、設置面積を節約
出来るという効果がある。In this way, the amount of movement of the balancer 60 to cancel the reaction caused by the movement of the table 50 is 1.5 degrees of the table 5°. /N is sufficient, so the device can be miniaturized and the installation area can be saved.
本発明の移動ステージは、テーブルのＮ倍の質量のバラ
ンサをテーブルの移動速度の１／Ｎの速さで逆向きに動
かすことでテーブルの移動による反作用を打ち消すので
、バランサのストロークはテーブルのストロークの１／
Ｎになるなめ、装置を小型化することができ、設置面積
を節約出来るという効果がある。The moving stage of the present invention cancels the reaction caused by table movement by moving the balancer, which has N times the mass of the table, in the opposite direction at a speed of 1/N of the table movement speed, so the balancer stroke is equal to the table movement. 1/
Since the number of N is reduced, the device can be made smaller and the installation area can be saved.
第１図は本発明の一実施例を示す斜視図、第２図は従来
の一例を示す斜視図である。
１０・・・ボールスクリュー、２０・・・ポールナツト
、３０・・・ポールナツト、４０・・・リニアガイド、
５０・・・テーブル、６０・・・バランサ、７０・・・
モータ、８０・・・フランジ、１２０・・・移動ステー
ジ、１２１・・・テーブル、１２４・・・バランサ、１
３０・・・送りねじ。FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a perspective view showing a conventional example. 10... Ball screw, 20... Pole nut, 30... Pole nut, 40... Linear guide,
50...table, 60...balancer, 70...
Motor, 80... Flange, 120... Moving stage, 121... Table, 124... Balancer, 1
30...Feed screw.
Claims (1)
と、前記テーブルの質量の所定量倍の質量のバランサと
、前記バランサを前記テーブルと同期して前記テーブル
の移動速度に対し前記所定量の逆数倍の速さで前記テー
ブルと逆方向に移動させる機構とを含んで構成されるこ
とを特徴とする移動ステージ。a table; a drive mechanism for moving the table; a balancer having a mass that is twice the mass of the table by a predetermined amount; A moving stage comprising a mechanism for moving the table in the opposite direction at twice the speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27971487A JPH01121142A (en) | 1987-11-04 | 1987-11-04 | Movable stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27971487A JPH01121142A (en) | 1987-11-04 | 1987-11-04 | Movable stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121142A true JPH01121142A (en) | 1989-05-12 |
Family
ID=17614856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27971487A Pending JPH01121142A (en) | 1987-11-04 | 1987-11-04 | Movable stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121142A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU772538B2 (en) * | 1999-09-27 | 2004-04-29 | Sumitomo Electric Industries, Ltd. | Distribution management optical fiber, its manufacturing method, optical communication system employing the optical fiber and optical fiber base material |
-
1987
- 1987-11-04 JP JP27971487A patent/JPH01121142A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU772538B2 (en) * | 1999-09-27 | 2004-04-29 | Sumitomo Electric Industries, Ltd. | Distribution management optical fiber, its manufacturing method, optical communication system employing the optical fiber and optical fiber base material |
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