JPH01120979U - - Google Patents

Info

Publication number

JPH01120979U

JPH01120979U JP1652488U JP1652488U JPH01120979U JP H01120979 U JPH01120979 U JP H01120979U JP 1652488 U JP1652488 U JP 1652488U JP 1652488 U JP1652488 U JP 1652488U JP H01120979 U JPH01120979 U JP H01120979U

Authority

JP

Japan

Prior art keywords

coated

coating

supported

back surface

chuck

Prior art date

1988-02-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 8
• 239000011248 coating agent Substances 0.000 claims description 6
• 238000000576 coating method Methods 0.000 claims description 6
• 238000004140 cleaning Methods 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 235000012431 wafers Nutrition 0.000 description 1