JPH01120937U - - Google Patents
Info
- Publication number
- JPH01120937U JPH01120937U JP1683188U JP1683188U JPH01120937U JP H01120937 U JPH01120937 U JP H01120937U JP 1683188 U JP1683188 U JP 1683188U JP 1683188 U JP1683188 U JP 1683188U JP H01120937 U JPH01120937 U JP H01120937U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- bottom wall
- pair
- side walls
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1683188U JPH01120937U (enExample) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1683188U JPH01120937U (enExample) | 1988-02-10 | 1988-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120937U true JPH01120937U (enExample) | 1989-08-16 |
Family
ID=31230099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1683188U Pending JPH01120937U (enExample) | 1988-02-10 | 1988-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120937U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022041048A (ja) * | 2020-08-31 | 2022-03-11 | パナソニックＩｐマネジメント株式会社 | 処理システム及び処理方法 |
-
1988
- 1988-02-10 JP JP1683188U patent/JPH01120937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022041048A (ja) * | 2020-08-31 | 2022-03-11 | パナソニックＩｐマネジメント株式会社 | 処理システム及び処理方法 |